High temperature characteristics of bilayer epitaxial graphene field-effect transistors on SiC Substrate

In this paper,high temperature direct current(DC) performance of bilayer epitaxial graphene device on SiC substrate is studied in a temperature range from 25℃ to 200℃.At a gate voltage of-8 V(far from Dirac point),the drainsource current decreases obviously with increasing temperature,but it has little change at a gate bias of +8 V(near Dirac point).The competing interactions between scattering and thermal activation are responsible for the different reduction tendencies.Four different kinds of scatterings are taken into account to qualitatively analyze the carrier mobility under different temperatures.The devices exhibit almost unchanged DC performances after high temperature measurements at 200℃ for 5 hours in air ambience,demonstrating the high thermal stabilities of the bilayer epitaxial graphene devices.     

Radio-Frequency Performance of Epitaxial Graphene Field-Effect Transistors on Sapphire Substrates

We report dc and the first-ever measured small signal rf performance of epitaxial graphene field-effect transistors （GFETs）, where the epitaxial graphene is grown by chemical vapor deposition （CVD） on a 2-inch c-plane sapphire substrate. Our epitaxial graphene material has a good flatness and uniformity due to the low carbon concentration during the graphene growth. With a gate length Lg = 100 nm, the maximum drain source current Ids and peak transconductance gm reach 0.92 A/mm and 0.143 S/mm, respectively, which are the highest results reported for GFETs directly grown on sapphire. The extrinsic cutoff frequency （fT） and maximum oscillation frequency （fmax） of the device are 12 GHz and 9.5 GHz, and up to 32 GHz and 21.5 GHz after de-embedding, respectively. Our work proves that epitaxial graphene on sapphire substrates is a promising candidate for rf electronics.     

双层石墨烯位于1800—2150cm~(-1)频率范围内的和频拉曼模

文章利用拉曼光谱研究了双层石墨烯在1800—2150 cm-1范围内的和频拉曼模.基于双共振拉曼散射理论,利用多波长激光拉曼散射结合声子色散曲线分别从实验上和理论上分析发现,双层石墨烯在此频率范围内主要存在4个拉曼模,它们主要由LO和LA或iTA按不同共振散射方式所组成的4个和频模,而iTO和oTO参与和频的可能性很小.文章澄清了学术界在1800—2150 cm-1频率范围内和频模的解释,有助于进一步深入理解多层石墨烯在此范围内的和频模.     

Effect of surface morphology on the electron mobility of epitaxial graphene grown on 0° and 8° Si-terminated 4H-SiC substrates

Graphene with different surface morphologies were fabricated on 8° -off-axis and on-axis 4H-SiC(0001) substrates by high-temperature thermal decompositions. Graphene grown on Si-terminated 8° -off-axis 4H-SiC(0001) shows lower Hall mobility than the counterpart of on-axis SiC substrates. The terrace width is not responsible for the different electron mobility of graphene grown on different substrates, as the terrace width is much larger than the mean free path of the electrons. The electron mobility of graphene remains unchanged with an increasing terrace width on Siterminated on-axis SiC. Interface scattering and short-range scattering are the main factors affecting the mobility of epitaxial graphene. After the optimization of the growth process, the Hall mobility of the graphene reaches 1770 cm 2 /V·s at a carrier density of 9.8.×10 12 cm 2 . Wafer-size graphene was successfully achieved with an excellent double-layer thickness uniformity of 89.7% on a 3-inch SiC substrate.     

蓝宝石衬底上化学气相沉积法生长石墨烯

化学气相沉积(CVD)法是制备大面积、高质量石墨烯材料的主要方法之一,但存在衬底转移和碳固溶等问题,本文选用蓝宝石衬底弥补了传统CVD法的不足。利用CVD法在蓝宝石衬底上生长石墨烯材料,研究生长温度对石墨烯表面形貌和晶体质量的影响。原子力显微镜(AFM)、光学显微镜(OM)、拉曼光谱和霍尔测试表明,低温生长有利于保持材料表面的平整度,高温生长有利于提高材料的晶体质量。研究氢气和碳源对蓝宝石衬底表面刻蚀作用机理,发现氢气对蓝宝石衬底有刻蚀作用,而单纯的碳源不能对衬底产生刻蚀效果。在1200 ℃下,直径为50 mm的晶圆级衬底上获得平整度和质量相对较好的石墨烯材料,室温下载流子迁移超过1000 cm²·V^-1·s^-1。     

多晶金刚石对硅基氮化镓材料的影响

氮化镓(GaN)器件的自热问题是目前限制其性能的关键因素,在GaN材料上直接生长多晶金刚石改善器件的自热问题成为研究的热点,多晶金刚石距离GaN器件工作有源区近,散热效率高,但多晶金刚石和GaN材料热失配可能会导致GaN电特性衰退.本文采用微波等离子体化学气相沉积法,在2 in (1 in=2.54 cm)Si基GaN材料上生长多晶金刚石.测试结果显示,多晶金刚石整体均匀一致,生长金刚石厚度为9—81 μm,随着多晶金刚石厚度的增大, GaN (002)衍射峰半高宽增量和电性能衰退逐渐增大.通过激光切割和酸法腐蚀,将Si基GaN材料从多晶金刚石上完整地剥离下来.测试结果表明:金刚石高温生长过程中,氢原子对氮化硅外延层缺陷位置有刻蚀作用形成孔洞区域,刻蚀深度可达本征GaN层;在降温过程,孔洞周围形成裂纹区域.剥离下来的Si基GaN材料拉曼特征峰峰位, XRD的(002)衍射峰半高宽以及电性能均恢复到本征状态,说明多晶金刚石与Si基GaN热失配产生应力,引起GaN晶格畸变,导致GaN材料电特性衰退,这种变化具有可恢复性,而非破坏性.     

Si面4H-SiC衬底上外延石墨烯近平衡态制备

SiC热解法是制备大面积、高质量石墨烯的理想选择之一.外延石墨烯的晶体质量仍是制约其应用的关键因素之一.本文通过SiC热解法在4H-SiC(0001)衬底上制备单层外延石墨烯.通过引入氩气惰性气氛和硅蒸气,使SiC衬底表面的Si原子升华与返回概率接近平衡,外延石墨烯生长速率大大减慢,单层石墨烯的生长时间从15 min延长至75 min.测试分析表明,生长速率减慢,外延石墨烯中缺陷减少,晶体质量提高,使得外延石墨烯的电性能都得到改善,单层外延石墨烯的最高载流子迁移率达到1200 cm2/V·s,方阻604?/.以上结果表明,控制生长气氛,减慢生长速率是实现高质量外延石墨烯的可行途径之一.