ZnO∶Al/p-Si的接触特性

利用射频磁控溅射制备了ZnO∶A l/p-S i接触,并对其进行C-V和I-V特性的77~350 K变温测量。并对未热退火和800℃热退火两种样品的测量结果进行了对比分析。结果发现,未经热退火和经过热退火处理的样品在C-V和I-V特性上有很大差别。解释了两种样品的C-V和I-V测量结果的不同。对于未退火的样品,由于界面处的大量界面态的屏蔽作用,使得ZnO∶A l/p-S i异质结的C-V曲线发生畸变。经800℃热退火,ZnO∶A l/p-S i异质结的C-V特性恢复正常,说明热退火已经消除了异质结中的界面态和缺陷态。研究表明ZnO∶A l/p-S i异质结经适当热退火处理有更好的整流特性同时对光致发光也更有利。     

ZnO:Al/p-Si的接触特性

利用射频磁控溅射制备了ZnO：Al／p—Si接触,并对其进行C-V和I-V特性的77～350K变温测量。并对未热退火和800℃热退火两种样品的测量结果进行了对比分析。结果发现,未经热退火和经过热退火处理的样品在C—V和I-V特性上有很大差别。解释了两种样品的C—V和I-V测量结果的不同。对于未退火的样品,由于界面处的大量界面态的屏蔽作用,使得ZnO：Al／p—Si异质结的C—V曲线发生畸变。经800℃热退火,ZnO：Al／p—Si异质结的C—V特性恢复正常,说明热退火已经消除了异质结中的界面态和缺陷态。研究表明ZnO：Al／p—Si异质结经适当热退火处理有更好的整流特性同时对光致发光也更有利。     

Influence of Interface Charge on Electrical Properties of ZnO／Si Heterojunction

The capacitance-voltage and current-voltage properties of the samples before and after annealing are investigated at 300 K and 195K. It is found that the interface charge plays an important role for the heterojunction properties. After annealing, the samples exhibit typical junction properties. The heterojunction shows a built-in potential 0.62eV consistent with the theoretical result 0.67eV. However, the sample exhibits more complex behaviour before annealing. The experimental results can be explained by heterojunction theory when, introducing interface charge, which suggests that the annealing can reduce interface charge and can improve the junction properties of the samples.