Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N₂⁺, N₄⁺, Ar⁺, and two metastable states (N₂ (A³∑_u⁺), N₂ (a¹∑_u^-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.     

Measurement of neutral gas temperature in inductively coupled plasmas

Dependence of the neutral gas temperature on the gas pressure and discharge power in an inductively coupled plasma source has been investigated using optical emission spectroscopy. Both nitrogen and argon plasmas have been studied separately. In the case of argon plasma, about 5% nitrogen was added to the total gas flow as an actinometer. The maximum temperature was found to be as high as 1850 K at 1 Torr working pressure and 600 W radiofrequency power. The temperature increases almost linearly with the logarithm of the gas pressure, but changes only slightly with the discharge power in the range of 100–600 W. In a nitrogen plasma, a sudden increase in the neutral gas temperature occurs when the gas pressure is increased at a given discharge power. This suggests a discharge-mode transition from the H-mode (high plasma density) to the E-mode (low plasma density). In the H-mode, the gas temperature is proportional to the logarithm of the gas pressure, as in the argon plasma. However, the gas temperature increases almost linearly with the discharge power, which is in contrast to the case of argon plasma. The electron density in the nitrogen plasma is about 10% of that in the argon plasma. This may explain the observation that the nitrogen neutral temperature is always lower than the argon neutral temperature under the same discharge power and gas pressure.     

氦氩射频容性放电发射光谱分析

光抽运亚稳态稀有气体激光器利用放电等离子体作为激光的增益介质.为掌握容性射频放电的放电参数对等离子体各项参数的影响的基本规律,利用等离子体发射光谱法研究了氦氩混合气体在不同装置、不同Ar组分、不同气压和不同射频注入功率下的等离子体参数.利用残留水蒸气产生的OH自由基A~2Σ~+→X~2Π的转动光谱分析获得气体温度;利用电子态光谱的玻尔兹曼做图法获得电子激发温度,利用Ar原子696.5 nm谱线的斯塔克展宽获得电子密度.结果表明:气体温度随气压增加略微上升,在一个大气压下改变组分和放电功率,气体温度变化不大;电子激发温度随总气压的下降而上升,且随着Ar组分的增加而略微下降;目前放电条件下的电子密度均在10~(15)cm~(-3)量级;长时间放电监测表明,残留的水蒸气会导致电子温度的下降,从而降低Ar亚稳态的产率.     

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

A one-dimensional self-consistent calculation model of capacitively coupled plasma(CCP) discharge and electromagnetic wave propagation is developed to solve the plasma characteristics and electromagnetic wave transmission attenuation.Numerical simulation results show that the peak electron number density of argon is about 12 times higher than that of helium, and that the electron number density increases with the augment of pressure, radio frequency(RF) power, and RF frequency. However, the electron number density first increases and then decreases as the discharge gap increases. The transmission attenuation of electromagnetic wave in argon discharge plasma is 8.5-d B higher than that of helium. At the same time, the transmission attenuation increases with the augment of the RF power and RF frequency, but it does not increase or decrease monotonically with the increase of gas pressure and discharge gap. The electromagnetic wave absorption frequency band of the argon discharge plasma under the optimal parameters in this paper can reach the Ku band. It is concluded that the argon CCP discharge under the optimal discharge parameters has great potential applications in plasma stealth.     

Numerical Study on Characteristics of Argon Radio-Frequency Glow Discharge with Varying gas Pressure

A one-dimensional fluid simulation on argon rf glow discharge with varying linearly gas pressure from 1 Torr to 100 Tort is performed. The model based on mass conservation equations for electron and ion under diffusion and mobility approximation, and the electron energy conservation equation is solved numerically by finite volume method. The numerical results show that a uniform plasma with high density can be obtained from rf glow discharge with varying gas pressure, and the density of plasma becomes higher as the gas pressure varies from 1 Tort to 100 Tort. It is also shown that in the range of the gas pressure from 1 Tort to 100 Tort with the slower rate of varying gas pressure, higher density of plasma can be obtained.     

