调制自由载流子吸收测量半导体载流子输运参数的三维理论

推导出用于测量半导体载流子输运特性(载流子寿命、载流子扩散系数和前表面复合速度)的调制自由载流子吸收(modulated free carrier absorption, MFCA)检测技术的三维理论模型,给出了调制自由载流子吸收检测信号与调制频率和抽运-探测光相对距离的关系.定性分析了在不同调制频率时各个载流子输运参数对径向位置扫描曲线(信号与两束光相对距离的关系)的影响,结果表明调制自由载流子吸收检测信号对各个参数的灵敏度随抽运-探测光相对距离的增加而增加.仿真和实验结果表明,通过拟合不同调制频率时调 关键词： 调制自由载流子吸收 载流子输运特性 径向位置扫描     

Measurement accuracy analysis of the free carrier absorption determination of the electronic transport properties of silicon wafers

By introducing the random and systematic errors in simulated data computed from conventional frequency-scan and laterally resolved modulated free carrier absorption theory models, we investigate the relative determination sensitivities of three electronic transport properties, namely, carrier lifetime, carrier diffusivity and front surface recombination velocity of silicon wafers determined by frequency-scan and laterally resolved techniques. The phase and amplitude data with random errors as functions of the modulation frequency at zero pump-probe-beam separation or of the two-beam separation at four different modulation frequencies are simultaneously fitted to an appreciated carrier diffusion model to extract three transport parameters. The statistical results and fitted accuracies of the transport parameter determined by both techniques are theoretically analysed. Corresponding experimental results are carried out to compare to the simulated results. The simulated and experimental results show that the determination of the transport properties of silicon wafers by the laterally resolved technique are more accurate, as compared with that by the frequency-scan technique.     

方波调制下自由载流子吸收测量半导体载流子输运参数的时域模型

本文建立了用于测量半导体载流子输运特性(载流子寿命、载流子扩散系数和前表面复合速度)的方波调制下自由载流子吸收(free carrier absorption,FCA)检测技术的时域理论模型.通过数值模拟,分析了在不同调制频率下时域曲线的变化趋势以及各个载流子输运参数对时域曲线的影响.结果表明方波调制下的自由载流子吸收的时域信号对各个参数都用较高的灵敏度,且参数值的测量范围大于频域测量范围.     

用于实现散射介质中时间反演的数字相位共轭的相干性

抑制散射介质对光的散射,调控光在散射介质中的传输,是光通信、生物光子学、光镊等领域的重要课题.设计并实现了基于宽谱光源和数字相位共轭的可调控光在散射介质中传输的时间反演实验系统.实验获取了不同相干长度下物光和参考光束之间的光程差与干涉图样、相位图及时间反演信号之间的关系,分析了光源相干性对调控光在散射介质中传输的影响.实验结果表明,基于宽谱光源的相干特性和数字相位共轭技术,通过调节光程差能选择性获取同一散射角度及相同传输路径的光束的相对相位,再利用空间光调制器对参考光束进行调控,实现光束的反向传播,从而选择性实现对同一散射角度及相同传输路径的光的时间反演.