Characteristics of thin gate dielectric in a rapid thermal processing machine and temperature uniformity studies

Rapid Thermal oxidation (RTO) of silicon has been investigated in the temperature range 1000° to 1250°C for an oxidation time of 5 to 60 s. The fairly extensive kinetics data show that linear growth occurs with an activation energyE _a of 1.4 eV. Rapid thermal nitridation of SiO₂ (96 Å) has been performed at three different temperatures: 1150°, 1200°, and 1250°C for a nitridation time up to 150 s. The characteristics of both materials have been investigated by capacitance-voltage, current-voltage, high resolution transmission electron microscopy and Auger spectroscopy. The results will be discussed with special emphasis on breakdown field statistics. The influence of Rapid Thermal Annealing (RTA) on the characteristics of both oxide and nitrided oxide will also be presented. A simulation model of a rapid thermal processing machine is presented with particular attention to the formation of slip lines. The theoretical results are in good agreement with those obtained experimentally.     

Evolution of the modulated antiferromagnetic structure of CeAl2 in the presence of nonmagnetic impurities

Neutron diffraction studies show that the alloy system Ce_1-xLa_xAl₂ with x = 0.1 and 0.2 orders in the same incommensurate modulated antiferromagnetic structure as the pure compound CeAl₂. The existence and concentration dependence of a commensurate extra reflection ($\text{5}\text{2}$$\text{3}\text{2}$$\text{1}\text{2}$) is interpreted as being due to a modulation quenching of the CeAl₂ structure. This is in contrast to the suggestion that the magnetic order of CeAl₂ can be described by a triple-q structure.     

Structure magnetique du sulfure de fer FeS de type blende

Zinc blende type FeS, which is cubic at room temperature and becomes orthorhombic, pseudo-tetragonal ($\text{c}\text{a}\text{< 1}$) at the magnetic transition, has been studied by neutron diffraction. The magnetic space group is F_c 2 2' 2' : ferromagnetic (001) planes are coupled antiferromagnetically, and the moments lie along the a axis, in agreement with previous Mössbauer measurements. The exchange integral between nearest neighbours in the ab plane is thus weaker than those between nearest neighbours in the ac and bc planes.     

Nouvelles donnes experimentales sur les proprietes magnetiques de Cr3 Se4 et des solutions solides Cr3 Set S4−t

Magnetic susceptibility and specific heat measurements and neutron diffraction experiments allow to locate Néel temperatures T_N and also two types of transitions below T_N. At T_t of order T_N/2 the susceptibility is maximum, and the magnetic structure is modified (for Se-rich compounds). The second transition takes place around 15 K and is characterized by a specific heat peak and a susceptibility anomaly but no modification of the magnetic structure, according to our powder diffraction data.     

Neutron diffraction determination of the magnetic structures of NpCo2Si2 and NpCu2Si2

A small polycrystalline ingot sample of NpCo₂Si₂ (weight ≈ 1.5 g) has been studied by neutron diffration between 2 and 160 K on the multi-detector D1B of ILL, Grenoble. At 100 K, the crystal structure is body-centered tetragonal (space group 14/mmm) with a = 3.886 Å and c =9.649 Å. Below T_N = (44 ± 2) K, seven superlattice lines are observed which correspond to a simple tetragonal lattice with lattice constants as above. They are consistent with a type I antiferromagnetic structure of the Np (2a) sublattice, with (001) ferromagnetic sheets coupled antiferromagnetically according to the sequence +-+-. At 6 K, the neptunium moment obtained from the diffracted intensities is: (1.48 ± 0.20)_μuB, and makes an angle 52° ± 15° with the c axis. The cobalt moment is certainly smallet than 0.3_μuB. The Np moment correlates well with the ²³⁷Np hyperfine field deduced from Mos?sbauer spectroscopy; the sublattice magnetization-temoperature curve follows very well the $\text{J=}\text{1}\text{2}$ brillouin curve. The magnetism is therefore probably of lovalized character in this compound. An isomorphous sample of NpCu₂Si₂ (a = 3.990 Å c = 9.920 Å) was shown to be ferromagnetic below (41 ± 2) K, with the Np moment [1.5 ± 0.2)_μuB] aligned along the c axis.     

Magnetic and hyperfine properties of NpFe2−xCoxSi2 tetragonal systems

Magnetization, ²³⁷Np Mössbauer effect and neutron diffraction studies of the tetragonal NpFe_2?xCo_xSi₂ (x = 0, 1, 1.5, 2) intermetallic compounds were performed. The Mössbauer studies of the²³⁷Np show a magnetic order below 87 (3)_, 15 (3), 37 (3), 42 (3) K, hyperfine fields of 2535 (50), 1600 (50), 2210 (50), 2600 (50) MHz and isometric shifts of -2.3 (3), +7.6 (3), 0 (3), -2.9 (3) mm/s (relative to NpAl₂), respectively. An extremely low magnetization of non-saturated character (at 4.2 K, 20 KOe) is observed.A polycrystalline ingot sample of NpCo₂Si₂ was studied by neutron diffraction at temperatures from 2 to 160 K. Five superlattice lines were observed at temperatures below 46 K and are consistent with an antiferromagnetic structure of the Np(2a) sublattice of type I with T_N = 46 (3) K. The Np ion magnetic moment consistent with the diffracted intensities is 1.5 (1) μ_B with no localized moment on the Co ion.A direct correlation between the Isomer shift, Hyperfine fields and ordering temperature is reported for the first time. This unusual correlation can be explained only if strong f-d, f-s hybridization are assumed.     

On the magnetic ordering of CeAl2

The magnetic behaviour of CeAl₂ at low temperature is not apparent : contradictory experiments have assumed either an antiferromagnetic ordering or a moment reduction of the Ce³⁺ ion. Using the multidetector D1B at the I.L.L. high flux reactor, we have measured neutron diffraction diagrams, above and below the transition temperature of 3.8 K. At 1.9 K, we have found very weak magnetic reflections corresponding to an antiferromagnetic structure sinusoǐdally modulated, according to the propagation vector (0.612, 0.388, 0.5). The moment reduction in such a modulated structure at 1.9 K can hardly be explained by a thermal partial disordering of the moments. It is rather due to the existence of a singlet ground state resulting from the negative exchange between the 4f electron of Ce³⁺ and the conduction electrons.     

Modulated magnetic structures of ErPb3, HoPb3, ErTl3 and HoTl3

Neutron diffraction experiments have been carried out on the magnetically ordered phases of ErPb₃, HoPb₃, ErTl₃ and HoTl₃. The magnetic moments were found to be sinusoidally modulated with a propagation vector of (0, 0.2, 0.5) for the Pb-compounds and (0.38, 0.38, 0.16) for the Tl-compounds.Work supported by the Bundesministerium für Forschung und Technologie     

Bond lengths in ‘CaMn3’ (Mn4)O12: A new Jahn-Teller distortion of Mn3+ octahedra

The crystal structure of [CaMn₃] (Mn₄)O₁₂ has been refined with the Rietveld method by using neutron powder diffraction data. This compound is trigonal with the perovskite-like [NaMn₃] (Mn₄)O₁₂ arrangement. The trigonality is due to the 1:3 order between Mn⁴⁺ and Mn³⁺ on the octahedral sites. [CaMn₃] (Mn₄)O₁₂ contains two different types of Mn³⁺ Jahn-Teller distorted polyhedra: the first, which is found in all the AC₃B₄O₁₂ compounds is a rhombic prism, while the second is an apically contracted octahedron, which represents a new type of Jahn-Teller distortion for Mn³⁺ cations in oxide compounds.