Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation

A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.     

Ion Bombardment Secondaty Electron Maintenance of Steady RF Discharge

The results of both theoretical and experimental study of a steady E-type RF discharge, in which ionization is controlled by fast electrons generated in RF sheaths near the electrodes (y regime), are presented. It is shown that the transition of an RF discharge into the ? regime is of a threshold nature and is accompanied by a sharp increase in plasma density and a decrease in electron temperature. The suggested theoretical model of an RF discharge in the ? regime satisfactorily describes experiments carried out in a wide range of frequencies, RF voltages, and gas pressures.     

Anode plasma structure in a gas discharge with neutral density depleted by ionization

We consider the anode plasma structure in a gas discharge with density of neutral atoms (neutrals) depleted by strong ionization. We obtain analytical solutions of the quasi-neutrality equation for the potential distribution and a condition for the existence of anode plasma in the one-dimensional case for arbitrary potential dependences of the neutral depletion frequency and the electron density. We consider the special cases of a constant neutral depletion frequency, ionization by Maxwellian electrons, and ionization by an intense electron beam under the conditions of collisionless ion motion and Boltzmann thermal electron distribution. The solutions for the first two cases at zero depletion parameter, i.e., at constant gas density, match those obtained in [1] by a power series expansion. In the case of ionization by Maxwellian electrons, the formation of anode plasma at reasonable working-gas flow rates is shown to be possible only at a fairly high electron temperature (if, e.g., xenon is used as the working gas, then T _e ≥ 5 eV). Steady-state solutions of the quasi-neutrality equation under ionization by an intense electron beam exist only if the ratio of the electron beam density to the maximum thermal electron density does not exceed a certain limiting value.     

Kinetic simulations of argon dusty plasma afterglow including metastable atom kinetics

The afterglow of a dusty plasma of rf discharge in argon is simulated by the particle-in-cell-Monte Carlo collision (PIC-MCC) method. The experimental observation that heavy dust contamination of plasma leads to an anomalous increase in the electron density at the beginning of afterglow is explained by release of electrons from the dust surface. Under the assumption that the floating potential of particles is in equilibrium with plasma conditions, the fast cooling of electrons in afterglow plasma due to a rapid escape of hot electrons from the volume leads to a decrease in the magnitude of the floating potential and hence to a loss of charge by dust. The intensive desorption of electrons from nanoparticles is the origin of anomalous behavior of the electron density. At the next stage of afterglow, when the electrons become cool, the plasma decay is defined by ambipolar diffusion. The effect of metastable argon atoms is also considered. Additional ionization due to metastable atom collisions affects the electron temperature but does not change the behavior of the electron density qualitatively.     

Rates and channels of water ionization by a high-current high-voltage pulsed discharge

The experimentally observed growth of the plasma density in a high-current high-voltage pulsed discharge in a liquid medium is compared with the results of calculations based on the effective cross sections for electron-impact ionization and other elementary processes. It is found that, in the initial stage of the discharge, the plasma density grows linearly with time, whereas at densities above 3 × 10¹⁰ cm^?3, the growth becomes exponential due to the collective acceleration of plasma electrons. The gas-vapor fraction of the water medium is ionized by two groups of electrons: low-energy electrons, with energies about several tens of electronvolts, and high-energy ones, with energies in the kiloelectronvolt range. The energy spent on water ionization is estimated and is found to be several times higher than the energy required to ionize a rarefied gas.     

