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PHOTOLUMINESCENCE OF NANOCRYSTALLINE SiC FILMS PREPARED BY RF MAGNETRON SPUTTERING 总被引:1,自引:0,他引:1 下载免费PDF全文
Amorphous SiC films are deposited on Si (111) substrates by rf magnetron sputtering and then annealed at 1200℃ for different times by a dc self-heating method in a vacuum annealing system. The crystallization of the amorphous SiC is determined by Raman scattering at room temperature and X-ray diffraction. The experimental result indicates that the SiC nanocrystals have formed in the films. The topography of the as-annealed films is characterized by atomic force microscopy. Measurements of photoluminescence of the as-annealed films show blue or violet light emission from the nanocrystalline SiC films and photoluminescence peak shifts to short wavelength side as the annealing time decreases. 相似文献
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一种新型的接触压力传感器 总被引:1,自引:0,他引:1
利用碳材料的压阻效应,研制开发了一种新型的接触压力传感元件碳膜压力传感器,可以直接用它来定量测量两接触体间的接触压力.文中对接触压力传感器的压力电阻(σ-ΔR/R)关系进行了标定,测定了铁基形状记忆合金管接头与被连接管间的接触压力.经与光力学一有限元数值分析混合法结果进行比较后表明;这种新型的碳膜式接触压力传感器性能稳定,操作简便 相似文献
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