Numerical study on the characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, species such as electrons, N2+, N4+, Ar+, and two metastable states (N 2(A3∑u+), N2 (a1 ∑u-)) are taken into account. The model includes the particle continuity equation, the electron energy balance equation, and Poisson抯equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decreases.     

大气压射频氧气放电特性的数值模拟研究

基于漂移扩散近似,对大气压下氧气射频放电产生的等离子体建立了一维流体模型,包括了电子、正离子和负离子的连续性方程、电子能量方程及泊松方程。采用有限差分法对所建立的模型进行了自洽的数值模拟,得到了相应的数值结果。通过对所得数值结果的分析,研究了大气压下氧气放电的基本特性。研究表明,大气压氧气放电中等离子体密度可达到10¹²cm^-3 ,电子温度约在1.23eV,放电中主要的负离子是O^-离子;随着电压峰值的增加,电子密度、电子温度都增加,但n_O-/n_e 的比率先增加到7.5%又后减小到5%,在电压峰值为700V 时达到最大。     

大气压双频氦气放电等离子体特性的数值研究

用一维流体模型研究了大气压双频氦气放电等离子体的特性。数值模拟的结果表明,在单、双频放电中,随着应用电压的增加,电子密度和放电电流都增加。相对于单频放电,双频放电中低频源的耦合效应使得放电中的电流以及电子密度降低。随着低频源电压峰值的增加,电子密度降低,离子通量,电子损失能量以及电子吸收能量均降低;但电子温度和电势随着低频源电压峰值的增加而增加。在相同低频源电压下,随着高频源电压的增加离子流非线性增加。     

少量氧气对大气压氩氧混合气体放电特性的影响

基于一维流体模型,采用数值模拟的方法研究了大气压氩氧混合气体放电中少量氧气含量对放电特性的影响。根据模型方程进行了数值模拟分析,计算结果表明：随着氧气含量由0.1%增加到0.6%,电子密度减小,O^-离子密度增加,总的负粒子密度增加,鞘层区电子温度增加。随着放电时间的增加,O^-离子密度增加,电子密度的变化分为三个阶段：电子密度快速增长阶段、电子密度下降阶段和电子密度稳定阶段。当氧气含量小于1%时,电子密度随着氧气含量的增加迅速减小,氧原子密度快速增加;氧气含量大于1%小于4%时,电子密度随氧气含量的增加而缓慢减少,氧原子密度缓慢增加直至不变。     

Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N₂⁺, N₄⁺, Ar⁺, and two metastable states (N₂ (A³∑_u⁺), N₂ (a¹∑_u^-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.     

大气压脉冲调制射频氩气放电等离子体特性的数值研究

基于等离子体流体理论,建立了大气压脉冲调制射频氩气放电的一维流体模型。通过数值模拟的方 法研究了放电参数(放电电极间距、射频频率)对氩等离子体特性的影响。研究结果表明：当电压固定时,随着电 极间距的增加,等离子体区逐渐增大,最大电子密度也增加,在 0.20cm 达到最大值后略有降低;放电电流密度 与输入功率密度随着电极间距的增加而增加;鞘层区电子温度随着电极间距的增加而降低;在脉冲开启前期,等 离子体区电子温度随着电极间距的增加而增加,但当脉冲开启后期,电极间距对等离子体区电子温度影响较小。 不同射频频率下最大电子密度随电极间隙的增加而减小,也具有一个最优值。