Transmission and small angle scattering of 15 MeV electrons in silicon single crystals

Abstract

A novel technique for the study of structural damage incurred by single crystal silicon targets during ion implantation is described. The method is based upon copper-decoration of the vacancy rich damaged region, followed by radiochemical measurement of the resulting copper distribution. Utilizing neutron activation, sharply peaked radiocopper profiles are obtained, which are believed to represent the depth distributions of large, relatively immobile defects such as vacancy clusters, voids, or crystalline faults. A more efficient decoration of isolated vacancy-type defects is realized when Wu is employed as a radioisotopic tracer in the decoration step, however, the rapid diffusivity of these smaller species leads to less sharply defined radiocopper profiles. Both the neutron activation and radiotracer modifications of the technique yield damage profiles which are significantly shallower than the corresponding implanted impurity profiles.     

耐高温CrAlON基太阳能光谱选择性吸收涂层的制备与热稳定性

光谱选择性吸收涂层是太阳能光-热利用技术的核心部件,直接决定着整个系统的转换效率,为了提高涂层的选择吸收性和热稳定性,本文提出以金属氮化物替代金属纳米颗粒,构建纳米晶-非晶异质结构的思路,并采用多弧离子镀制备了Cr/CrAlN/CrAlON/CrAlN/CrAlON/CrAlO多吸收层光谱选择性吸收涂层,其吸收率达0.90,发射率为0.15,而且在500℃、大气条件下时效220 h后,涂层的吸收率升至0.94,发射率则降至0.10,并且能够保持稳定1000 h以上.微观组织分析表明,高温时效处理后,吸收层发生部分晶化形成了大量氮化物纳米颗粒,增加了对太阳光的散射和吸收,而CrAlO减反射层中的部分晶化形成了Al2O3和Cr2O3纳米颗粒,这不仅可以保护内部涂层不被氧化,而且Al2O3的形成可以增加太阳光的透过率,减少涂层表面反射,是多吸收层CrAlON基光谱选择性吸收涂层选择吸收性能提高的主要原因.同时,氮化物纳米颗粒被非晶基体均匀地分隔开来,形成了纳米晶-非晶异质结构,非晶在高温时效处理过程中只发生结构弛豫,从而有效地抑制了高温条件下的原子扩散,保证涂层中的纳米颗粒在高温下不发生明显团聚,这是多吸收层CrAlON基涂层具有良好热稳定性的最主要原因.这些研究结果对提高金属陶瓷光谱选择性吸收涂层的综合性能,实现更高效率的太阳能光-热利用具有重大意义.     

Effect of thermal annealing on sub-band-gap absorptance of microstructured silicon in air

The optical absorption properties of femtosecond-laser-made “black silicon” as a function of the annealing conditions were investigated. We found that the annealing process changes the surface morphology and absorption spectroscopy of the “black silicon” samples, and obtained a maximum sub-band-gap absorptance value of approximately 30% by annealing at 1000 °C for 30 min. The thermal relaxation and atomic structural transformation mechanisms are used to describe the lattice recovery and the increase and decrease of the substitutional dopant atom concentration in the microstructured surface during the annealing. Our results confirm that: i) owing to the thermal relaxation, the lattice defects decrease with the increase of the annealing temperature; ii) the quasi-substitutional and interstitial configurations of the doped atoms transform into substitutional arrangements when the annealing temperature increases; iii) the quasi-substitutional and interstitial configurations with higher energies of the doped atoms transform into interstitial configurations with the lowest energy after high-temperature annealing for a long period of time, causing the deactivation or reactivation of the sub-band-gap absorptance by diffusion. The results demonstrate that the annealing can improve the properties of “black silicon”, including defects repairing, carrier lifetime lengthening, and retention of a high absorptive performance.     

滑动盖板对一维微尺度光栅红外辐射特性影响

电磁波入射到微尺度周期性结构表面时,一定条件下将在某一波段产生异常光吸收现象。基于该特性,本文提出了单边移动盖板光栅和双边移动盖板光栅两种光栅结构,并使用严格耦合波分析(RCWA)方法对TM波垂直入射的一维微尺度光栅表面辐射特性进行了分析,研究了滑动盖板的厚度和位置对光栅表面结构辐射特性的影响。结果表明,相同盖板厚度,双边移动盖板光栅形成的发射率峰较单边移动盖板光栅形成的发射率峰具有较宽的半高全宽(FWHM),但峰值较低;随盖板向关闭侧移动,高发射率峰对应波长向长波方向移动;随盖板厚度增加,发射率峰向长波方向移动,其中双边移动盖板光栅结构形成的发射率峰变宽,峰值变小。     

