铟镓锌氧薄膜晶体管的悬浮栅效应研究

为了避免光照对铟镓锌氧薄膜晶体管(InGaZnO thin film transistors,IGZO TFTs)电学特性的影响,IGZO TFT要增加遮光金属层.本文研究了遮光金属栅极悬浮时,IGZO TFT的输出特性.采用器件数值计算工具TCAD(technology computer-aided design)分析了IGZO层与栅介质层界面处电势分布,证实了悬浮栅(floating gate,FG)IGZO TFT输出曲线的不饱和现象是由悬浮栅与TFT漏端的电容耦合造成.基于等效电容的电压分配方法,提出了悬浮栅IGZO TFT电流的一阶模型.TCAD数值分析及一阶物理模型结果与测试具有较高程度的符合,较完整地解释了悬浮栅IGZO TFT的电学特性.     

同步对称双栅InGaZnO薄膜晶体管电势模型研究

研究了同步对称双栅氧化铟镓锌薄膜晶体管(InGaZnO thin film transistors,IGZO TFTs)的沟道电势,利用表面电势边界方程联合Lambert函数推导得到了器件沟道电势的解析模型.该模型考虑了IGZO薄膜中存在深能态及带尾态等缺陷态密度,能够同时精确地描述器件在亚阈区(sub-threshold)与开启区(above threshold)的电势分布.基于所提出的双栅IGZO TFT模型,讨论了不同厚度的栅介质层和有源层时,栅-源电压对双栅IGZO TFT的表面势以及中心势的调制效应.对比分析了该模型的计算值与数值模拟值,结果表明二者具有较高的符合程度.     

Surface potential-based analytical model for InGaZnO thin-film transistors with independent dual-gates

An analytical drain current model on the basis of the surface potential is proposed for indium-gallium zinc oxide(InGaZnO)thin-film transistors(TFTs)with an independent dual-gate(IDG)structure.For a unified expression of carriers’distribution for the sub-threshold region and the conduction region,the concept of equivalent flat-band voltage and the Lambert W function are introduced to solve the Poisson equation,and to derive the potential distribution of the active layer.In addition,the regional integration approach is used to develop a compact analytical current-voltage model.Although only two fitting parameters are required,a good agreement is obtained between the calculated results by the proposed model and the simulation results by TCAD.The proposed current-voltage model is then implemented by using Verilog-A for SPICE simulations of a dual-gate InGaZnO TFT integrated inverter circuit.