Tonks-Langmuir problem for a bi-Maxwellian plasma

An analytical solution of the Tonks-Langmuir (TL) problem with a bi-Maxwellian electron energy distribution function (EEDF) is obtained for a plasma slab. The solution shows that the ambipolar potential, the plasma density distribution, and the ion flux to the wall are mainly governed by the cold electrons, while the ionization rate and voltage drop across the wall sheath are governed by the hot electrons. The ionization rate by direct electron impact is found to be spatially rather uniform, contrary to the T-L solution where it is proportional to the plasma density distribution. The temperature of hot electrons defined by the ionization balance is found to be close to that of the T-L solution for a mono-Maxwellian EEDF, and is in reasonable agreement with experiments carried out in a low pressure capacitance RF discharge. The energy balance for cold electrons in this discharge shows that their heating by hot electrons via Coulomb interaction is equalized by the cold electrons' escape to the RF electrodes during collapse of the RF sheath     

The Role of High-Velocity Electrons in a Hollow-Cathode Discharge

In this paper, the features of a low-pressure discharge in a hollow cathode are considered. It has been shown that a free mode can be realized with a double electric layer at the cathode and high density of the current of high-velocity electrons in the discharge bulk, considerably exceeding the current density at the cathode. In this case, the rate of ionization by high-velocity electrons considerably exceeds the rate of ionization by plasma electrons.     

温稠密钛电导率计算

温稠密物质是惯性约束核聚变、重离子聚变、Z箍缩动作过程中物质发展和存在的重要阶段. 其热力学性质和辐射输运参数在聚变实验和内爆驱动力学模拟过程中有至关重要的作用. 本文通过建立非理想Saha方程, 结合线性混合规则的理论方法模拟了温稠密钛从10^-5-10 g·cm^-3, 10⁴ K到3×10⁴ K区间的粒子组分分布和电导率随温度密度的变化, 其中粒子组分分布由非理想Saha方程求解得到. 线性混合规则模型计算温稠密钛的电导率时考虑了包括电子、原子和离子之间的多种相互作用. 钛的电导率的计算结果与已有的爆炸丝实验数据相符. 通过电导率随温度密度变化趋势判断, 钛在整个温度区间, 密度0.56 g·cm^-3时发生非金属相到金属相相变. 对于简并系数和耦合系数的计算分析, 钛等离子体在整个温度和密度区间逐渐从弱耦合、非简并状态过渡到强耦合部分简并态.     

温稠密铝等离子体物态方程及其电离平衡研究

温稠密物质的物性参数在惯性约束聚变能源、Z箍缩等高能量密度物理领域的实验结果分析和物理过程数值模拟等方面有着重要的应用价值.本文应用部分电离等离子体模型,在理想自由能的基础上考虑了库仑相互作用、排斥体积作用和极化作用等非理想特性,开展了温稠密等离子体物态方程和电离平衡的研究.计算了温稠密铝等离子体的压强等物态方程数据和在密度为1.0×10^-4-3.0 g/cm^3,温度为1.0×10^4-3.0×10^4 K范围内的粒子组分.计算结果显示,铝等离子体的平均电离度在临界密度区域内随着密度的增加而突然增大.根据非理想Saha方程中有效电离能这一关键参数,分析了铝等离子体平均电离度在临界密度区域内随密度迅速增大的现象.     

On the Kinetics of the Active Zone of the Stationary SF6 Beam Discharge Plasma

The paper deals with the impact of intensive electron attachment on the kinetics of the electrons in the active zone of the stationary band-like beam discharge plasma in SF₆ which is an alternative useful plasma medium for “dry etching”. The energy distribution of the electrons in this plasma was obtained by numerically solving the Boltzmann equation which includes apart from elastic collisions, different exciting collision processes, attachment in electron collisions, direct ionization, the ambipolar loss of electrons, Coulomb interaction between electrons and of electrons with ions and the power input to the electrons by the turbulent electric field. In particular, due to the needed fulfilment of the consistent electron particle balance, for an extended region of the turbulence energy density in this plasma a large impact on the electron kinetics of the intensive electron attachment, which is the prevailing electron loss process, was found enforcing independent of the turbulence energy density always a large power input to the electrons, smooth and only slowly decreasing energy distributions even in the energy region of direct ionization.     

