微电子机械系统中转速测量的光学方法

利用显微测量技术和CCD图像传感器的线性积分成像特性,将数字图像处理技术与时间积分成像技术用于微电子机械系统(MEMS)中的转速测量。只需分别摄取被测物体上的标志点在静止状态下的时间积分图像和运动状态下的时间积分图像,即可测得物体在该段曝光时间内的转速。该方法对实验设备及实验条件要求较宽松。实验表明该方法对微系统中近似匀速转动时转速的测量是完全可行的,且具有较高的精度。     

一种解耦的微机械陀螺研究

设计了一种解耦的微机械陀螺，它能够极大地降低正交误差信号的影响，从而大大地提高佗螺的性能；制造了一批样机，进行了初步的驱动特性和敏感特性的实验研究。研制结果表明，陀螺性能符合设计要求。     

微电子机械系统中的若干固体力学问题

简述了微电子机械系统若干固体力学问题研究的现状，包括：微构件材料的基本力学性能；微构件的力学分析与计算；微系统的失效分析研究；微系统的驱动等，并阐述了微系统力学问题中涉及的表面效应和尺度效应，提出了微系统多类型力作用，多种因素交叉，多学科耦合，非线性突出的特点和研究方向。     

MEMS微梁粘着动力分析

针对严重影响MEMS性能和可靠性的微梁粘着问题,根据W-S微观连续介质理论,建立了粘着力数学模型;针对粘着力对微梁刚度的强非线性影响,利用单元离散法,通过对粘着力时空变量相分离,对500μm×1μm×0.1μm表面镀金的微悬臂梁粘着进行了动力仿真,发现了“跳跃粘着”现象,从而为微梁的系统研究提供理论基础。     

微梁与基底间的毛细粘附作用

在表面微型机械结构的制造过程中,强的毛细相互作用常常使得组成这些结构的微桥、微梁与基底粘附而导致失效。而在微尺度实验中,微桥与微梁又是微尺度材料常数和性能检测的常用的试件样式,如果实验中加载端与被检测的微尺度试件发生毛细粘附,将直接影响检测数据的准确性。本文应用微悬臂梁试件,讨论微梁与基底间的毛细粘附作用,并通过能量原理计算其粘附力的大小和试件几何尺寸、粘附面距离、粘附液体特性之间的关系。最后应用微散斑干涉,检测粘附平衡态时微桥和微梁的粘附力以及由毛细粘附所导致的弯曲变形,并与理论计算结果进行比较。     

A phenomenological and extended continuum approach for modelling non-equilibrium flows

This paper presents a new technique that combines Grad’s 13-moment equations (G13) with a phenomenological approach to rarefied gas flows. This combination and the proposed solution technique capture some important non-equilibrium phenomena that appear in the early continuum-transition flow regime. In contrast to the fully coupled 13-moment equation set, a significant advantage of the present solution technique is that it does not require extra boundary conditions explicitly; Grad’s equations for viscous stress and heat flux are used as constitutive relations for the conservation equations instead of being solved as equations of transport. The relative computational cost of this novel technique is low in comparison to other methods, such as fully coupled solutions involving many moments or discrete methods. In this study, the proposed numerical procedure is tested on a planar Couette flow case, and the results are compared to predictions obtained from the direct simulation Monte Carlo method. This test case highlights the presence of normal viscous stresses and tangential heat fluxes that arise from non-equilibrium phenomena, which cannot be captured by the Navier–Stokes–Fourier constitutive equations or phenomenological modifications.      

氮离子注入硅表面的力学性能及其微摩擦磨损行为研究

以单晶硅作为研究对象,选用离子注入剂量分别为5 ×1014 ions/cm2、6 ×1015ions/cm2和1 ×1017ions/cm2,注入能量为110 keV的氮离子注入单晶硅片,利用原位纳米力学测试系统对氮离子注入前后单晶硅片的硬度和弹性模量进行测定,在UMT-2型微摩擦磨损试验机上对氮离子注入前后单晶硅片的往复滑动微摩擦磨损性能进行研究.结果表明,氮离子注入后单晶硅片的纳米硬度和弹性模量减小,且注入剂量越大,其降低越明显.氮离子注入后单晶硅片的减摩性能提高,其摩擦系数大幅度降低,在载荷达到一定值后,氮离子注入层被迅速磨穿,摩擦系数迅速增加并产生磨痕.其磨损机制在小载荷下以粘着磨损为主,在大载荷下以材料的微疲劳和微断裂为主.     

静电微电机微转子接触动力学特性分析

提出静电微电机中转子和固定轴承间相互接触的数学模型，对微尺度下的接触应力和应变 特性进行理论推导，分析静电微电机几何参数、静电力、材料特性及加载电压对接触宽度、 应力和应变特性的影响，对比研究不同工况下接触宽度、接触应力和应变的变化，并就相同 的问题进行有限元分析，探讨摩擦系数对接触区von Mises应力、应变和接触压力 的影响，结果表明有限元模拟所得接触应力和应变分布与数学 模型的解析值较为相似.     

STABILITY ANALYSIS OF A CAPACITIVE FGM MICRO-BEAM USING MODIFIED COUPLE STRESS THEORY

Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam thickness according to a power-law.Dynamic and static pull-in voltages are obtained and it is shown that the static and dynamic pull-in voltages for some materials cannot be obtained using classic theories and components of couple stress must be taken into account.In addition,it is shown that the values of pull-in voltages depend on the variation through the thickness of the volume fractions of the two constituents.     

Optical characterization of high speed microscanners based on static slit profiling method

Optical characterization of high-speed microscanners is a challenging task that usually requires special high speed, extremely expensive camera systems. This paper presents a novel simple method to characterize the scanned beam spot profile and size in high-speed optical scanners under operation. It allows measuring the beam profile and the spot sizes at different scanning angles. The method is analyzed theoretically and applied experimentally on the characterization of a Micro Electro Mechanical MEMS scanner operating at 2.6 kHz. The variation of the spot size versus the scanning angle, up to ±15°, is extracted and the dynamic bending curvature effect of the micromirror is predicted.