基于迈克尔逊干涉的傅里叶变换散斑形貌测量技术

提出了电子散斑干涉载频调制测量物体形貌的方法。采用典型的迈克尔逊干涉光路,将物体偏转一微小角度（等效为物面与参考面间形成空气楔）产生等厚干涉,可在物体的表面引入包含物体高度信息的载波干涉条纹。用CCD采集该载波条纹图,利用傅里叶变换法可解调出物体高度的位相信息,从而实现物体的形貌测量。介绍了电子散斑干涉载频调制测量物体形貌的原理,并进行了实物测量,给出了实验结果。由于该方法采用散斑干涉方法测量物体形貌,所以具有灵敏度高的优点。     

相移干涉显微术测量表面微观形貌

在微分干涉相衬显微镜中加入偏振相移装置,实现了对干涉光强的调制,达到了相移的目的,构造了具有纳米级分辨率的相移干涉显微测量系统。编制了一套测试软件及多组数据处理软件,将测量系统的各组成部分用软件进行了连接。分析并解决了测量过程中的技术难题,对纳米表面微观形貌进行了高精度实时自动测量。该测量系统能够准确地重构出纳米表面微观形貌,并给出了定量测量数据。     

基于偏振位相调制的位相轮廓测量

本文介绍了一种用来测量三维物体面形的位相轮廓方法，它是通过将正弦光场投影到被测物面，该光场被物体表面调制后发生位相改变，利用偏振位相调制及位相检测算法计算物面的位相分布，再根据几何关系实现对物体三维形貌的测量。实验装置采用一种偏振位相调制的干涉光场投影装置对光场进行简便而精确的移相，采用ＣＣＤ摄像机记录畸变光场，并用计算机处理和显示测量结果。文中给出了有关实验结果。     

基于双通道剪切干涉的高光谱偏振成像方法

光谱偏振成像技术可同步测量目标的空间信息、光谱成分和偏振特性分量,在天文物理研究、大气成分的探测和生物医学等领域具有巨大的发展潜力。偏振信息的同步获取通常牺牲光谱成像的空间分辨率,为避免光谱成像空间分辨率的降低,提出基于双通道剪切干涉的高光谱偏振成像方法。利用双矩形干涉器实现双通道剪切干涉,两个通道分别进行高分辨率干涉光谱成像以及基于微偏振阵列的光谱偏振成像。分析了双通道剪切干涉以及基于微偏振阵列调制的傅里叶变换光谱偏振成像原理,论述了光谱信息反演方法以及偏振信息提取方法。搭建了实验装置,对实际场景目标进行光谱偏振成像实验,获得了目标的高空间分辨率光谱图像和偏振分量信息。研究表明,该高光谱偏振成像技术可同步进行偏振成像测量和高分辨率光谱成像测量。     

静态调制的光谱偏振成像系统

针对传统光谱偏振成像系统普遍存在的系统结构复杂、需要动态调制、光通量低等问题,提出一种基于静态调制的光谱偏振成像系统,将静态调制偏振探测方法与Savart偏光镜干涉成像原理相结合,可在成像过程中实时获取目标的光谱信息和全部四个Stokes偏振信息。与传统系统相比较,该系统具有无运动部件、无需动态电控调制、没狭缝限制、光通量大等优点。介绍了系统组成和基本原理,搭建了实验装置,实验装置包括二次成像光学系统、偏振调制模块、干涉成像模块、CCD图像采集及数据处理模块等,成像谱段范围为可见光近红外(480~950 nm)。利用实验装置对白板、飞机玩具模型进行了成像实验,验证了该系统的光谱偏振成像数据获取能力。对静态调制的偏振测量精度进行了验证,偏振测量统计误差小于5%。实验结果验证了系统原理的正确性和可行性,获取的光谱偏振成像数据在目标识别、目标分类、遥感探测等方面具有较高的应用价值。     

双波长偏振干涉型应变与温度同时测量的光纤传感器

针对保偏光纤给出了利用双波长偏振干涉型传感器同时测量应变和温度的一般理论，并通过实验证明了这一理论的可行性。对３０ｃｍ长的ｂｏｗ－ｔｉｅ型光纤的实验结果表明，在温度变化７０℃，光纤长度变化５００μｍ测量范围内，最大误差分别为±２．５℃和±８μｍ。由于这一传感器只利用了正交基模的偏振干涉，因此具有较好的稳定性。     

