磁通门磁强计激励电路的分段解析模型

针对数值仿真方法中存在不易掌握各个元件参数如何影响激励电流的问题,本文在磁芯磁化曲线折线模型的基础上,采用等效电阻替代磁滞效应的方法建立了磁滞回线模型,依此化简激励电路并进行分段解析求解.该方法的计算结果与实际测试相吻合,能为激励电路参数设计提供有效的方法.     

微机构可调谐阵列滤光片的设计与模型分析

提出一种新颖的采用薄膜技术在玻璃基底上构造微机构可调谐二维窄带滤光片阵列的方法对器件进行了膜系设计及光谱响应模拟通过器件的电动力学模型分析,设计出器件的形状与尺寸     

MEMS稀薄气体内部流动模拟中的信息保存法

首先综述了处理低速稀薄气体流动的一些方法: 线化Boltzmann方程方法、Lattice Boltzmann方法(LBM)、加滑移边界的Navier-Stokes方程、以及DSMC方法, 并讨论它们在模拟MEMS中过渡领域低速流动特别是内部流动所遇到的困难, 其中表明了LBM现有方案不适合模拟过渡领域中的MEMS流动问题. 信息保存(IP)法通过保存一个模拟分子所代表的大量分子的平均信息,克服了流速低使得信息噪声比小而引起统计模拟的困难. 本文给出了方法的一些理论证实. MEMS中内部流动的特点, 即流速低和大的长宽比的特点, 引起椭圆性问题, 即出入口边界条件相互影响需要协调的问题. 通过对(长约几千微米的)微槽道流动应用IP方法的算例,演示了采用守恒形式的质量守恒方程和超松弛法可成功地解决这一问题. 借助同样的方法,用IP方法求解了真实长度(1\,000\,$\mu$m)硬盘驱动器读写头在过渡领域的薄膜支撑问题, 压力分布与具有严格气体动理论基础的概括化Reynolds方程完全相符, 而在此之前, DSMC方法只对短的读写头(5\,$\mu$m)与Reynolds方程做了校验. 作者建议将原来用于求解读写头润滑问题的Reynolds方程退化来求解过渡领域中的微槽道流动问题, 从而提供了一个有严格气体动理论品性的检验方法来验证求解MEMS内部流动的各种方法.      

微机械陀螺的发展现状

随着对微电子机械系统(MEMS)的深入研究和取得的进展,属于MEMS研究内容之一的微机械陀螺,在汽车工业需求的推动下,已经成为过去几十年内广泛研究和发展的主题.微机械陀螺与传统机械式陀螺、固体陀螺、光学陀螺等相比,具有成本低、尺寸小、重量轻、可靠性高等优点,其精度正不断得到提高,应用领域也随之不断扩大.本文首先简要介绍了微机械陀螺的定义及特征、性能指标、工作原理、分类以及加工技术,随后对已出现的不同类型微机械陀螺的结构、加工方式、工作原理以及性能进行了综述,最后对微机械陀螺的商业化现状以及发展趋势进行了展望.      

Atomic magnetometer with microfabricated vapor cells based on coherent population trapping

An atomic magnetometer based on coherent population trapping(CPT) resonances in microfabricated vapor cells is demonstrated. Fabricated by the micro-electro-mechanical-system(MEMS) technology, the cells are filled with Rb and Ne at a controlled pressure. An experimental apparatus is built for characterizing properties of microfabricated vapor cells via the CPT effects. The typical CPT linewidth is measured to be about 3 k Hz(1.46 k Hz with approximately zero laser intensity) for the rubidium D1 line at about 90℃. The effects of pressure, temperature and laser intensity on CPT linewidth are studied experimentally. A closed-loop atomic magnetometer is finally finished with a sensitivity of 210.5 p T/Hz1/2 at 1 Hz bandwidth. This work paves the way for developing an integrated chip-scale atomic magnetometer in the future.     

微机电系统与微加速度计

本文简要介绍了具有高新技术特征的微机电系统，以及一种典型的微机电系统器件——微加速度计。     

THERMOELASTIC DAMPING IN A MICRO-BEAM RESONATOR TUNABLE WITH PIEZOELECTRIC LAYERS

In this paper,thermoelastic damping (TED) in a micro-beam resonator with a pair of piezoelectric layers bonded on its upper and lower surfaces is investigated.Equation of motion is derived and the ther...     

ON THE STABILITY OF A FUNCTIONALLY GRADED RECTANGULAR MICRO-PLATE SUBJECTED TO HYDROSTATIC AND NONLINEAR ELECTROSTATIC PRESSURES

This article studies the stability of a functionally graded clamped-clamped micro-plate subjected to hydrostatic and electrostatic pressures. Equilibrium positions of the micro-plate are determined and shown in the state control space. To study the stability of the equilibrium positions, the motion trajectories are given for different initial conditions in the phase plane. Effects of the electrostatic and hydrostatic pressure changes on the deflection and stability of the micro-plate for some sample value of k are studied and values of the applied voltage and hydrostatic pressure leading system to unstable conditions by undergoing a saddle node and homoclinic bifurcations are determined.     

Surface Micromachined Adjustable Micro-Concave Mirror for Bio-Detection Applications

We present a bio-detection system integrated with an adjustable micro-concave mirror. The bio-detection system consists of an adjustable micro-concave mirror, micro flow cytometer chip and optical detection module. The adjustable micro-concave mirror can be fabricated with ease using commercially available MEMS foundry services （such as multiuser MEMS processes, MUMPs） and its curvature can be controlled utilizing thermal or electrical effects. Experimental results show that focal lengths of the micro-concave mirror ranging from 313.5 to 2275.0 #m axe achieved. The adjustable micro-concave mirror can be used to increase the efficiency of optical detection and provide a high signal-to-noise ratio. The developed micro-concave mirror is integrated with a micro flow cytometer for cell counting applications. Successful counting of fluorescent-labeled beads is demonstrated using the developed method.