激光量热法测量K9基片的表面吸收和体吸收

表面抛光可能给K9基片带来额外的杂质和吸收,分离K9基片的表面吸收率与体吸收率有助于改进基片的加工质量和抛光工艺,对抗损伤能力研究具有重要意义。分析了激光量热法测量弱吸收的原理,采用符合ISO 11551要求的激光量热计测量K9基片的弱吸收。对相同工艺抛光的不同厚度K9基片进行了弱吸收表征,实验发现K9基片的弱吸收随着厚度增加近似线性增大。推导了表面吸收率和体吸收率的计算式,实验得出本样品的表面吸收率为1.2110-5,体吸收率远大于表面吸收率,体吸收系数为1.7210-3/cm。实验结果显示所用K9样品的吸收主要来自于材料本身,改善抛光工艺对降低其吸收率作用不大。     

Narrow-band spectral features of structured silver surface with rectangular resonant cavities

This paper is aimed to investigate spectral properties of structured silver surface with periodic rectangular hollow cavities. Numerical computation is conducted to obtain spectral distribution of surface absorptance with different structural parameters using the finite-difference time-domain (FDTD) method. By means of numerical examples, the effects of structural parameters, incident angle and azimuthal angle on the spectral features of the structured surface are discussed. It is found that the structured surface shows the characteristics of the peak absorption in the vicinity of resonant wavelength of rectangular cavity. For some special structure parameters, the peak absorptance of the incident plane wave can reach as high as above 80% due to the excitation of microcavity effect. The optimal narrow-band absorption can be achieved by the rational design of the structural parameters of rectangular cavity. The directional dependence of spectral absorptance is also analyzed and the results reveal that the absorption peak positions are incident-angle-independent. The results show that the microscaled rectangular cavities fabricated on the low-emissivity silver surface are very efficient for selective improvement of the radiative features, which provides guidance for the design of narrow-band infrared thermal emitters.     

缺陷对HfO2薄膜的激光弱吸收与损伤阈值的影响

激光弱吸收是导致光学薄膜损伤的重要原因。在(5~43)mPa的氧分压下制备并测试了一组HfO2薄膜。实验发现,当氧分压小于20mPa时,薄膜弱吸收越大,损伤阈值越低;当氧分压大于20mPa时,薄膜的损伤阈值与弱吸收并不一一对应,具有较高弱吸收的薄膜可能同时具有较高的损伤阈值。建立了缺陷模型,采用有限元法模拟了缺陷对弱吸收测量和损伤阈值测量的影响,分析了缺陷尺寸、密度、吸收系数对弱吸收和损伤阈值的影响。研究结果显示,吸收系数高于薄膜1 000倍的缺陷可以降低薄膜的损伤阈值1 000倍,却并不影响薄膜的弱吸收。缺陷对HfO2薄膜的激光弱吸收与损伤阈值测试有完全不同的影响,是导致某些薄膜弱吸收与损伤阈值背离的原因。     

A New Synthetical Model of High-Power Pulsed Laser Ablation

We develop a new synthetical model of high-power pulsed laser ablation, which considers the dynamic absorptance, vaporization, and plasma shielding. And the corresponding heat conduction equations with the initial and boundary conditions are given. The numerical solutions are obtained under the reasonable technical parameter conditions by taking YBa₂Cu₃O₇ target for example. The space-dependence and time-dependence of temperature in target at a certain laser fluence are presented, then, the transmitted intensity through plasma plume, space-dependence of temperature and ablation rate for different laser fluences are significantly analyzed. As a result, the satisfactorily good agreement between our numerical results and experimental results indicates that the influences of the dynamic absorptance, vaporization, and plasma shielding cannot be neglected. Taking all the three mechanisms above simultaneously into account for the first time, we cause the present model to be more practical.     

利用集总参数法测量材料对激光的吸收率

材料对激光吸收的研究工作对激光加工的发展有着非常重要的意义.而吸收率测量方法的研究是材料对激光吸收研究工作的基础.从量热的角度出发,利用传热学中的集总参数法建立了测量吸收率的方法,设计了相应的试验装置,并测量了几种常用工程材料对激光的吸收率. 关键词： 集总参数法 吸收率 激光     

表面热透镜技术测量光学薄膜样品表面热变形

给出了连续调制激励光照射下光学薄膜样品表面热变形场的理论分布,并由此定义了表面热透镜(STL)信号。根据表面热透镜理论实验测量了一个BK7基底高反膜样品的形变,给出了表面热透镜信号随调制频率的变化曲线。实验结果表明:在采用的STL实验构型中,探测了最小1.985 nm的直流形变,对应不调制时的形变为3.97 nm,相应的形变探测灵敏度达到了10 pm量级;直流形变与功率成线性关系;交流表面热透镜信号随着频率增大而减小,在高频端近似成线性减小。