铒偏析与沉淀对掺铒硅1.54 μm光发射的影响

用金属蒸气真空弧离子源(MEVVA)制备高浓度掺铒硅发光薄膜, 研究高浓度Er掺杂发光薄膜中Er的偏析与沉淀现象对1.54 μm光发射的影响. RBS分析表明, Er的掺杂浓度可达～10%(原子分数), 即Er原子体浓度为1×1021 cm-3. XRD分析掺铒硅薄膜的物相结构发现, Er在薄膜中的存在形式与离子注入参数有关. Er的偏析、沉淀以及辐照损伤等因素会影响掺铒硅薄膜的1.54 μm光发射.     

碳纳米管阵列拉曼光谱的对比研究

利用热化学气相沉积技术制备碳纳米管阵列,并对不同工艺下获得的一系列定向碳纳米管阵列进行了拉曼光谱的对比研究。研究发现：碳纳米管阵列一阶拉曼光谱的G峰中心和D峰中心都会向低波数方向发生红移。并且阵列中碳管的一致性、准直性越好,红移的波数就越多。除了谱峰以外,D线和G线的积分强度比I_D / I_G也能够反映所研究的碳材料的有序度和完整性。I_D / I_G越低,说明该碳纳米管阵列的石墨化越好,无定形碳杂质越少。     

Dependency of photoluminescence from SiO_2 thin films containing Si_(1-x)Ge_x quantum dots on Ge/Si doping ratio

SiO2 thin films containing Si1-xGex quantum dots （QDs） are prepared by ion implantation and annealing treatment. The photoluminescence （PL） and microstructural properties of thin films are investigated. The samples exhibit strong PL in the wavelength range of 400-470 nm and relatively weak PL peaks at 730 and 780 nm at room temperature. Blue shift is found for the 400-nm PL peak, and the intensity increases initially and then decreases with the increase of Ge-doping dose. We propose that the 400-470 nm PL band originates from multiple luminescence centers, and the 730- and 780-nm PL peaks are ascribed to the Si=O and GeO luminescence centers.     

MEVVA源离子注入合成钕硅化物的研究

用MEVVA离子源将稀土Nd离子注入到硅基片中，可以合成出性能良好的钕硅化合物。用电子显微镜和X射线衍射对样品进行了观测，随着退火温度的升高，注入层的薄层方块电阻R□显著下降，注入层形成Nd5Si4和NdSi两种硅化钕相，并逐渐向NdSi相转变。     

热化学气相沉积法制备定向碳纳米管薄膜

采用热化学气相沉积法(CVD)，以乙炔为碳源，在单晶硅上制备了定向碳纳米管薄膜。通过扫描电子显微镜(SEM)观察了碳管薄膜及衬底表面形貌。结果表明，以多孔硅为衬底生长的碳纳米管管径均匀且离散分布，定向性良好。生长前氨对催化剂膜的预处理具有刻蚀作用，可显著提高碳管的生长密度，从而获得碳纳米管阵列膜。     

稀土元素掺杂的Hf基栅介质材料研究进展

随着金属氧化物半导体场效应管(MOSFETs)等比缩小到45 nm技术节点,具有高介电常数的栅介质材料(高k材料)取代传统的SiO₂已经成为必然,然而Hf基高k材料在实际应用中仍然存在许多不足,而稀土元素掺杂在提高Hf基栅介质材料的k值、降低缺陷密度、调整MOSFETs器件的阈值电压等方面表现出明显的优势.本文综述了Hf基高k材料的发展历程,面临的挑战,稀土掺杂对Hf基高k材料性能的调节以及未来研究的趋势. 关键词： k栅介质')" href="#">Hf基高k栅介质 稀土掺杂 氧空位缺陷 有效功函数     

INFRARED EMISSION FROM Si IMPLANTED WITH HIGH Er CONCENTRATION

Erbium-doped silicon has been fabricated by ion implantation performed on a metal vapour vacuum arc ion source. After rapid thermal annealing (RTA), 1.54μm photoluminescence was observed at 77K. Rutherford backscattering spectrum indicated that Er ions are mainly distributed near the surface of the samples, and Er concentration exceeded 10²¹cm^-3. Needle nanometre crystalline silicon (nc-Si) was formed on the substrate surface. Band edge emission spectrum at 10K verified that the minority carrier lifetime increased upon RTA. The photocarrier mediated processes enabled energy transferring from nc-Si (or c-Si) to the Er³⁺ ions and resulted in light emission of 1.54μm.