Low-coherent light-source angular interferometer using a square prism and the angular-scanning technique

An interferometer based on using low-coherent light source, a square prism, and the angular-scanning technique is proposed for absolute angular-displacement determinations. An angular displacement of the square prism shifts the correlogram, which is modulated by an envelope function, of the interference signal of the beams passing through the prism. This angle can thus be discovered by detecting the shifting of the envelope peak. A setup constructed to validate the interferometer is used. The results of using this setup are then presented.     

Angular interferometer using calcite prism and rotating analyzer

An interferometer using a calcite prism and rotating analyzer is proposed for angular displacement determinations. The calcite prism senses the angular displacements and the rotating analyzer transfers the interference signals from dc-type into ac-type. Compact optical setup and using low-cost devices are thus the advantages of the interferometer. The theory of the interferometer is first demonstrated. A setup constructed to realize the interferometer and the results of using this setup are then presented.     

A displacement measurement system, utilizing a Wollaston interferometer

A dual interferometric displacement measurement system is presented where a Wollaston prism interferometer is employed in conjunction with a normal Michelson interferometer. The system operates without the use of external polarizers, apart from those associated with the Wollaston prism interferometer itself. It is shown that an optical path difference induced in the Michelson interferometer can be detected using the Wollaston prism in a normal interferometer arrangement. Further, the interference pattern produced by the Wollaston prism interferometer changes in a measurable, linear fashion as the optical path difference from the Michelson interferometer alters. A simple theoretical analysis of the system is presented and used to derive a computer model of the optical arrangement. Results from an experimental implementation of the system, using a Wollaston prism with a beam separation of 0.5 degrees and a superluminescent diode, of wavelength 825 nm, as a light source, are included and compared to the results from the computer model.     

Nanometer-scale displacement sensing using self-mixing interferometry with a correlation-based signal processing technique

A self-mixing interferometer is proposed to measure nanometre-scale optical path length changes in the interferometer’s external cavity. As light source, the developed technique uses a blue emitting GaN laser diode. An external reflector, a silicon mirror, driven by a piezo nanopositioner is used to produce an interference signal which is detected with the monitor photodiode of the laser diode. Changing the optical path length of the external cavity introduces a phase difference to the interference signal. This phase difference is detected using a signal processing algorithm based on Pearson’s correlation coefficient and cubic spline interpolation techniques. The results show that the average deviation between the measured and actual displacements of the silicon mirror is 3.1 nm in the 0–110 nm displacement range. Moreover, the measured displacements follow linearly the actual displacement of the silicon mirror. Finally, the paper considers the effects produced by the temperature and current stability of the laser diode as well as dispersion effects in the external cavity of the interferometer. These reduce the sensor’s measurement accuracy especially in long-term measurements.     

一种基于光学倍乘原理的绝对距离干涉测量系统

介绍了一个基于光学倍乘原理的绝对距离干涉测量系统。系统包括两个干涉仪:采用半导体激光器作为光源的定位干涉仪和测量位移的外差干涉仪。介绍了光源的选择,系统的设计以及信号的采集和处理方案。采用这套绝对测量系统,可以实现长度为2m以内的绝对距离测量,定位精度可以达到±0.5μm。     

基于莫尔干涉的激光中心波长精确检测的研究

为了提高激光中心波长检测的精确度,提出了基于正交干涉原理的静态干涉系统,由两个相互垂直的棱镜组成产生二维平面上的光程差分布,以面阵CCD取代线阵CCD,对平面上的正交干涉条纹数据进行采集.在计算分析莫尔干涉仪的光程差分布的基础上,计算干涉图像中干涉条纹的拼接及傅氏变换等,最终得到光谱分辨率.由MATLAB仿真软件分析结果可知,静态莫尔干涉系统可以产生的光程差最大为234μm,比等尺寸的傅里叶干涉体高约一个数量级.实验标定用的光谱仪选用LAB SPAKR 750A型光谱仪,针对中心波长为635 nm的半导体激光器进行测量,结果显示中心波长位置基本一致,但在中心波长附近的光谱细节上莫尔干涉优于传统干涉具.     

Shearing interferometer using low-coherent light source and calcite prism

A shearing interferometer using a low-coherent light source and calcite prism is proposed in this paper. The calcite prism is the shear plate that generates sheared wavefronts with optical-path difference induced only by the contour of the specimen. Low-coherent light source is thus available while the interferometer is adopted for contour derivative determinations. The design of this interferometer is introduced, a setup constructed to realize the interferometer is described, and the experimental results from the uses of the setup are finally presented.     

