X‐ray photoelectron spectroscopy process optimization for characterization of trace contamination elements for extreme ultraviolet resist outgassing study

X‐ray photoelectron spectroscopy (XPS) is used for elemental identification and quantification in a number of fields, and the optimization of XPS performance can help in making better use of the limited XPS tool availability. In the field of extreme ultraviolet (EUV) lithography, one of the requirements is having a clean vacuum environment to minimize contamination of the EUV optics. EUV resist outgassing is viewed as one of the main issues that could affect the vacuum environment. There is a program underway to measure the relative contamination rates from different resists following the ASML (provider of lithography systems) approved protocols for witness plate testing. One of the key steps is the XPS measurement of residue on the optics after cleaning. The role of XPS in quantification of species that adhere to the ruthenium‐coated silicon witness plate sample is discussed. The various XPS tool parameters like the pass energy and source setting were optimized for our application of witness plate analysis. The statistics of our XPS tool were studied, and combined with the fundamental XPS equations, a simple mathematical model was developed to optimize the number of scans for the various elements of interest in our witness plate study. Using the optimized number of scans, the acquisition time to measure the contaminant elements to a precision better than 0.1 at.% was minimized. The model devised in the paper can be adapted to other XPS measurements requiring different levels of precision. Copyright © 2013 John Wiley & Sons, Ltd.     

Resilient and agile engineering solutions to address societal challenges such as coronavirus pandemic

The world is witnessing tumultuous times as major economic powers including the US, UK, Russia, India, and most of Europe continue to be in a state of lockdown. The worst-hit sectors due to this lockdown are sales, production (manufacturing), transport (aerospace and automotive) and tourism. Lockdowns became necessary as a preventive measure to avoid the spread of the contagious and infectious “Coronavirus Disease 2019” (COVID-19). This newly identified disease is caused by a new strain of the virus being referred to as Severe Acute Respiratory Syndrome CoronaVirus 2 (SARS CoV-2; formerly called 2019-nCoV). We review the current medical and manufacturing response to COVID-19, including advances in instrumentation, sensing, use of lasers, fumigation chambers and development of novel tools such as lab-on-the-chip using combinatorial additive and subtractive manufacturing techniques and use of molecular modelling and molecular docking in drug and vaccine discovery. We also offer perspectives on future considerations on climate change, outsourced versus indigenous manufacturing, automation, and antimicrobial resistance. Overall, this paper attempts to identify key areas where manufacturing can be employed to address societal challenges such as COVID-19.     

Shell model lattice dynamics of transition metal oxides

The lattice dynamics of transition metal oxides has been investigated in detail with threebody force shell model which is a successful extension of the shell model and includes the effect of electron shell displacements as well as deformations. The phonon dispersion relations along three principal symmetry directions obtained from this model have been compared with neutron data and found to give better agreement as compared to other models. The complete phonon spectra have also been computed and used to derive the temperature dependence of Debye temperature, and the second-order Raman and infrared spectra. The derived data agree fairly well with the observed ones wherever available.     

Rapid and efficient removal of Hg(II) from aqueous solution by potassium hexa-titanate: A radiotracer study

The adsorption of mercury(II) on potassium titanate has been studied in chloride media at different pH values, adsorbate concentrations and temperatures. Effect of different ligands and acid concentrations on the uptake was also investigated. Desoprtion studies were also done to check the reversibility of the process. Interestingly a more or less constant and high value of adsorption has been found at different temperatures, pH values and concentrations and a decrease in the uptake with an increase in the bulk acid concentration was observed.     

Ultrasonic measurements on the solutions of lanthanum and cerium soaps in non-aqueous medium

The ultrasonic velocity and density measurements of lanthanum and cerium soaps in a mixture of 60 % benzene and 40 % methanol (v/v) were used to evaluate various acoustic and thermodynamic parameters and to determine the CMC. The results were interpreted in terms of soap-solvent interaction.     

Lattice dynamics of zinc and cadmium

Present work studies the phonon dispersion in Zn and Cd on the basis of a model which considers short range pairwise forces effective upto sixth nearest neighbours and long range forces on the lines of Krebs' work with the assumption that the first derivatives of the paired potential occurring in the zz elements are different from those in the xx elements, equivalent to the work of de Wames et al. We consider complete equilibrium of the ionic lattice in a medium of uniform electron gas similar to our previous work (J. Phys. Chem. Solids36, 975 (1975)) but now we obtain the two equilibrium conditions in a modified form. Further our earlier scheme is not applicable in the study of the lattice dynamics of Zn and Cd and the present scheme at one hand removes this difficulty and on the other it explains the phonon dispersion along [0001], [0110] and [1120] symmetry directions with sufficiently good agreements with the experimental data.     

Synthesis and stereochemical assignment of 7-arylidene and 7-heteroarylidene morphinan-6-ones

A number of (E)-7-arylidenenaltrexones were synthesized by azeotropic distillation of water from a benzene solution of naltrexone and an aromatic aldehyde (benzaldehyde, 4-chloro- and 4-fluorobenzaldehyde, 3-and 4-pyridinecarboxaldehyde and 1-methyl-2-imidazolecarboxaldehyde) using piperidine as a catalyst. In addition, (E)-7-benzylidenenaloxone was prepared by the previously published Claisen-Schmidt condensation using sodium hydroxide in methanol. The stereochemistry of these arylidene derivatives 3–9 was determined to be (E) by means of nuclear Overhauser enhancement experiments. The ¹³C nmr spectra of (E)- 3–9 are recorded in deuteriochloroform and those of the hydrochlorides in deuteriodimethyl sulfoxide.     

Dynamics of hyperthermal collisions of O(3P) with CO

The dynamics of O(3P) + CO collisions at a hyperthermal collision energy near 80 kcal mol-1 have been studied with a crossed molecular beams experiment and with quasi-classical trajectory calculations on computed potential energy surfaces. In the experiment, a rotatable mass spectrometer detector was used to monitor inelastically and reactively scattered products as a function of velocity and scattering angle. From these data, center-of-mass (c.m.) translational energy and angular distributions were derived for the inelastic and reactive channels. Isotopically labeled C18O was used to distinguish the reactive channel (16O + C18O 16OC + 18O) from the inelastic channel (16O + C18O 16O + C18O). The reactive 16OC molecules scattered predominantly in the forward direction, i.e., in the same direction as the velocity vector of the reagent O atoms in the c.m. frame. The c.m. translational energy distribution of the reactively scattered 16OC and 18O was very broad, indicating that 16OC is formed with a wide range of internal energies, with an average internal excitation of approximately 40% of the available energy. The c.m. translational energy distribution of the inelastically scattered C18O and 16O products indicated that an average of 15% of the collision energy went into internal excitation of C18O, although a small fraction of the collisions transferred nearly all the collision energy into internal excitation of C18O. The theoretical calculations, which extend previously published results on this system, predict c.m. translational energy and angular distributions that are in near quantitative agreement with the experimentally derived distributions. The theoretical calculations, thus validated by the experimental results, have been used to derive internal state distributions of scattered CO products and to probe in detail the interactions that lead to the observed dynamical behavior.     

Electron impact induced fragmentation of some 1,2,4-triazole derivatives

The mass spectra of eight 1,2,4-triazole derivaties have been recorded and found tao reveal extensive hydrogen and skeletal migrations. The structures of the fragments have been confirmed by deuterium labelling and exact mass measurement. The compounds revealed striking differences in their spectra depending on the nature of the substituents.