基于新型三环谐振器的诱导透明效应分析

针对谐振式微腔的应用需求, 提出了一种新型三环谐振式微腔结构, 类似于原子系统中的电磁诱导透明, 耦合诱导透明(CRIT)效应在一个新的光学微腔系统中已被实验证明. 该结构在硅基上由三个尺寸完全一样的微环腔组成, 通过理论分析、制备和实验测试, 能够观察到CRIT现象, 其频谱具有低群速的狭窄透明峰, 与光栅耦合器的耦合效率为34%, 并且谐振器的品质因数达到了0.65×10⁵, 同时, 失谐的谐振波长可以通过温度变化来控制, 这在旋转传感、光滤波器、光存储器等方面的应用有重要意义.     

Coupled resonator-induced transparency on a three-ring resonator

The coupled resonator-induced transparency(CRIT) phenomenon, which is analogous to electromagnetically induced transparency in atomic systems, can occur in an original integrated optical resonator system due to the coherent interference of the coupled optical resonators. The system was composed of three ring resonators on silicon, each with the same cavity size, and the optical coupling to the input and output ports was achieved using grating with a power coupling efficiency of 36%. A CRIT resonance whose spectrum shows a narrow transparency peak with a low group velocity was demonstrated.The quality factor of the ring resonator can attain a value up to 6×10~4, and the harmonic wavelength can be controlled by adjusting the temperature. The through and drop transmission spectra of the resonator are reconciled well with each other and also consistent well with the theoretical analysis.     

一种大过载MEMS加速度计新型封装方法

传统的MEMS系统级封装多采用IC标准的封装形式,例如塑料封装形式、陶瓷管壳封装形式、TO 系列金属管壳封装。由于大过载传感器需要工作环境冲击振动比较高,陶瓷管壳容易破碎;塑封采用热塑成型,封装后残余应力大;TO系列管壳体积较大,并且采用直插形式安装,在超过5×103g冲击下,管脚容易折断。针对这种情况,本文提出了一种新型 MEMS 加速度计封装方法,在圆片级采用玻璃-硅-玻璃三层结构,并采用铝金属壳体螺钉安装并在壳体内部双组分环氧树脂灌封。封装之后的大过载加速度计具有体积小,密封性强,残余应力小、抗强冲击、稳定性好、适应于小批量生产等优点。