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Compositional and structural evolution of the titanium dioxide formation by thermal oxidation 下载免费PDF全文
Titanium oxide films were prepared by annealing DC magnetron sputtered titanium films in an oxygen ambient. X-ray diffraction (XRD), Auger electron spectroscopy (AES) sputter profiling, MCs^+-mode secondary ion mass spectrometry (MCs^+-SIMS) and atomic force microscopy (AFM) were employed, respectively, for the structural, com- positional and morphological characterization of the obtained films. For temperatures below 875 K, titanium films could not be fully oxidized within one hour. Above that temperature, the completely oxidized films were found to be rutile in structure. Detailed studies on the oxidation process at 925K were carried out for the understanding of the underlying mechanism of titanium dioxide (TiO2) formation by thermal oxidation. It was demonstrated that the formation of crystalline TiO2 could be divided into a short oxidation stage, followed by crystal forming stage. Relevance of this recognition was further discussed. 相似文献
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用光栅光谱仪测量了夫兰克-赫兹实验中Ne原子的发射光谱.光谱分析表明,橙黄色的发射光包含多条谱线,已标定的谱线都是Ne原子从第二激发态的各个子能级跃迁到第一激发态的对应能级所产生的. 相似文献
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