Hydrodynamic Limit for an Arc Discharge at Atmospheric Pressure

In this paper we study a partially ionized plasma that corresponds to an arc discharge at atmospheric pressure. We derive an inviscid hydrodynamic/diffusion limit, characterized by two temperatures, from a system of Boltzmann type transport equations modelling that plasma problem. The original property of this system is that impact ionization is a leading order collisional process. As a consequence, the density of electrons is given in terms of the density of the other species (and its temperature) via a Saha law.     

On the amplification mechanism of the ion-channel laser

The amplification mechanism of the ion-channel laser (ICL) in the low-gain regime is studied. In this concept, a relativistic electron beam is injected into a plasma whose density is comparable to or lower than the beam's density. The head of the electron beam pushes out the plasma electrons, leaving an ion channel. The ion-focusing force causes the electrons to oscillate (betatron oscillations) about the axis and plays a role similar to the magnetic field in a cyclotron autoresonance maser (CARM). Radiation can be produced with wave frequencies from microwaves to X-rays depending on the beam energy and plasma density: ω~2γ^3/2ω_pe, where γ is the Lorentz factor of the beam and ω_pe is the plasma frequency. Transverse (relativistic) bunching and axial (conventional) bunching are the amplification mechanisms in ICLs; only the latter effect operates in free-electron lasers. The competition of these two bunching mechanisms depends on beam velocity ν_0z; their dependences on ν_0z cancel for the cyclotron autoresonance masers. A linear theory is developed to study the physical mechanisms, and a PIC (particle-in-cell) simulation code is used to verify the theory. The mechanism is examined as a possible explanation for experimentally observed millimeter radiation from relativistic electron beams interacting with plasmas     

Plasma parameters of a nonself-sustained microwave discharge created by a programmed pulse

The kinetics of the electrons in the plasma of a nonself-sustained discharge formed at the focus of a microwave beam when the gas is exposed to electromagnetic radiation with an energy flux density that varies with time in a programmed-pulse mode are investigated. It is shown that the temperature of the electrons in the plasma of the localized microwave discharge is of the order of 1 eV and varies weakly during the pump pulse and as the air pressure is varied, while the electron density is an order of magnitude or more lower than the critical density and depends on the level of the pump generator power. It is shown that the degree of ionization of the plasma can be regulated by altering the programmed-pulse mode. Zh. Tekh. Fiz. 67, 19–23 (July 1997)     

13.56 MHz/2 MHz柱状感性耦合等离子体参数的对比研究

通过Langmuir双探针和发射光谱诊断方法,对比研究了驱动频率为13.56 MHz和2 MHz柱状感性耦合等离子体中电子密度和电子温度的径向分布规律.结果表明:在高频和低频放电中,输入功率的增加对等离子体参数产生了不同的影响,高频放电中主要提升了电子密度,低频放电中则主要提升了电子温度.固定气压为10 Pa,分别由高频和低频驱动时,电子密度的径向分布均为"凸型".而电子温度的分布差异比较明显,高频驱动时,电子温度在腔室中心较为平坦,在边缘略有上升;低频驱动时,电子温度随径向距离的增加而逐渐下降.为了进一步分析造成这种差异的原因,在相同放电条件下采集了氩等离子体的发射光谱图,利用分支比法计算了亚稳态粒子的数密度,发现电子温度的径向分布始终与亚稳态粒子的径向分布相反.继续升高气压到100 Pa,发现不论高频还是低频放电,电子密度的径向分布均从"凸型"转变为"马鞍形",较低气压时电子密度的均匀性有了一定的提升,但低频的均匀性更好.     

