离子束流剖面分布离线诊断方法探索

提出了一种基于二次离子质谱分析技术的离子束流剖面分布的离线诊断方法,具有分辨率高、可同时给出束流剖面分布和成分信息的特点。利用数值模拟方法对该诊断方法的可行性进行了分析和讨论,并结合原理实验给出了验证结果。结果表明:该方法可以用于真空密封型中子发生器离子束流剖面分布的诊断,能够成为其他诊断方法的验证手段和有力补充。     

多丝正比室视差效应改善方法

通过模拟研究,找到了一种采用非均匀电极高压来改善探测器视差效应的方法;考察了该方法对多丝正比室的电子收集效率、增益一致性等性能的影响。结果表明:该方法可以显著减小探测器的视差效应,不会影响探测器的电子收集效率,引起的阳极丝增益一致性的变化也基本不会对探测器的总体性能造成影响。     

Estimation of Plasma Density by Surface Plasmons for Surface-Wave Plasmas

An estimation method of plasma density based on surface plasmons theory for surface-wave plasmas is proposed. The number of standing-wave is obtained directly from the discharge image, and the propagation constant is calculated with the trim size of the apparatus in this method, then plasma density can be determined with the value of 9.1 × 10^17m^-3. Plasma density is measured using a Langmuir probe, the value is 8.1 × 10^17m^-3 which is very close to the predicted value of surface plasmons theory. Numerical simulation is used to check the number of standing-wave by the finite-difference time-domain （FDTD） method also. All results are compatible both of theoretical analysis and experimental measurement.     

A numerical simulation of surface wave excitation in a rectangular planar-type plasma source

The principle of surface wave plasma discharge in a rectangular cavity is introduced simply based on surface plasmon polariton theory. The distribution of surface-wave electric field at the interface of the plasma-dielectric slab is investigated by using the three-dimensional finite-difference time-domain method (3D-FDTD) with different slot-antenna structures. And the experimental image of discharge with a novel slot antenna array and the simulation of the electric field with this slot antenna array are both displayed. Combined with the distribution of surface wave excitation and experimental results, the numerical simulation performed by using 3D-FDTD is shown to be a useful tool in the computer-aided antenna design for large area planar-type surface-wave plasma sources.     

Effect of H~- ion extraction on a plasma sheath under an external weak magnetic field

The extraction of negative ions inevitably leads to the destruction of the original plasma state. To understand the effect of extraction on a plasma sheath under a weak magnetic filter field, the time-dependent behavior of H~- ion extraction from a negative ion source has been studied by particle-in-cell simulation in the collisionless limit. The simulation results have shown that the plasma sheath would undergo a transient process, in which there exists an edge electrostatic wave that propagates counterclockwise along the wall with a velocity of 4 mm/ns until it reaches the other side of extraction aperture. The thickness of the plasma sheath and the plasma potential both increase greatly at the final quasi-steady-state. For comparison, the results of extracting positive ions are also given.     

脉冲离子束作用下靶面次级电子的抑制

论述了离子束作用下固体表面次级电子产生的机制,介绍了特种真空器件中次级电子抑制的各种方法及其优缺点,提出了脉冲离子束作用下靶面次级电子抑制的自偏势法和曲面靶法等设计思路,并在实验上进行了初步验证。实验结果表明,自偏势电压大于80 V后,次级电子得到很好的抑制。在相同束流情况下,曲面靶较平面靶的次级电子产额少。利用实验结果进行估算得到了近似的次级电子产额约为0.67,比文献中的结果(0.58)偏大。对实验中自偏势法抑制反峰电子电流的效果进行了分析和讨论,结果表明:自偏势法不但能够有效抑制离子打靶产生的次级电子,还能抑制由功率源不稳定带来的入射反峰电子流。     

Particle-in-cell investigation on the resonant absorption of a plasma surface wave

The resonant absorption of a plasma surface wave is supposed to be an important and efficient mechanism of power deposition for a surface wave plasma source. In this paper, by using the particle-in-cell method and Monte Carlo simulation, the resonance absorption mechanism is investigated. Simulation results demonstrate the existence of surface wave resonance and show the high efficiency of heating electrons. The positions of resonant points, the resonance width and the spatio-temporal evolution of the resonant electric field are presented, which accord well with the theoretical results. The paper also discusses the effect of pressure on the resonance electric field and the plasma density.     

装置参数对狭缝天线激发的等离子体表面波传播的影响

采用时域有限差分法对矩形结构装置的等离子体表面波传播进行了三维数值模拟.研究了装置参数(如介质板相对介电常数、厚度以及介质板上方空气间隙)对天线阵列激发的等离子体表面波传播的影响,给出了合适的介质板相对介电常数和厚度,并指出空气间隙的存在会严重削弱天线阵列对表面波的激发.计算结果可为大面积矩形表面波等离子体源装置的优化设计提供参考. 关键词： 时域有限差分法 等离子体表面波 狭缝天线     

Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200~W and a filling gas pressure of 50~Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3~cm from the quartz window.     

Mode Transition of Vacuum Arc Discharge and Its Effect on Ion Current

The mode transition of a pulsed vacuum arc discharge, which is from vacuum surface flashover to non-surface vacuum breakdown or vice versa, is studied by simply adjusting a trigger resistor. This approach provides a possibility to research the transition discharge process. Since the transition process is smooth and controllable, the transition mechanism and its effect on the performance of an ion source can be investigated via various diagnosis experiments. The experimental results show that the mode transition occurs when the resistance is in the range of 0- 10Ω. With the mode transition from surface flashover to non-surface vacuum breakdown, the vacuum arc discharge becomes more intense and the ion current produced by the Ti cathode ion source increases by two times. The related physical mechanism is also discussed in detail.