大气压脉冲调制射频氩气放电等离子体特性的数值研究

基于等离子体流体理论,建立了大气压脉冲调制射频氩气放电的一维流体模型。通过数值模拟的方 法研究了放电参数(放电电极间距、射频频率)对氩等离子体特性的影响。研究结果表明：当电压固定时,随着电 极间距的增加,等离子体区逐渐增大,最大电子密度也增加,在 0.20cm 达到最大值后略有降低;放电电流密度 与输入功率密度随着电极间距的增加而增加;鞘层区电子温度随着电极间距的增加而降低;在脉冲开启前期,等 离子体区电子温度随着电极间距的增加而增加,但当脉冲开启后期,电极间距对等离子体区电子温度影响较小。 不同射频频率下最大电子密度随电极间隙的增加而减小,也具有一个最优值。      

射频容性耦合等离子体放电特性的光谱诊断

利用流体模型模拟和发射光谱实验诊断相结合的方法,研究了中等气压、中等功率下射频容性耦合等离子体的放电特性。理论上,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar气为工作气体,研究了不同气压以及不同射频输入功率下等离子体电子温度和电子密度的分布规律。实验上,依据仿真模型设计制作了相同尺寸的密闭玻璃腔体和平板电极,采用13.56 MHz射频放电技术电离腔体内的工作气体Ar气,测量了不同气压、不同射频输入功率时放电等离子体的发射光谱。通过分析和选择适当的Ar Ⅰ和Ar Ⅱ的特征谱线,分别利用玻尔兹曼斜率法以及沙哈-玻尔兹曼方程计算了等离子体的电子温度与电子密度,并结合模拟仿真结果对光谱诊断结果进行了修正。结果表明：当气体压强为300~400 Pa、输入功率为600~800 W时,等离子体近似服从玻尔兹曼分布,此时利用光谱法得到的等离子体参数与仿真结果相符合。仿真模拟与光谱实验诊断相结合的方法可初步诊断出中等气压下等离子体的放电参数,增加了玻尔兹曼斜率法和沙哈-玻尔兹曼方程在等离子体放电中的使用范围,扩大了光谱法在低电子密度容性耦合等离子体参数诊断的应用场合,为中等气压容性耦合等离子体在工业与军事上的应用研究提供了重要物理状态的分析手段。     

Impacts of air pressure on the evolution of nanosecond pulse discharge products

Based on the nonequilibrium plasma dynamics of air discharge, a dynamic model of zero-dimensional plasma is established by combining the component density equation, the Boltzmann equation, and the energy transfer equation. The evolution properties of nanosecond pulse discharge (NPD) plasma under different air pressures are calculated. The results show that the air pressure has significant impacts on the NPD products and the peak values of particle number density for particles such as O atoms, O3 molecules, N2(A3) molecules in excited states, and NO molecules. It increases at first and then decreases with the increase of air pressure. On the other hand, the peak values of particle number density for N2(B3) and N2(C3) molecules in excited states are only slightly affected by the air pressure.     

Optical emission spectroscopy of 50 Hz pulsed dc nitrogen–hydrogen plasma in the presence of active screen cage

The N₂-H₂ plasma gas mixture, generated in a 50?Hz pulsed dc discharge system with active screen cage, is characterized by optical emission spectroscopy (OES), as a function of gas pressure, the fractions of hydrogen and current density. The N₂ dissociation degree and N atomic density was measured with actinometery where argon gas is used as actinometer. It was shown that the increase in hydrogen fraction enhances the dissociation of N₂, until the maximum of 40%. The excitation temperature is determined from Ar-I emission line intensities by using the simple Boltzmann plot method. The dissociation fraction and excitation temperature is found to increase with hydrogen mixing in nitrogen plasma.     