Beam-plasma discharge in the propagation of a long-pulse relativistic electron beam in a medium-pressure rarefied gas

A theoretical model is given, along with a numerical analysis of the evolution of beam-plasma discharge in the propagation of a long-pulse relativistic electron beam in a rarefied gas at medium pressure. It is shown that the self-stabilization of beam-plasma discharge as a result of longitudinal inhomogeneity of the density of the discharge plasma makes it possible for the beam to traverse the beam chamber with relatively low total energy losses, including ionization losses and energy losses in the generation of oscillations. During the dissociative recombination of electrons and ions of the discharge-driven plasma, heat is released and spent in raising the temperature of the gas. The investigated collective-discharge mechanism underlying heating of the gas for a relativistic beam can be more efficient than the classical heating mechanism due to ionization losses of the beam in pair collisions of its electrons with gas particles. Zh. Tekh. Fiz. 67, 94–98 (May 1997)     

Self-consistent mechanism for sustaining ionization waves in a low-pressure discharge

The possibility of constructing a self-consistent model for the sustaining of ionization waves is demonstrated for a low-pressure discharge in an inert gas. The model is based on the combined solution of the kinetic equation of the electrons and the equation of motion of the ions in a spatially periodic field. The distribution function is constructed in an experimentally measured field and then used to calculate the spatial distributions of the plasma density and the ionization rate. The solution of the equation of motion of the ions makes it possible to reconstruct a field similar to the original one. One specific feature of the mechanism considered is the pronounced nonlocal character of the formation of the electron distribution function by the entire nonuniform potential profile of the ionization wave. Zh. Tekh. Fiz. 67, 24–30 (February 1997)     

Self-Consistent Model of a Positive Column in an Inert Gas Discharge at Low Pressures and Small Currents

A formalism of the self-consistent solution of the kinetic equation and the field equation is described for the positive plasma column in an inert gas discharge. The model considers the presence of electrons trapped in the potential well transfering the discharge current and of free electrons which reach the walls in a free diffusion regime supporting the required ionization level in the discharge. The calculations have been carried out for neon. In the model application range the comparison is made with experimental data of axial fields, wall potentials, wall currents and in some cases with distribution functions. A good correspondence takes place.     

Use of Soft Plasma Ionization Source at Evacuated Air Atmospheres in Time-of-Flight Mass Spectrometry to Suppress Fragmentation of Volatile Organic Compounds

This study describes a measuring system for mass spectrometry, consisting of a glow discharge ionization source for soft plasma ionization and a time-of-flight mass spectrometer, to detect toxic volatile organic compounds rapidly and easily. It is the most important to determine how the complicated fragmentation of such compounds can be suppressed to occur so as to recognize the mass spectra of the volatile organic compounds as their fingerprints. The novelty of this work is that the optimal discharge condition for the soft plasma ionization–time-of-flight mass spectrometer system could be selected, so that the parent mass peak of analyte molecules could be observed both with high sensitivity and with little or no fragmentation of them. Use of air gas at a pressure of 1000 Pa provided the most favorable result for these criteria, whereas, in a previous report, the soft plasma ionization source operating with argon at a pressure of 346 Pa had yielded additional mass peaks of the fragmented species. The reason for this would be explained by the fact that energetic electrons in the plasma, which principally cause the fragmentation of the volatile organic compounds, have lower number density at higher gas pressures, through de-accelerated collisions with the plasma gas.     

Langmuir probe study in the nonresonant current drive regime of helicon discharge

Characterization of the current drive regime is done for helicon wave-generated plasma in a torus, at a very high operating frequency. A radiofrequency-compensated Langmuir probe is designed and used for the measurement of plasma parameters along with the electron energy distributions in radial scans of the plasma. The electron energy distribution patterns obtained in the operational regime suggest that Landau damping cannot be responsible for the efficient helicon discharge in the present study. A typical peaked radial density profile, high plasma temperature and absence of an appreciable amount of energetic electrons for resonant wave-particle interactions, suggest that the chosen operational regime is suitable for the study of nonresonant current drive by helicon wave. Successful and significant current drive achieved in our device clearly demonstrates the capability of nonresonant current drive by helicon waves in the present operational regime.      

Magnetron source of accelerated plasma flow

A new source of an accelerated plasma flow intended for depositing high-quality coatings is described. In this source, a magnetron discharge for cathode target sputtering is combined with a high-voltage discharge with longitudinal oscillation of electrons for ionization of the accrued vapor in which the plasma density is distributed uniformly owing to the application of three-phase ionizer.