Robust Speed Control of a Low Damped Electromechanical System Based on CRONE Control: Application to a Four Mass Experimental Test Bench

Robust speed control of a low damped electromechanical system with backlash is studied, controlled load angular speed being not measured. The proposed control strategy combines a Luenberger observer (load angular speed and load torque disturbance estimations) and a robust CRONE controller. The observer provides estimation of the load angular speed and of the disturbance torque applied on the load. Through the computation of only three independent parameters (as many as a PID controller), the CRONE controller permits to ensure the robust speed control of the load in spite of plant parametric variations and speed observation errors. The proposed control strategy is applied to a four mass experimental test bench.     

In-time motion adjustment in laser cladding manufacturing process for improving dimensional accuracy and surface finish of the formed part

This paper presents in-time motion adjustment in laser cladding manufacturing process as a means to improve dimensional accuracy and surface finish of the built part. Defects occurring during laser cladding degrade the part quality such as dimensional accuracy and surface finish. In this paper, in-time motion adjustment strategy was presented to remedy and eliminate defects occurring during laser cladding to improve the dimensional accuracy and surface finish. Based on the relationship between the motion of laser head relative to the growing part and other parameters in effects on clad profile, the laser traverse speed, stand-off distance and laser approach orientation to the existing clad layer were adjusted by instructions from a close-loop control system in real time to remedy and eliminate defects. The results of the experiments verified the effects of in-time motion adjustment on dimensional accuracy and surface finish.     

High-precision sub-pixel interpolation in particle image velocimetry image processing

The task of image interpolation and re-sampling for particle image velocimetry (PIV) is investigated, which is used for window shifting with sub-pixel accuracy and image or window deformation. A new interpolation scheme based on a Gaussian filter is introduced and compared with commonly used and widely accepted interpolation techniques in terms of the achievable root mean square deviation of the displacement estimates.     

纵横扩张的优化

得到了最小折数纵横扩张的判别准则．针对4-正则图的平面嵌入的纵横扩张的特殊性，给出了它的最小折数纵横扩张判别准则．     

Identification of micro-scale calorimetric devices II

The miniaturized calorimetric devices furnish a reduced working flat surface and permits measurements with extremely low-mass quantities. The experimental sensitivity shows relevant position dependence with x-y surface coordinates and with z-distance. The device identification is realized via a 2-D model based in Fourier general equation. Using the Marquardt method the experimental flat surface device can be identified and the fitted parameters used to simulate the behavior of the experimental system. From the model, the effects of several dissipation configurations can be evaluated. Also, via the RC-analogy, a way to 3-D experimental devices is roughly described. This revised version was published online in July 2006 with corrections to the Cover Date.     

Time-marching numerical schemes for the electric field integral equation on a straight thin wire

We derive and analyse four algorithms for computing the current induced on a thin straight wire by a transient electric field. They all involve solving the thin wire electric field integral equations (EFIEs) and consist of a very accurate differential equations solver together with various schemes to approximate the vector potential integral equation. We carry out a rigorous numerical stability analysis of each of these methods. This has not previously been done for solution schemes for the thin wire EFIEs. Each scheme is shown to be stable and convergent provided the radius of the wire is small enough for the thin wire equations to be a valid model.     

Implementation of some higher-order convection schemes on non-uniform grids

A generalized formulation is applied to implement the quadratic upstream interpolation (QUICK) scheme, the second-order upwind (SOU) scheme and the second-order hybrid scheme (SHYBRID) on non-uniform grids. The implementation method is simple. The accuracy and efficiency of these higher-order schemes on non-uniform grids are assessed. Three well-known bench mark convection-diffusion problems and a fluid flow problem are revisited using non-uniform grids. These are: (1) transport of a scalar tracer by a uniform velocity field; (2) heat transport in a recirculating flow; (3) two-dimensional non-linear Burgers equations; and (4) a two-dimensional incompressible Navier-Stokes flow which is similar to the classical lid-driven cavity flow. The known exact solutions of the last three problems make it possible to thoroughly evaluate accuracies of various uniform and non-uniform grids. Higher accuracy is obtained for fewer grid points on non-uniform grids. The order of accuracy of the examined schemes is maintained for some tested problems if the distribution of non-uniform grid points is properly chosen.     

压印光刻中的两步对正技术

压印光刻中套刻需要粗、精两级对正.实验采用一对斜纹结构光栅作为对正标记.利用物镜组观察光栅标记图像的边界特征进行粗对正,其准确度在精对正信号的捕捉范围内；利用光电接收器件阵列组合接收光栅莫尔信号，在莫尔信号的线区进行精对正.由于线性区的斜率大, 精对正过程中得到相应x,y方向的对正误差信号灵敏度高,利用高灵敏度对正误差信号作为控制系统的驱动信号,对承片台进行驱动定位,实现精对正.最终使X,Y方向上的重复对正准确度分别达到了± 21 nm(± 3σ)和±24 nm(± 3σ).     

基于液晶调制器调制的实时测温系统

分析了一种基于基尔霍夫定律的钽酸锂(LiTaO3)热释电探测器作为接收元件的实时测温系统中,机械式调制盘对测量精度影响,提出了改变机械式调制盘对测量精度的影响的方法;介绍了液晶调制器的结构、对辐射调制的原理以及在使用过程中的优点。设计了利用液晶调制器替代机械调制器的钽酸锂热释电实时测温系统。结果表明,利用液晶调制器改进后的测温系统在给定的温度范围中,测量精度均有明显的改善,符合测量要求。     

超大规模集成电路光学光刻技术的现状与展望

光学光刻是目前超大规模集成电路(VLSI)制备中主要的微米和亚微米的图形加工技术,这一技术将继续保持其主导地位成为90年代VLSI发展的关键。本文综述了近年来光学光刻工艺的发展,主要介绍了G线(436nm)、Ⅰ线(365nm)和准分子激光光刻的现状,并对实现高的光学光刻分辨率所必须解决的透镜设计、套准精度和像场面积等问题作了详细描述。最后展望了发展方向、