Al2O3衬底无催化剂生长GaN纳米线及其光学性能

采用一种绿色的等离子增强化学气相沉积法,以Al2O3为衬底, Ga金属为镓源, N2为氮源,在不采用催化剂的情况下,成功制备获得了结晶质量良好的GaN纳米线.研究表明,生长温度可显著调控GaN纳米线的形貌,当反应温度为950℃时,生长出的GaN微米片为六边形;当反应温度为1000℃时,生长出了长度为10-20μm的超长GaN纳米线.随着反应时间增加, GaN纳米线的长度增加. GaN纳米线内部存在着压应力,应力大小为0.84 GPa.同时,也进一步讨论了GaN纳米线无催化剂生长机制. GaN纳米线光致发光结果显示, GaN纳米线缺陷较少,结晶质量良好,在360 nm处有一个较为尖锐的本征发光峰,可应用于紫外激光器等光电子器件.本研究结果将为新型光电器件低成本绿色制备提供一个可行的技术方案.     

A simple method to synthesize worm-like AlN nanowires and its field emission studies

The worm-like AlN nanowires are fabricated by the plasma-enhanced chemical vapor deposition (PECVD) on Si substrates through using Al powder and N₂ as precursors, CaF₂ as fluxing medium, Au as catalyst, respectively. The as-grown worm-like AlN nanowires each have a polycrystalline and hexagonal wurtzite structure. Their diameters are about 300 nm, and the lengths are over 10 μm. The growth mechanism of worm-like AlN nanowires is discussed. Hydrogen plasma plays a very important role in forming the polycrystalline structure and rough surfaces of worm-like AlN nanowires. The worm-like AlN nanowires exhibit an excellent field-emission (FE) property with a low turn-on field of 4.5 V/μm at a current density of 0.01 mA/cm² and low threshold field of 9.9 V/μm at 1 mA/cm². The emission current densities of worm-like AlN nanowires each have a good stability. The enhanced FE properties of worm-like AlN nanowires may be due to their polycrystalline and rough structure with nanosize and high aspect ratio. The excellent FE properties of worm-like AlN nanowires can be explained by a grain boundary conduction mechanism. The results demonstrate that the worm-like AlN nanowires prepared by the proposed simple and the PECVD method possesses the potential applications in photoelectric and field-emission devices.     

PECVD法制备高结晶GaN薄膜及其光电响应性能

采用一种简单、绿色、低成本的等离子增强化学气相沉积(PECVD)法,在950℃下成功制备了高结晶质量的GaN薄膜.为了提高GaN薄膜结晶质量和弄清GaN薄膜光响应机制,研究了GaN缓冲层制备温度对GaN薄膜结晶质量和光电性能的影响.研究表明,随着GaN缓冲层制备温度的增加,GaN薄膜的结晶质量先提高后降低,在缓冲层温度为875℃时,结晶质量最高,此时计算得出的总位错密度为9.74×10~9 cm^-2,载流子迁移率为0.713 cm~2/(V·s).经过退火后,GaN薄膜的总位错密度降低到7.38×10~9 cm^-2,载流子迁移率增大到43.5 cm~2(V·s),此时GaN薄膜光响应度为0.20 A/W,光响应时间为15.4 s,恢复时间为24 s,可应用于紫外光探测器.通过Hall测试和X射线光电子能谱仪分析得出,GaN薄膜内部存在着N空位、Ga空位或O掺杂,它们作为深阱能级束缚和复合光生电子和空穴,使得光响应度与偏压呈抛物线关系;另外,空位和O掺杂形成的深阱能级也是导致GaN薄膜的光电流响应和恢复缓慢的根本原因.