排序方式： 共有1条查询结果，搜索用时 15 毫秒
1
1.
Dual-frequency laser interferometer has the advantagesof wide measuring scope, high speed, and high preci-sion. It is widely applied to the precision and super-precision length measuring, especially used in locatingof wafer stage in high precision step and scan lithog-raphy, which is un-substitutable. Though the technol-ogy of dual-frequency laser interferometer was developedand achieved to a relatively mature level, it is still fo-cused because of the exigent requirements in the ad-vanced man… 相似文献
1