用短相干光源测量平行平板玻璃的光学均匀性

为了解决传统干涉绝对测量法不能测量前后表面平行度很好的光学玻璃和晶体均匀性问题,提出了在以短相干光为光源的泰曼-格林干涉仪上,通过调整参考光路的光程,使被测样品的前后表面分别处在零光程差位置,这样从样品两面反射回来的光就不会同时满足和参考光相干涉的条件,从而解决了前后面的反射光干涉混叠问题.用虚光栅移相莫尔条纹法处理采集到的干涉图,得到位相数据,代入绝对测量法的计算公式,得出待测样品的折射率分布.对厚度为13 mm、口径为75 mm的光学平板玻璃进行测量.结果表明,光学均匀性检测准确度可达到2.6×10－6,被测样品折射率偏差的峰谷值为Δnpv=6.06×10－6,均方根值为Δnrms=8.96×10－7.     

High Accuracy Phase Measurement in Phase-Shifting Speckle Interferometry

A method for accurately measuring information about the deformation of a rough surface object using a phase-shifting speckle interferometer with a television camera and a computer is considered. In this case, the intensity change of the speckle by phase-shifting varies randomly in space because of the statistical property of the speckle. Then, at points with small intensity change, the accuracy of the phase measurement is affected significantly by the quantization error of an analog to digital converter for data recording. To improve the accuracy, the statistical property of the interference speckle must be clarified. This is done theoretically and experimentally, and the experimental results show that higher measurement accuracy can be attained by selecting large amplitude points.Presented at 1996 International Workshop on Interferometry (IWI ‘96), August 27–29, Saitama, Japan.     

条纹投影形貌测量的品质评估位相展开

0Introduction Phaseunwrappingisrelatedtomanyresearchdisciplinesincludingopticalmetrology,synthetic apertureradar,acousticimaging,magneticresonanceimaging(MRI)andmicrowaveinterferometry.AnexcellenttextbookbyGhigliaandPritt[1]presentedthefundamentaltheoryan…     

Elastic characterization of anisotropic materials by speckle interferometry

In this paper we present an experimental procedure for the elastic characterization of thin anisotropic plates. The procedure allows the determination of the elastic constants of isotropic materials (metals and ceramics) and orthotropic materials (composite laminae). Moreover, the flexural compliances of completely anisotropic uncoupled materials (most of composite laminates) can also be measured. The tests are carried out by applying a concentrated force to the specimen supported by three spheres. The stress components are evaluated by simply measuring the applied load, while the strain fields are measured by digital phase-shifting speckle interferometry. The experimental procedure is entirely controlled by a virtual instrument developed for this purpose in the National Instruments LabVIEW^® environment, which runs on a personal computer interfaced with a standard black and white CCD camera. By means of the speckle interferometer, the whole field of the out-of-plane displacements is acquired; the curvatures, and hence the strain components, are obtained by two subsequent numerical differentiations. The numerical processing of the experimental data was carried out in the Mathematica? environment. The results obtained on a steel specimen and on a composite laminate are reported.     

Quality Guided Phase Unwrapping for Fringe Projection Profilometry

0Introduction Phaseunwrappingisrelatedtomanyresearchdisciplinesincludingopticalmetrology,synthetic apertureradar,acousticimaging,magneticresonanceimaging(MRI)andmicrowaveinterferometry.AnexcellenttextbookbyGhigliaandPritt[1]presentedthefundamentaltheoryandvariousalgorithms ofphaseunwrapping.Thispaperwillfocusonasocalledquality guidedphaseunwrappingapproach.Inthisapproach,aqualitymapgeneratedbyacertainphasequalityevaluationcriterionisincorporated toguidetheunwrappingprocess.Attheprimitivesta…     

