ZnSe多晶化学机械抛光研究

本文针对ZnSe多晶的性能,在试验的基础上,研究出一套实用的、行之有效的ZnSe多晶加工工艺,并重点讨论了化学机械抛光工艺.同时对加工后零件的工艺参数、表面质量及透过率的测试,结果表明所采用的化学机械加工法可取得非常好的抛光效果.     

Structural, Optical and Electrical Properties of Hydrogen-Doped Amorphous GaAs Thin Films

Amorphous CaAs films are deposited on substrates of quartz glass and sificon by rf magnetron sputtering technique in different gas ambient. First, the amorphous structure of the prepared samples is identified by x-ray diffraction. Second, analysis by radial distribution function and pair correlation function method is established to characterize the microstructure of the samples. Then, the content and bond type of hydrogen are analysed using Fourier transform infrared absorption spectroscopy. It is found that the bonded hydrogen content increases with increasing partial pressure PH of H2. However, the hydrogen content saturates at PH 〉 1 × 10^-1 Pa. Hydrogen addition shills the optical absorption edge to higher energy, decreases the dark conductivity and improves the photo-sensitivity. The optical gap, dark conductivity and photo-sensitivity of the films are dependent on the bonded hydrogen content. These results demonstrate that hydrogen has obvious passivation effects on rf sputtered amorphous GaAs thin films.     

多种含硫溶液钝化(100)GaAs表面的实验研究

为实现GaAs表面的钝化,以Na2S、(NH4)2S、CH3CSNH2为主要研究对象,通过对比实验研究得出较为理想的湿法钝化液。通过光致发光(PL)谱研究了(NH4)2S 叔丁醇、CH3CSNH2 NH4OH、CH3CSNH2 叔丁醇三种不同含硫溶液钝化(100)GaAs表面后的发光特性。PL谱测试发现,(NH4)2S 叔丁醇饱和溶液处理过的(100)GaAs表面光致发光强度最强,PL谱的相对发光强度是未做钝化处理的10倍左右。因此得出(NH4)2S 叔丁醇饱和溶液是较为理想的(100)GaAs表面钝化液。     

ZnSe红外窗口材料的性能及其制备

ZnSe是一种优秀的红外窗口材料,得到广泛的关注.在本文叙述了ZnSe红外窗口材料的光学特性和力学特性,以及详细地描述ZnSe体单晶熔体法、气相法、溶液法和固相再结晶制备技术及其影响因素.     

Study on hydrogen sulfide 790-nm laser diode plasma passivation of cavity surface

In order to improve the optical properties of the Ⅲ-Ⅴ laser diodes （LDs） by means of H2S plasma passivation technology, H2S plasma passivation treatment is performed on the GaAs（110） surface. The optimum passivation conditions obtained are 60-W radio frequency （RF） power and 20-min duration. So the laser cavity surfaces are treated under the optimum passivation conditions. Consequently, compared with unpassivated lasers with only AR/HR-eoatings, the catastrophic optical damage （COD） threshold value of the passivated lasers by H2S plasma treatment is increased by 33%, which is almost the same as that of （NH4）2Sx treatment. And the life-test experiment has demonstrated that this passivation method is more stable than （NH4）2Sx solution wet-passivated treatment.