氮化钛沉积膜的摩擦性能研究

采用等离子电弧沉积法在9Crl8钢表面制备了厚约0．5μm的TiN薄膜，通过显微硬度测试以及纳米压痕和纳米划痕试验，对比考察了9Crl8钢及其表面T|N薄膜的机械和摩擦性能．结果表明，9Crl8钢及其表面T．N沉积膜的纳米硬度分别为8GPa和38GPa，弹性模量分别为250GPa和580GPa，9Crl8、TiN和有机薄膜的摩擦系数分别为0．40、0．12和0．10；TiN沉积膜可显著提高基体钢的承载和耐磨能力．     

Nanoscratch-induced deformation behaviour in B4C particle reinforced ultrafine grained Al alloy composites: a novel diagnostic approach

We report on the novel application of nanoscratch characterization to provide insight into the plasticity mechanisms responsible for the behaviour of composites. Accordingly, we conduct deformation characterization with nanoscratch testing (DCNT) to study the deformation behaviour of two B₄C reinforced ultrafine grained Al alloy tri-modal composites with average B₄C particle sizes of ~1–6?μm and ~500?nm, respectively. To highlight the type of mechanistic information revealed in a DCNT study of composites, we concentrate on the influence of B₄C particle size on deformation mechanisms.     

纳米硬度技术的发展和应用

近二十年来,主要用于检测材料表面微米和亚微米尺度力学性质的纳米硬度技术发展迅速.首先,概述硬度的定义、分类及其适用范围.然后,系统地总结纳米硬度技术的发展,重点介绍纳米压痕硬度的测量原理及其影响因素,连续刚度测量原理,高分辨率的载荷位移测量原理,几种常用压头的几何形状,试样表面的准备和确定,相关的测试方法,仪器校准和显微观察等问题.通过压痕实验可获得硬度、弹性模量、断裂韧性、存储模量和损耗模量、蠕变应力指数等.最后,简要介绍纳米划痕硬度测量技术的发展和应用.      

Bioactivity and mechanical properties of nickel‐incorporated hydrogenated carbon nanocomposite thin films

In this paper, the influence of nickel incorporation on the mechanical properties and the in vitro bioactivity of hydrogenated carbon thin films were investigated in detail. Amorphous hydrogenated carbon (a‐C:H) and nickel‐incorporated hydrogenated carbon (Ni/a‐C:H) thin films were deposited onto the Si substrates by using reactive biased target ion beam deposition technique. The films' chemical composition, surface roughness, microstructure and mechanical properties were investigated by using XPS, AFM, TEM, nanoindentation and nanoscratch test, respectively. XPS results have shown that the film surface is mainly composed of nickel, nickel oxide and nickel hydroxide, whereas at the core is nickel carbide (Ni₃C) only. The presence of Ni₃C has increased the sp² carbon content and as a result, the mechanical hardness of the film was decreased. However, Ni/a‐C:H films shows very low friction coefficient with higher scratch‐resistance behavior than that of pure a‐C:H film. In addition, in vitro bioactivity study has confirmed that it is possible to grow dense bone‐like apatite layer on Ni/a‐C:H films. Thus, the results have indicated the suitability of the films for bone‐related implant coating applications. Copyright © 2011 John Wiley & Sons, Ltd.     

Test investigation on interfacial characteristics of Cr/Al nanofilms structure

The objective of this paper is to provide a systematic test for fabrication or evaluation of a bilayer film structure between Cr and Al in micro/nanoelectronic manufacturing. The Cr/Al bilayer film is fabricated by using the magnetron sputtering. To understand the basic mechanical properties of the Cr/Al bilayer films, the elastic modulus and the hardness of the sample are investigated by using a nanoindenter test. The test can show the changing trend of the Cr/Al sample structure. To investigate the integrating characteristics of the sample in progress, the effect of the thermal cycling loading and no-thermal cycling loading on the integrating force of the Cr/Al samples is tested by using nanoscratch. The interfacial binding force in the films can be obtained for understanding the integrating characteristics. It builds a basis for future work on progress investigation of physical property of Cr/Al bilayer film structure.     