基于多级组合棱镜提高激光中心波长检测精度的研究

为了在保证抗干扰能力不下降的条件下提高对激光中心波长的检测精度,设计了多级组合棱镜系统,并提出了多级组合棱镜的干涉条纹拼接处理方法及相位耦合的计算公式.通过计算多级组合棱镜的干涉图强度、光程差函数及光谱分辨率,分析了采用三块子棱镜的组合结构的光谱获取,给出了用于分段干涉条纹拼接的处理方法及步骤,最终光谱分辨率可达2.8...     

双法布里—珀罗干涉仪传感模型的理论分析

本文提出了一种用发光二极管作为光源、用自聚焦透镜构成法布里-珀罗腔的双法布里-珀罗干涉仪光纤位移传感模型.根据部分相干光的干涉理论,得到了这个传感模型输出光强与两个法布里一珀罗干涉仪腔长之差的函数曲线.     

A laser feedback interferometer with an oscillating feedback mirror

A method is proposed to solve the problem of direction discrimination for laser feedback interferometers.By vibrating the feedback mirror with a small-amplitude and high-frequency sine wave,laser intensity is modulated accordingly.The modulation amplitude can be extracted using a phase sensitive detector(PSD).When the feedback mirror moves,the PSD output shows a quasi-sine waveform similar to a laser intensity interference fringe but with a phase difference of approximately ±π/2.If the movement direction of the feedback mirror changes,the phase difference sign reverses.Therefore,the laser feedback interferometer offers a potential application in displacement measurement with a resolution of 1/8 wavelength and in-time direction discrimination.Without using optical components such as polarization beam splitters and wave plates,the interferometer is very simple,easy to align,and less costly.     

Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 × 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.     

乌氏干涉测量的信息读取

针对乌氏干涉仪条纹信号调整难、用肉眼读数难等问题,提出将He-Ne激光作为乌氏干涉仪光源的设计,得到了高质量的干涉条纹信号,并采用光电转换方法将条纹移动信号转变为电信号实现了微位移的高精度测量。设计了光电信号检测电路,利用双门限整形电路标定出整形方波,克服了干涉信号在设定比较值附近抖动引起误处理的缺点;提出了辨向细分电路,在1路干涉条纹信号下,提取了具有正交性的2路电子信号,实现了干涉条纹的移动辨向与信号细分。按此方案设计并搭建了一套激光干涉检测实验装置,用2个计量差值为5μm的标准量块,对激光干涉检测装置进行了标定,在电路为4细分的情况下,该装置测量分辨率达79 nm;解决了乌氏干涉仪自动读数的问题,提高了乌氏干涉仪的测量精度和准确性。     

激光干涉测速技术在内弹道弹丸速度测量中的应用研究

 利用任意反射面激光干涉测速（VISAR）系统以及全光纤位移干涉仪（FDI）,测量了线膛炮弹丸速度,获得了线膛炮弹丸在0~491 μs内从零加速到140 m/s的速度历史,弹丸运动了20.7 mm,出炮口时的弹丸速度为817 m/s。实验结果表明,影响激光干涉测速技术在内弹道测量中应用的主要因素是炮口烟。研究结果对于深入探索激光干涉测速技术在内弹道测量中的应用有重要的参考意义。     

Sub-50 nm patterning by immersion interference lithography using a Littrow prism as a Lloyd's interferometer

We present a simple setup that combines immersion lithography with a Lloyd's mirror interferometer. Aiming for smaller structure sizes, we have replaced the usual Lloyd's interferometer by a triangular Littrow prism with one metal-coated side, which acts as a mirror. Because of the higher refractive index of the prism, the wavelength and, thus, the attainable structure sizes, are decreased significantly. Using a laser with a wavelength of 244nm, we could produce line patterns with a period of less than 100nm and a width of 45nm. The introduced setup retains all the advantages of a Lloyd's mirror interferometer, in particular the flexibility in periodicity.     

