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We evaluate the effects of the holes geometry drilled by a femtosecond laser on a stainless alloy with various defocused irradiation time, which ranges from 0 min to 1 h. The laser ablation efficiency is increased by a factor of3 when the irradiation time is elevated from 0 to 30 min. Also, the morphology of the hole is observed by a scanning electron microscope, where the result indicates that the defocused irradiation time has a significant influence on the morphology changes. The reason for such changes is discussed based on the pretreatment effect and the confined plasma plume. As an application example, the microchannel is fabricated by a femtosecond laser combined with the defocused irradiation to demonstrate the advantage of the proposed method in fabricating functional structures.  相似文献   
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