Non-self-sustained discharge in nitrogen with a condensed dispersed phase

A non-self-sustained discharge in nitrogen with a condensed dispersed phase is studied experimentally for the first time under atmospheric pressure at room temperature. It is shown that macroparticles strongly affect the current-voltage characteristics as well as the stability of the discharge process. A numerical simulation of dust particle charging in nitrogen is carried out at room temperature and cryogenic temperatures under continuous medium conditions. It is shown that a considerable charge is accumulated at macroparticles in the nitrogen beam plasma. As the gas temperature decreases, the charge of macroparticles in nitrogen increases, while in argon their charge decreases. For this reason, the Coulomb interaction parameter for dust particles in nitrogen increases strongly upon a transition from room to cryogenic temperature, while in argon this parameter decreases. It is also shown that the characteristic time of dust particle charging is shorter than 1 μs for a beam current density of 90 μA/cm², while the neutralization of the charge takes milliseconds. Possible mechanisms of the influence of the dust component on the characteristics of non-self-sustained discharge are considered.     

六边形晕斑图等离子体参数的光谱测量

在空气与氩气按比例混合组成的气体放电中,研究了由中心点和六边形晕组成的六边形晕斑图。从照片中观察六边形晕斑图结构,发现中心点和六边形晕的亮度有明显的差异,说明中心点和六边形晕可能处的等离子体状态不同。利用发射光谱法,详细研究了该六边形晕斑图结构的中心点和六边形晕的等离子体参数随压强的变化关系。实验根据氮分子第二正带系(C3Π_u→B3Π_g)谱线计算了中心点和六边形晕的分子振动温度;通过氮分子离子(391.4 nm) 与氮分子(394.1nm)谱线强度比,反映中心点和六边形晕的电子平均能量;利用氩原子696.5 nm(2P₂→1S₅)谱线的展宽,研究了电子密度。实验结果表明： 六边形晕斑图主要范围是氩气含量从60%～75%、压强从30～46 kPa。在相同的压强条件下,六边形晕比中心点的分子振动温度、电子平均能量均要高。随着压强从30 kPa逐渐升高到46 kPa,中心点和六边形晕的分子振动温度、电子平均能量是逐渐增大的。在相同的压强条件下,六边形晕比中心点的谱线展宽要大,且随着压强的升高而增加,表明电子密度随着压强的增大而升高。六边形晕和中心点的等离子体的状态不同,说明二者放电机制上的差异。进一步采用高速照相机对斑图的电流脉冲进行分脉冲瞬时拍摄,发现中心点是由先放电的体放电形成,而六边形晕是由放电晚于体放电的沿面放电形成。     

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设计建立了同轴圆柱介质阻挡放电线状射流装置,并利用其实现了宽度为50mm的大尺度线状射流,并对射流长度随放电参数的变化进行了研究.研究发现,随气压、流量的增加,射流长度呈先增加后达到饱和;随激励电压的增加,射流长度增加.对氮气射流等离子体进行发射光谱诊断,表明氮气等离子体中主要是氮分子和少量氮原子,并利用光谱拟合得出射流的温度范围为290～350K.     

Längsfeldstärke,Elektronentemperatur, mittlere Neutralgasdichte,Ionenstromdichte auf die Wand und mittlere Entladungsstromdichte in der Freifallsäule bei hohem Ionisationsgrad

On the basis of a foregoing paper new theoretical results for the positive column at low pressure and strong ionization, especially for discharges in noble gas ion lasers, are given. The mean velocity v_n0 of the neutral atoms reemitted from the wall is taken into account. The electric conductivity is calculated for an argon plasma. The formulas connecting the electron temperature, the mean neutral gas density, and the electric field strength are derived. The electron temperature, the axial electric field intensity, the degree of ionization, the axial electron drift velocity, the ion flux to the wall, and the force density causing the main part of gas pumping along the column are calculated as functions of the product of the mean current density and the tube radius, and of v_n0 for argon. The axial drift velocity of the electrons is still smaller than the mean thermal electron velocity for high discharge currents, except at very low gas pressures. In general, the ion flux to the wall is not directly proportional to the discharge current. The factor for the determination of the charged particle density by means of probe measurements at the wall is discussed. The self-magnetic field affects the discharge only at high electron temperature, high degree of ionization, and relatively large tube radius, i.e. at high current density and low gas pressure in not too narrow discharge channels.     

