Design and Fabrication of Broad Angular Response Supermirror for Hard X-Ray Optics

A broad angular response supermirror is designed by the simplex optimization method and fabricated by de magnetron sputtering. The negative effect of the interracial imperfection, mainly consulting from interface roughness and diffusion, is emerged in the calculation of the precise performance of the supermirror. The refleetvity of such a supermirror is measured by the x-ray diffraction instrument （XRD） at Cu Kα line （λ=0.154nm）. The experimental refleetivity is about 30% in a fixed broad grazing incident angular range （0.55°-0.85°）. The fitting data prove that the thickness of each layer, which is larger than the prospect 0.5 nm, is different from the designed one and the roughness in the supermirror is about 0.85 nm.     

Investigation of ultra-short-period W/C multilayers for soft X-ray optics

The periodic multilayer has many interesting and useful mechanical, electrical, magnetic, and optical properties, which are related to either the coherent effect of mod- ulation or the structure of thin films. The periodic multilayer mirrors are used for enhancing reflectivity in the wavelength range of 0.1—10 nm from grazing to normal incidence. Therefore, the multilayer reflectors have been used successfully in a range of applications, including extreme ultraviolet (EUV) lithography[1], so…     

基于多层膜偏振元件的同步辐射光束线偏振特性测量研究

利用自行研制的同步辐射软X射线多层膜综合偏振测量装置, 对北京同步辐射装置(BSRF)的3W1B软X射线光束线的偏振特性进行了系统的研究. 给出了多层膜偏振元件起偏前后的测量结果, 测量能量为206eV时, 经反射镜、光栅等光束线光学元件后输出的线偏振度(起偏前)为0.585, 经多层膜偏振元件起偏后输出光的 线偏振度达到0.995.     

50～11O nm波段高反射率多层膜的设计与制备

阐述了50～110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成,每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比,这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜,并以此为初始条件通过Levenberg-Marquart优化方法完成了50～110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计,其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试,测试结果表明制作出的多层膜结构与设计结构基本相符.