Experimental approach on interfacial properties for Cr/Al double nanometer films under different temperature environment mode

In this paper, a typical interfacial structure sample between the materials Cr and Al was fabricated. To investigate the interfacial characteristics, the mechanical properties of the Cr/Al double interfacial structure were tested using the nanoindenter and the nanoscratch. The test results show that both of the values are easily influenced by the different depth h. In the nanoscratch experiment, the bilayer films are set off as two groups, one of which is tested after the thermal cycling load while the other is not. The test results show that the interface formation and the binding force in the interface can be easily influenced by the difference thermal characteristic of the each single film. The elastic modulus and the hardness of the bilayer films are investigated using the nanoindentation.     

亚微米氮化钛膜的纳米压痕和划痕测定

采用等离子电弧沉积的方法，分别在GT35和40CrNiMo钢上沉积厚约为0．5μm的氮化钛(TiN)膜．为了筛选基材，采用纳米压痕和划痕技术，评价膜基界面结合和固体润滑效果．纳米压痕结果，GT35，40CrNiMo和TiN的纳米硬度／弹性模量的典型值分别约为11．5GPa／330GPa，6．0GPa／210GPa，30GPa／450GPa．纳米划痕结果，GT35有较理想的膜基结合能力；GT35，40CrNiMo，TiN及其有机膜的摩擦系数分别约为0．25，0．45，0．i5，0．i0．同40CrNiMo相比，GT35是较为理想的基体材料．纳米压痕和划痕技术能提供丰富的近表面的弹塑性变形、断裂和摩擦等的信息，是评价亚微米薄膜力学性能的有效手段．     

真空磁过滤电弧离子镀法制备DLC膜的机械性能

采用真空磁过滤电弧离子镀法分别在9Cr18和40CrNiMo钢上沉积厚约为0.2μm的类金刚石（DLC）膜。为了检测成膜质量，分别使用纳米压痕和纳米划痕技术表征钢基材和DLC/基材的机械性能，对这种亚微米厚的膜，纳米压痕技术和纳米划痕技术能提供丰富的近表面的弹塑性变形，断裂和摩擦等的信息。同DLC/40CrNiMo相比。DLC/9Cr18的硬度高和固体润滑效果显著，9Cr18是较为理想的基体材料。     

碳化硅薄膜的力学性能测试分析

对利用射频磁控溅射及真空退火方法在(100)硅晶片衬底上制备的纳米晶碳化硅(SiC)薄膜,用纳米压痕仪进行了力学性能测试分析。纳米压痕技术测试给出两块SiC薄膜样品I和II的弹性模量/硬度分别约为106GPa/9.5GPa和175GPa/15.6GPa。纳米划痕技术测试两块SiC薄膜的摩擦系数分别约为0.02~0.15和0.05~0.18,显示出良好的润滑性能;对薄膜的临界附着力等进行测量以评价膜基结合强度,分析了划痕过程中薄膜近表面弹塑性变形和断裂信息。在原子力显微镜下对SiC薄膜样品的初始表面及残余压痕和划痕形貌进行了观察分析,与测试结果相符。综合比较,样品II的整体性能优于样品I。本文中薄膜的弹性模量和硬度值较低可归因于制膜技术的不同和表层碳含量偏高。     

磁头-磁盘接触作用力对磁记录层信息强度影响规律的定量研究

磁存储密度的持续增长会导致磁头-磁盘的间距不断减小, 这样, 极有可能引起磁头-磁盘接触退磁的发生, 从而造成磁记录层存储数据的丢失. 为了明确退磁过程中的相应作用关系, 本文通过磁力显微镜的相位成像原理直接给出了磁盘退磁的定量测量方法. 并且依据此方法, 利用纳米划痕实验研究了磁头-磁盘接触作用力对磁记录层信息强度的影响规律. 结果表明:当磁头-磁盘接触作用力超过临界退磁载荷时, 磁记录层的信息强度与磁头-磁盘接触作用力之间存在减函数关系; 在低接触载荷区域中, 即使磁记录层表面没有划痕产生, 磁盘退磁现象仍旧可能发生; 对于任意磁头-磁盘接触作用力, 磁盘表面的破坏区域总是会大于磁记录层的退磁区域; 当磁头反复划刮磁盘的同一位置时, 磁记录层的表面划痕处将出现弹性安定状态, 对应地, 磁记录层的信息强度会趋近于某一定值.