基于多波长干涉的瞬态轮廓检测Mirau显微镜

针对单波长Mirau干涉显微镜存在测量范围小和2π模糊等问题,提出了多波长Mirau偏振干涉显微镜,以实现微观轮廓的大动态范围测量的和表面粗糙度等显微结构的瞬态检测。系统利用R、G、B三个单色LED光源实现多波长干涉;利用彩色偏振相机获取瞬态相移干涉条纹图,降低实时瞬态检测中复杂的环境扰动影响;利用线栅偏振片调节条纹对比度,满足不同被测对象的反射率检测要求。为验证系统方案的可行性,经过系统误差补偿校准后测量标称值为1.993 9μm的标准微米台阶,结果与标称值的偏差约为5.4 nm。利用该方法与Wyko干涉仪对金刚石车削凸面反射镜表面微观轮廓和表面粗糙度进行测量,表面粗糙度测量结果均方根值偏差为3.7 nm,验证了该系统可实现高精度的大动态范围测量。     

斩波式自适应移相干涉技术

研究对环境振动和空气扰动所造成的两相干光束间常数项光程变化不敏感的自适应移相干涉系统，利用偏振分光技术，采用闭环控制，并将高频振幅调制与锁相技术相结合，建立一斩波式自适应移相干涉系统，可对环境振动引起的干涉条纹的抖动进行实时探测并予以光程补偿，将干涉条纹依次锁定在与任意相位差相对应的位置,该方法不受两相干光束间光程差大小的限制且具有高信噪比，阐述了该方法的原理，描述了所建立的系统，并给出了实验结果。     

利用电子散斑相移技术测量物体三维面形的方法

为了获得准确的面形测量,提出了一种相移电子散斑干涉技术测量物体面形的测量方法.利用电子散斑干涉产生载波条纹,该载波条纹受到物体表面高度的调制变得弯曲,引起载波条纹相位的变化,可运用相移技术提取物体的相位信息,最后根据高度和相位之间的关系得到物体的面形.介绍了该方法的原理,利用该方法对球冠物体进行了面形测量,证明该方法测量物体面形是可行性的.由于是采用散斑干涉的方法产生干涉条纹,因此该方法测量物体面形具有灵敏度高的优点.     

超短脉冲偏振纠缠干涉

利用超短脉冲自发参量下转换产生偏振纠缠光子对，通过实验和数值计算分析不同长度BBO晶体对偏振纠缠干涉可见度的影响，并分析窄带干涉滤光片在实验测量中的作用，我们的结果说明减小晶体长度和利用窄带干涉滤光片可有效提高双光子的干涉可见度。     

Multiple-surface interference fringes analysis basing on wavelength-modulated phase shifting interferometry

Phase-shifting interferometry is widely used for high-precision surface measurements, but has difficulty in dealing with parallel optical plates. In this paper, an advanced method is proposed to simultaneously measure surface distributions of parallel optical plates from multiple surface interference fringes. The basic theory behind the technique is by applying wavelength-modulated phase shifting interferometry (WMPSI) to get enough frames of multiple surface interference fringes. In the procession of wavelength-modulated phase shifting, the phase variation for one point of the surface is traced and is processed by Fourier transform, and then the frequency spectrum of every surface can be separated from each other. Therefore, it allows extraction of front surface, back surface and thickness variation from multiple surface interference fringes with high precision.     

Novel Design of Sagnac Interferometry Assisted with Surface Plasmon Resonance Based Sensor Technique

In this work, we demonstrate a novel design to investigate interfacial reaction of optical activity materials, utilizing a Sagnac interferometer assisted with surface plasmon resonance based sensor technique. Upon application to interrogate optical activity, the type-2 optical configuration of close loop in this work can entirely encircle the interaction zone of surface plasmon resonance reacting with optical activity medium, while the type-1 optical configuration of close loop does partially. The greater the geometrical phase owing to the encircled interaction zone between optical activity medium and polarized light, the larger the phase shift of interference pattern modulated by the concentration of optical activity medium. The slope of phase shift in interference phase pattern of p-wave vs. concentration of dextrose solution determined with this method is greatly improved, 3000 times better than that with Lee's method, 18,600 times with Lin's method, and 222,000 times with Chou's method. Besides, the pinch point of phase shift vs. concentration indicates the ending of interference pattern phase shift as the concentration of each tested optical activity medium keeps climbing up, and can reflect the strong dependence of molecular shape during interfacial adsorption.     

Designing of interference pattern in ultra-short pulse laser processing

We have studied material processing by using an interfering ultra-short pulse laser. In this process, an interference pattern is transferred to material surface, and a periodic structure can be generated in a single shot of laser irradiation. Here, it is well known that the period of the interference pattern can be controlled by correlation angle and wavelength. In addition, a composite, doubled in density or designed interference pattern can be formed by controlling the phase shift and variation of amplitude between the interfering laser beams. In this paper, basic patterns of interference are summarized in the case of four-beam correlation.     