数字散斑剪切干涉及偏转平台法相移系统研究

在传统的剪切电子散斑干涉中 ,直接观测到的是干涉条纹图样。因此 ,如何将位移导数场的定量信息从剪切电子散斑干涉条纹图案中提取出来 ,一直是人们关心的问题。本文运用传播光矢量对数字散斑剪切干涉的条纹形成作了理论解释 ,使其物理意义更加清晰。理论分析表明 ,物体的微小偏转可引入线性附加位相。因此 ,通过连续偏转物体可实现剪切电子散斑干涉的相移。本研究通过计算机控制载物平台的精细旋转实现相移 ,结合传统的数字散斑剪切干涉技术以及四步相移算法 ,实现了数字剪切散斑干涉相移系统。利用该系统进行了中心加载、周边固定的圆盘的典型实验 ,实验结果表明该系统可以方便有效地提取出位移导数场的定量信息。     

利用光学干涉条纹图相位分析测量纳米位移

Optical methods such as Twyman-Green interferometry, moiré interferometry, holographic interferometry and speckle interferometry are useful to measure displacement and strain in the full-field of structures. Recently phase analysis method of fringe patterns obtained by these optical methods becomes popular, and it provides accurate quantitative results in the full-field. In this paper, in order to measure displacement and strain, real-time or high-speed nano-meter displacement measurement methods developed by the authors are introduced. That is, (1) out-of-plane displacement analysis by Twyman-Green interferometry using integrated phase-shifting method using Fourier transform phase-shifting method, (2) simultaneous two-dimensional in-plane displacement analysis by moiré interferometry and (3) out-of-plane displacement analysis by phase-shifting digital holographic interferometry. The theories and applications are shown.     

Real-time analysis of isochromatics and isoclinics using the phase-shifting method

This paper studies a new real-time phase-shifting method for the analysis of isochromatic and isoclinic parameters in photoelasticity. By rotating an analyzer at a constant rate and an output quarter-wave plate at a double rate of the analyzer and recording images by a CCD camera continuously, sequential images which brightness is integrated by sensors in a CCD camera during phase-shifting are obtained. Then, the distributions of the isochromatic and isoclinic parameters are obtained immediately and quantitatively using the proposed phase-shifting algorithm. The proposed method can be applied to high-speed inspection of optical elements or glass products. Also, it is expected that slowly varying time-dependent problems can be analyzed by the proposed method.     

Wavelength-Tunable Laser-Diode Interferometer

Laser diodes (LDs) have been applied to a phase-measuring interferometer through the wavelength tunability of LDs by controlling their currents. Laser-diode interferometers based on a heterodyne technique are reviewed. A two-wavelength laser-diode interferometer is demonstrated with current control of dual LDs in opposite directions. A synthetic wavelength makes it possible to extend the range of interferometric measurements. The wavelength is controlled by the laser injection current and is stepwise or rampwise changed to introduce a time-varying phase difference between the two beams of an interferometer with unbalanced optical path lengths. The optical output is demodulated with a phase-extraction algorithm. Systematic phase errors caused by the LD-power variation and by the difference between the beat frequency and ramp frequency are analyzed. A feedback interferometer with electronics is used to eliminate the phase error by locking the interferometer on a preset phase. Typical experimental results are shown.     

相移相位测量的全息再现算法及测量误差分析

用全息原理和方法研究相移相位测量,得到了N步整周期相移再现物光波复振幅同步叠加函数(N步相移函数),同时提出一种新的相移相位测量误差分析和最大误差估计方法。N步相移干涉图是以理想平行光为参考光的无衍射同轴全息图,将其与对应的相移参考光相乘后求和得到N步相移函数;在理想情况下,这是一种复振幅分离、测量和物光波复振幅函数同步叠加方法,存在误差时计算出的相位是最小二乘方法的最佳期望结果。利用N步相移函数得到的N 1步相移函数,说明非理想N步相移函数是理想N步相移函数与误差函数之和,可以把相位型误差转化为与振幅和强度相对误差同等的误差来对待,降低了相位测量中误差估计的难度,给出了N步相移算法最大误差的估计方法和公式。