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Growth characteristics and surface morphology of boron carbide films fabricated by ablating a B4C target in high vacuum with a traditional KrF excimer laser and a high brightness hybrid dye/excimer laser system emitting at the same wavelength while delivering 700 fs pulses are compared. The ultrashort pulse processing is highly effective. Energy densities between 0.25 and 2 J cm−2 result in apparent growth rates ranging from 0.017 to 0.085 nm/pulse. Ablation with nanosecond pulses of one order of magnitude higher energy densities yields smaller growth rates, the figures increase from 0.002 to 0.016 nm/pulse within the 2-14.3 J cm−2 fluence window. 2D thickness maps derived from variable angle spectroscopic ellipsometry reveal that, when ablating with sub-ps pulses, the spot size rather than the energy density determines both the deposition rate and the angular distribution of film material. Pulse shortening leads to significant improvement in surface morphology, as well. While droplets with number densities ranging from 1 × 104 to 7 × 104 mm−2 deteriorate the surface of the films deposited by the KrF excimer laser, sub-ps pulses produce practically droplet-free films. The absence of droplets has also a beneficial effect on the stoichiometry and homogeneity of the films fabricated by ultrashort pulses. 相似文献
3.
Antimonide-based superlattices dedicated to the elaboration of opto-electronic devices have been studied by X-ray scattering techniques. In particular, specular and non-specular X-ray reflectometry experiments have been performed on two MBE-samples elaborated with different shutter sequences at the interfaces. The results have shown a limitation of the incorporation of Sb species in the subsequent InAs layer for one of the samples, as expected.Then, a study on a InGaAs-cap layer/(InGaAs/AlAsSb)N superlattice grown on a InGaAs/InP buffer layer by both specular X-ray reflectometry and High resolution X-ray diffraction is reported. In particular, the results have revealed the presence of a highly disturbed thin-layer on top of the MOVPE-made GaInAs, whose presence has been explained by In-concentration modification during the desoxidation procedure at the surface of the MOVPE-made GaInAs.Beside the results on the Sb-based heterostructures, the use of X-ray scattering metrology as a routinely working non-destructive testing method has been emphasized. 相似文献
4.
镀金层识别及其厚度测定的X—荧光强度比值法 总被引:3,自引:0,他引:3
利用Au原子在X射线激发下所发射的Lβ线和M线的强度比值识别样品是镀金还是K金,同时利用这个比值测定镀金层的厚度,镀金层厚度的测定范围为0~4μm,测定值与标定值的相对误差小于15%。 相似文献
5.
G. Korotcenkov B.K. Cho 《Progress in Crystal Growth and Characterization of Materials》2017,63(1):1-47
In this paper the results of structural analysis of the SnO2 and In2O3 films deposited by spray pyrolysis are presented. The main goals of this analysis are summarizing the results obtained in this field, highlighting a correlation between parameters of film deposition and the material structure and formulating some general regularities, typical for metal oxides. Peculiarities and mechanisms of pyrosol deposition as well as advantages and disadvantages of this technology for deposition of the films with required parameters were also discussed. It is shown that this technology has great potential for controlling structural parameters of metal oxides such as thickness, the grain size, texturing, roughness, the grain faceting and the porosity. 相似文献
6.
水滑石(LDHs)是一种阴离子黏土材料,由于其主体层板厚度的可调性,使其在光/电催化、电池、超级电容器、传感器以及生物医药等领域都具有广泛应用。降低层厚至单层可使材料的物理化学性质发生根本改变,从而优化催化性能。近期研究表明,利用自上而下,自下而上的方法,可以实现单层LDHs类材料的合成,但是受限于产量(g级)以及成本设备等问题,目前规模化制备高质量单层LDHs类材料还没有工业案例。成核晶化隔离法是目前唯一规模化合成纳米LDHs的工业化方法,具有成本低,产量可吨级放大等优点。本综述从合成方法、表征手段、应用三个角度讨论了单层及超薄LDHs的精准调控,详细论述了近期关于单层及超薄LDHs合成突破以及LDHs的规模化生产进展,并对其性能进行了总结,为后续设计高性能单层LDHs提供思路。 相似文献
7.
The authors propose a method for the extraction of material parameter and thickness information from sub-100-μm thin samples using non-differential transmission terahertz time domain spectroscopy. The approach relies on an additional Fourier transform of the frequency dependent material parameters to a quasi space regime. In this quasi space, periodic Fabry-Perot oscillations from the frequency domain, which originate from multiple reflections inside the sample, correspond to discrete peaks. By iterative minimization of these peaks, the highly precise thickness information along with the refractive index and absorption coefficient of the sample can be determined. Experimental verification of the approach is also provided. 相似文献
8.
We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours. 相似文献
9.
PT-PEK-c电光聚合物薄膜的厚度和介电性质 总被引:2,自引:0,他引:2
研制了新的PT-PEK-c电光聚合物薄膜材料,用准波导耦合m线方法测量了PT-PEK-c电光聚合物薄膜的厚度,并测量了该聚合物薄膜在1×102Hz到1×107Hz频率范围内的室温介电常数.测量结果为:厚度d=2.328±0.315μm,在10KHz下,介电常数εr=4023±0.063,介电损耗tanδ=0.003. 相似文献
10.
To realize spectral diffuse reflectance scale in 0/d geometric condition at National Institute of Metrology in China (NIM), a facility based on a non-standard auxiliary integrating sphere method with special structure has been built up and a correction method for the influence on the thickness of PTFE (polytetrafluoroethylene) coating at the port of auxiliary integrating sphere is mainly discussed. The uncertainty of spectral diffuse reflectance in NIM is approximately 0.25% (k = 2) in 380–800 nm. This facility has been used to establish China diffuse reflectance scales in the VIS–NIR part of the spectrum. This system and correction method presented in this paper can be easily implemented on most commercial spectrophotometers with a lower cost. 相似文献