基于连续谱的氩气纳秒脉冲放电中电子温度的研究

采用了一种针对针的放电结构,将其放置在一个高纯氩气的密闭腔室中,通过施加正极性的过电压产生可重复的大气压纳秒脉冲放电,并提出建立大气压放电的连续辐射模型来诊断氩气纳秒脉冲放电中的电子温度。实验利用电压和电流探头分别获取放电过程中的电压和电流波形图,其放电脉宽约为20 ns。通过消色差透镜、单色仪和ICCD等光学系统的组合来测量放电正柱区在不同时刻（0<t<20 ns）的时间分辨发射光谱。结果表明,放电中连续谱的强度随时间先增加（0<t<10 ns）后减小（10 ns<t<20 ns）,但是氩原子的谱线强度则随时间的增加而一直增大。研究表明连续谱强度与电子密度成正相关,因而电子密度随着时间也是先增加而后减小,这与放电电流的变化规律是完全一致的。根据连续谱模型拟合得到放电过程中（0<t<10 ns）的电子温度为(1.4±0.2) eV。随着驱动电压的下降（10 ns<t<20 ns）,电子温度逐步减小至0.9 eV。在0<t<10 ns中,激发态氩原子主要是由电子碰撞激发产生的,因而谱线强度随着电子密度的增加而增大。然后,随着电子温度的减小,Ar+₂复合反应速率激增,导致电子与离子的复合过程主导产生激发态氩原子,即谱线强度继续增大。通过加入0.5%的水蒸气以获取OH的振转光谱。实验发现,OH(A)的产生机制使其偏离玻尔兹曼平衡分布,本文采用了双温的OH(A-X)光谱模型来考察气体温度。在放电过程中,气体温度保持不变,大约为400 K。此外,水蒸气的加入使得短波长的连续谱发生显著增强。光谱分析认为H₂O在放电中能够解离产生H₂,继而与氩原子的亚稳态发生能量转移生成激发态H₂(a3Σ+_g)。H₂(a3Σ+_g)将会自发辐射跃迁到排除态H₂(b3Σ+_u),同时发射短波长的连续谱。由于短波长的连续谱对电子温度（T_e>1 eV）的响应较为灵敏,所以载气中少量的水蒸气将会对连续谱诊断电子温度带来较大的影响。     

容性耦合射频氩等离子体放电诊断研究及仿真模拟

针对中等气压、中等功率下射频容性耦合(CCRF)等离子体的放电特性,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar为工作气体,研究同一气压时不同射频输入功率下等离子体电子温度和电子密度的分布规律。同时依据仿真模型设计制作相同尺寸的密闭玻璃腔体和平板电极,实验测量了不同射频输入功率时放电等离子体的有效电流电压及发射光谱,进而计算等离子体的电子温度及电子密度;利用玻耳兹曼双线测温法,得到光谱法下等离子体的电子温度及电子密度。结果表明:当气体压强为250 Pa、输入功率为100~450 W时,等离子体电压电流呈线性关系,电子密度随功率的增大而增大,而电子温度并未随功率的变化而有明显变化,其与功率无关。运用仿真模拟验证了实验的准确性,通过比较,三种方法所得的结果相近。通过结合等效回路法、光谱法和数值模拟仿真法初步诊断出中等气压下等离子体的放电参数,提出了结合三种方法作为实验研究的方法,使实验结果更具说服力,证明其方法的可靠性,也为进一步的等离子体特性研究提供依据。     

Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model

A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established.Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr(1 Torr = 1.33322×10~2 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase;the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases.     

