Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings |
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| Authors: | LING Xiu-Lan ZHAO Yuan-An LI Da-Wei ZHOU Ming SHAO Jian-Da FANZheng-Xiu |
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| Institution: | Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800Graduate School of Chinese Academy of Sciences, Beijing 100049Department of Information Engineering, North University of China, Taiyuan 030051 |
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| Abstract: | In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation. |
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| Keywords: | 42 79 Wc 81 70 Fy 81 70 Jb |
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