| ZnSe多晶化学机械抛光研究 |
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| 引用本文： | 么艳平,张玉兰,李长江,刘景和.ZnSe多晶化学机械抛光研究[J].人工晶体学报,2006,35(6):1378-1382. |
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| 作者姓名： | 么艳平 张玉兰 李长江 刘景和 |
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| 作者单位： | 吉林师范大学信息技术学院,四平136000;长春理工大学材料与化工学院,长春,130022;长春理工大学光学加工中心,长春,130022;长春理工大学材料与化工学院,长春,130022 |
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| 基金项目： | 兵器工业集团公司项目(GDZX2003) |
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| 摘 要： | 本文针对ZnSe多晶的性能,在试验的基础上,研究出一套实用的、行之有效的ZnSe多晶加工工艺,并重点讨论了化学机械抛光工艺.同时对加工后零件的工艺参数、表面质量及透过率的测试,结果表明所采用的化学机械加工法可取得非常好的抛光效果.
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| 关 键 词： | ZnSe多晶 化学机械抛光 工艺技术 性能测试 |
| 文章编号： | 1000-985X（2006）06-1378-05 |
| 收稿时间： | 05 25 2006 12:00AM |
| 修稿时间： | 2006-05-25 |
Study on the Chemical Mechanical Polishing of ZnSe Polycrystal |
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| YAO Yan-ping,ZHANG Yu-lan,LI Chang-jiang,LIU Jing-he.Study on the Chemical Mechanical Polishing of ZnSe Polycrystal[J].Journal of Synthetic Crystals,2006,35(6):1378-1382. |
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| Authors: | YAO Yan-ping ZHANG Yu-lan LI Chang-jiang LIU Jing-he |
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| Institution: | 1. College of Information and Technolegy,Jilin Normal University, Siping 136000, China; 2. Optical Machining Center, Changchnn University of Science and Technology, Changchun 130022, China; 3. College of Materials and Chemical Engineering, Changchun University of Science and Technology, Changchnn 130022, China |
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| Abstract: | The paper introduces a set of practical and effective processing technology of ZnSe polycrystal on the basis of a large number of experiments and puts emphasis on chemical mechanical polishing technology.We also test the processing parameter,surface quality and transmittance after we process the ZnSe material.The results show that chemomechanical polishing processing we have applied is efficient and practical. |
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| Keywords: | zinc selenium polycrystal chemical mechanical polishing process technology performance test |
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