13.56 MHz/2 MHz柱状感性耦合等离子体参数的对比研究

通过Langmuir双探针和发射光谱诊断方法,对比研究了驱动频率为13.56 MHz和2 MHz柱状感性耦合等离子体中电子密度和电子温度的径向分布规律.结果表明:在高频和低频放电中,输入功率的增加对等离子体参数产生了不同的影响,高频放电中主要提升了电子密度,低频放电中则主要提升了电子温度.固定气压为10 Pa,分别由高频和低频驱动时,电子密度的径向分布均为"凸型".而电子温度的分布差异比较明显,高频驱动时,电子温度在腔室中心较为平坦,在边缘略有上升;低频驱动时,电子温度随径向距离的增加而逐渐下降.为了进一步分析造成这种差异的原因,在相同放电条件下采集了氩等离子体的发射光谱图,利用分支比法计算了亚稳态粒子的数密度,发现电子温度的径向分布始终与亚稳态粒子的径向分布相反.继续升高气压到100 Pa,发现不论高频还是低频放电,电子密度的径向分布均从"凸型"转变为"马鞍形",较低气压时电子密度的均匀性有了一定的提升,但低频的均匀性更好.     

大气压冷等离子体喷枪气体温度的比较研究

采用介质阻挡放电等离子体喷枪装置,在大气压下流动气体(氩气和痕量氮气)中产生了稳定的喷射等离子体.通过拍摄喷枪发光照片,研究了喷射等离子体长度随气体流量的变化关系.利用高分辨率光谱仪采集等离子体羽处的发射光谱,通过对发射光谱中N+2的第一负系(B 2Σ+u→X 2Σ+g,390～391.6 nm)谱线拟合得到了射流等离...     

棒-环电极大气压等离子体射流的光谱特性

通过设计新型的交流电压激励的氩气等离子体射流,在棒电极的上游与下游区域均产生了大气压非平衡态等离子体羽。该射流与平行场射流和交叉场射流不同,它的电场与气流方向的夹角可以在一定范围内变化。结果表明,随着外加电压或夹角的增加,上游羽的长度增加而下游羽的长度减小。利用光学和电学的方法,研究发现随着外加电压的增加,上下游放电脉冲的个数均增加。利用放电的光学发射谱,发现上游羽有Ar和OH的谱线,而下游羽除了Ar和OH的谱线外,还可以观察到N₂的谱线。并且下游羽的谱线强度比上游羽的略高。基于碰撞辐射模型,通过谱线强度比的方法研究了上下游羽的电子密度和电子激发温度。结果表明上下游羽的电子密度随着外加电压的增加而增加。上下游羽的电子激发温度也随着外加电压的增加而增加。并且,在同一外加电压时下游羽的电子密度和电子激发温度均比上游羽的高。此外,利用OH发射光谱研究了上下游羽的气体温度,发现下游羽的气体温度也比上游羽的略高。     

发射光谱研究大气压等离子体射流的气体温度

采用介质阻挡放电等离子体喷枪装置,在大气压下流动氩气中产生了射流等离子体。利用光电倍增管,对射流等离子体进行了时空分辨测量,分析了等离子体喷枪内介质阻挡放电和外部等离子体羽的放电特性。利用高分辨率光谱仪采集等离子体羽处的发射光谱,通过对发射光谱中OH(A2Σ+→X2Π,307.7～308.9nm)及N2+的第一负系(B2Σ+u→X2Π+g,390～391.6nm)谱线拟合得到了射流等离子体的转动温度,拟合得到的转动温度分别为443和450K。在5%的误差范围内,这2种方法得到的结果是一致的。由于在大气压下,转动温度近似等于产生气体放电的气体温度,所以可以确定大气压射流等离子体气体温度。利用该方法研究了不同电压下的气体温度,发现气体温度随着外加电压增加而增大。