一种提高干涉相位识别精度的方法

针对开环相移驱动下的单色光干涉测量,提出一种满足四步法的高精度相位识别的方法。首先选取干涉场中存在适当相位差的两像素点,建立相移驱动单周期内两像素点灰度序列值之间的干涉方程组。运用椭圆拟合获取相应干涉方程组参数,然后通过反算序列相位确定逐点驱动步长或序列相位信息。结合序列相位信息,运用Lagrange抛物插值算法,设计计算满足四步法的4幅干涉图,并计算各像素点的初相位。最后,运用多波长算法计算表面形貌并进行误差分析。实验表明:计算得到的方波多刻线样板的Ra值为0.439 0 m,测量误差为0.23%,此方法降低了对测量条件的硬件与环境要求,满足表面形貌高精度测量的要求。     

Role of interference between localized and propagating surface waves on the extraordinary optical transmission through a subwavelength-aperture array

We report in this Letter that when radiation is incident on a metal surface perforated with an array of ring-shaped subwavelength apertures, the phase difference between the propagating surface Bloch wave and the localized surface wave can be tailored by the geometrical parameters of the array so as to affect the shape of the transmission spectrum. Above the resonant frequency of the aperture, interference between the two kinds of surface waves leads to a minimum in the transmission spectrum, whereas below it, the interference leads to a maximum. We suggest that this feature provides flexibility in engineering surface-wave-based all-optical devices.     

Continual deformation analysis with scanning phase method and time sequence phase method in temporal speckle pattern interferometry

If a laser beam illuminates a continual deformation object surface, it will lead to a temporal speckle pattern on the observation plane. Recording this time-dependent speckle pattern the deformation of the surface of an object can be obtained. Two methods, scanning phase method (SPM) and time sequence phase method (TSPM), have been introduced for measuring the displacement caused by the deformation in temporal speckle pattern interferometry (TSPI). Their principle is that by capturing a series of speckle interference patterns related to the object deformations, the fluctuations in the intensity of the interference patterns can be obtained. Through scanning these fluctuations and estimating both the average intensity and modulation of the temporal speckle interference patterns, the phase maps for whole-field displacements are calculated. In this way one is capable of quantitatively measuring continual displacements simply using a conventional electronic speckle pattern interferometry (ESPI) system without phase shifting or a carrier. The elaboration on the new methods is given in this paper and experiments are performed to demonstrate their performance with a conventional ESPI system.     

光轴平行晶体表面时的锥光干涉图

针对光轴平行晶体表面时的锥光干涉图,提出了计算干涉场中振幅和相位分布的方法,据此绘制完整的干涉图,方便地显示出晶体参数改变时锥光干涉图的变化规律．用CCD摄像机拍摄了铌酸锂晶体的锥光干涉图,结果与理论完全一致。     

Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer

A Fizeau interferometer based set up for measurement of surface forms of plane optical surfaces has been discussed. Phase shifting interferometry has been applied using polarization phase shifter. A linearly polarized (632.8 nm) He–Ne laser has been used as the source. Light reflected from the object and the reference/master surfaces are made circularly polarized in opposite senses by means of two properly oriented quarter wave retardation plates placed at appropriate positions, one inside and other outside the interference cavity of the interferometer, and phase shifts are introduced between the object and the reference/master waves by varying angular orientation of a polarizer/analyzer. Final result is made free from any residual wave-front aberrations introduced by the (intra-cavity) wave plate by subtracting phase values obtained by PSI technique between a high optical quality master surface and the reference surface from that obtained for the test object surface with respect to the same reference surface for each point of the interference field. Results are shown for a plane surface.Advantages of the technique presented are linearity and high accuracy in phase stepping, no perturbation of the interference cavity during the phase shifting and possibility of real time or dynamic interferometry.     

一种四波长轮换的表面形貌干涉测量系统

针对相移干涉法测量表面三维形貌时深度测量范围受波长限制这一问题,提出一种四波长表面形貌干涉测量系统。通过滤波片的轮换,将白光LED光源的光切换出4个不同波长的光源,并依次进行单波长干涉。为解决多波长干涉图像数据处理,采用基于椭圆拟合的算法,在逐帧逐点的相位计算条件下,运用大小尺度相结合的算法实现高精度宽范围的表面形貌测量。实验结果表明:在深度测量范围扩大到约41倍的条件下,测量经中国计量科学研究院采用粗糙度国家基准校准的方波多刻线样板,得到的表面粗糙度数据与校准数据相比,相对误差为4.09%。说明在一定的深度范围内,该系统能够实现表面形貌的高精度测量。