基于外差干涉的微振动测量技术研究

针对外差干涉的微振动测量存在稳定性低、严重受环境噪声影响等缺点,提出了对光路的改进方案。根据差分原理将其改为双光路,消除环境噪声的干扰;通过偏振分光棱镜（PBS）将椭圆偏振光变为线偏光,提高干涉信号幅值;改进频移装置(AOM),抑制频率漂移;增加光阑,滤除杂散光,提高系统信噪比。通过探测5 kHz压电陶瓷振动信号,以及2.5 MHz高频激光超声信号进行实验验证,结果表明:信号稳定且无纹波,系统分辨率为2.3 nm,信噪比提高16.7倍。两路干涉信号幅值分别为552 mV和736 mV,较传统外差干涉信号幅值提高近10倍,有利于纳米量级微振动信号的检测。     

光热正弦相位调制干涉仪中相位的抗干扰测量

在正弦相位调制半导体激光干涉仪中,半导体激光波长随注入电流和温度漂移而产生相位测量误差,同时干涉仪的机械振动和干涉仪两臂中的空气扰动也会引入相位误差,在已有光热正弦相位调制干涉仪中引入反馈机制,有效地降低了上述误差,增强了干涉仪的抗干扰能力,使用此干涉仪测量了物体的位移,测量结果表明这种方法可以有效地提高相位的测量精度。     

Nanosecond laser pulse induced vertical movement of thin gold films on silicon determined by a modified Michelson interferometer

The vertical movement of a 40 nm thin Au film on a silicon substrate during intense nanosecond (ns) laser irradiation is determined on the nm vertical and ns time scales using an optimized Michelson interferometer. The balanced setup with two detectors uses the inverse interference signal and accounts for transient reflectivity changes during irradiation. We show that a change in phase shift upon reflection must be taken into account to gain quantitative results. Three distinct fluence regimes can be distinguished, characterized by transient reflectivity behavior, dewetting processes and film detachment. Maximum displacement velocities are determined to be 0.6 m/s and 1.9 m/s below and above the melting threshold of the metal, respectively. Flight velocities of detaching liquid films are found to be between 30 and 70 m/s for many nanoseconds.     

光和原子关联与量子计量

物理量的测量与单位标准的统一推动了计量学的发展.量子力学的建立,激光技术的发明以及原子与分子物理学的发展,在原理与技术上进一步刷新了计量学的研究内涵,特别是激光干涉与原子频标技术的发展,引起了计量学革命性的飞跃.基于激光干涉的引力波测量、激光陀螺仪,基于原子干涉的原子钟、原子陀螺仪等精密测量技术相继诞生,一个以量子物理为基础,探索与开拓物理量精密测量方法与技术的新的科学分支——量子计量学(Quantum Metrology)已然兴起.干涉是计量学中最常用的相位测量方法.量子干涉技术,其相位测量精度能够突破标准量子极限的限制,是量子计量学与量子测量技术的核心研究内容.本文重点介绍近几年我们在量子干涉方面所取得的新开拓与新发展,主要内容包括基于原子系综中四波混频过程的SU(1,1)型光量子关联干涉仪和基于原子系综中拉曼散射过程的光-原子混合干涉仪.     

计算电容中Fabry-Perot干涉仪测量位移的相位修正方法

计算电容是复现电学阻抗单位的基准装置, 利用计算电容值和量子霍尔电阻值可以准确计算出精细结构常数α. 计算电容的本质是通过高准确度地测量屏蔽电极的位移, 实现对电容量值的测量. 因此, 基于Fabry-Perot干涉仪的精密电极位移测量系统是计算电容装置中最为核心和关键的部分. 在Fabry-Perot干涉仪测位移过程中, 由于高斯激光束存在轴向Gouy相位, 该附加相位将会引起相邻干涉条纹对应位移的变化(大于或者小于λ/2), 导致位移的测量值与实际值存在偏差. 本文阐述了高斯激光场的传播特性, 利用高斯激光束在自由空间和透过薄透镜复振幅的变换关系, 建立了计算电容装置中Fabry-Perot干涉仪透射光束的传输模型; 通过对不同腔长的Fabry-Perot干涉仪透射光场相位的分析, 获得了高斯激光束轴向Gouy相位修正与传输距离的关系. 结果表明, 当腔长从111.3 mm移动至316.3 mm时, 在接收距离为560 mm的情况下, 高斯光束轴向Gouy 相位引起的位移修正的绝对值最小为0.7 nm, 其相对相位修正量|δL|/|ΔL| = 3.4×10^-9.