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21.
利用强度标定的发射光谱法,研究了感应耦合CF44/CH44等离 子体中空间基团的 相对密度随宏观条件(射频输入功率、气压和流量比)的变化情况. 研究表明:在所研究的 碳氟/碳氢混合气体放电等离子体中除了具有丰富的CF,CF22,CH,H和F等活 性基团外 ,还同时存在着C22基团,其相对密度随着放电功率的提高而增加;随着气压 的上升呈 现倒“U”型的变化. C22随流量比R(R=[CH4
关键词:
发射光谱
感应耦合等离子体
2基团')" href="#">C22基团 相似文献
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研究了十甲基环五硅氧烷(D5)的电子回旋共振等离子体沉积的SiCOH薄膜中Si—OH基团对介电性能和漏电流的影响.结果表明Si—OH含量的增大会导致介电常数k的增大、漏电流的降低和介电色散的增强.由于Si—OH结构的强极化补偿了薄膜密度减小带来的介电常数降低,导致总的介电常数k增大.高Si—OH含量下漏电流的降低是由于封端的Si—OH基团降低了薄膜中Si—O网络的连通概率p而导致网络电导下降的缘故.介电色散的增强与Si—OH封端结构的快极化过程有关.改变放电参数以提高电子能量,从而提高源的电离程度,使更多的Si—OH基团断裂并通过缩合反应形成Si—O—Si网络,可以进一步降低薄膜的介电常数.
关键词:
SiCOH薄膜
Si—OH结构
介电性能
ECR放电等离子体 相似文献
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研究了真空热处理对掺CH4的SiCOH低介电常数薄膜的电流-电压(I-V)特性、电容-电压(C-V)特性、疏水性能以及微结构的影响. 结果表明:在热处理过程中,热稳定性较差的碳氢基团发生了热解吸,使薄膜的漏电流减小、绝缘性能改善,并使薄膜的导电行为更趋于空间电荷限流过程. 碳氢基团的热解吸使SiCOH/Si界面的界面态发生改变,导致SiCOH薄膜MIS结构的平带电压VFB发生漂移. 封端的碳氢
关键词:
SiCOH薄膜
热处理
结构与性能 相似文献
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以高纯石墨作靶、氩气(Ar)和三氟甲烷(CHF3)为源气体,用反应磁控溅射法在不同射频功率下制备了氟化类金刚石碳(F-DLC)膜,并对其疏水性进行研究.双蒸水液滴与膜表面接触角的测试结果表明,所制备薄膜表面的最大水接触角可达115°左右.通过原子力显微镜获得的薄膜表面AFM图谱、拉曼光谱以及傅里叶变换红外光谱探讨了影响薄膜的疏水性的因素.结果表明,薄膜的疏水性与薄膜的表面粗糙度和表面键结构直接相关,表面粗糙度越大,疏水性越好,但与薄膜中的F含量和sp3/sp2的比值并未呈单调增加或减小的对应关系.射频输入功率影响着薄膜的沉积速率,与薄膜表面粗糙度、薄膜中芳香环单核的比例以及薄膜表面的键结构(F的接入方式)直接相关.
关键词:
疏水性
反应磁控溅射
氟化类金刚石膜
射频功率 相似文献
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The influence of Exciting Frequency on N2 and N2+ Vibrational Temperature of Nitrogen Capacitively Coupled Plasma 下载免费PDF全文
By using optical emission spectroscopy (OES), N2 and N2^+ vibrational temperatures in capacitively coupled plasma discharges with different exciting frequencies are investigated. The vibrational temperatures are acquired by comparing the measured and calculated spectra of selected transitions with a least-square procedure. It is found that N2 and N2^+ vibrational temperatures almost increase linearly with increasing exciting frequency up to 23 MHz, then increase slowly or even decrease. The pressure corresponding to the maximum point of N2 vibrational temperature decreases with the increasing exciting frequency. These experimental phenomena are attributed to the increasing electron density, whereas the electron temperature decreases with exciting frequency rising. 相似文献
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Structure properties of silicone oil serving as a liquid
substrate exposed to Ar plasma are investigated in this paper. Under
the action of energetic Ar ions, the surface of silicone oil liquid
substrate exhibits a branch-like fractal aggregation structure,
which is related to the structure evolution of silicone oil liquid
from Si--O chain to Si--O network. The radicals from the
dissociation of silicone oil molecule into the Ar plasma turns the
plasma into a reactive environment. Therefore, the structural
evolution of silicone oil liquid substrate and the reactive radicals
in the plasma space become possible factors to affect the
aggregation of nanoparticles and also the structures and the
compositions of nanoparticles. 相似文献
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