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41.
PECVDSiON薄膜的工艺控制,性质及其潜在应用 总被引:2,自引:1,他引:1
研究了等离子增强化学气相淀积氮氧化硅薄膜的工艺控制、性质以及薄膜波导在超大规模集成电路光互连中的潜在应用。 相似文献
42.
This study reports on the effect of input power to hexamethyldisiloxane (HMDSO) plasmas. The power dependence of the plasma-phase species and of the surface chemistry (of the deposits) has been investigated. Neutral and positive molecular species were detected within the plasma using mass spectrometry (MS). Secondary ion mass spectrometry (SIMS) was used to probe the molecular structure of the deposits. The elemental composition of the surface was determined by XPS and the deposition rate was monitored using a vibrating quartz crystal microbalance. Neutral and cationic molecules of mass greater than HMDSO were detected in the plasma. Their formation through ion-molecule reactions is proposed. Changes in the relative concentration of plasma-phase species follow those seen in molecular species detected at the deposit surface. Thus, we believe that the molecular structure of the deposits can be related to the species present in the plasma. While traditionally the dominant mechanism in deposit formation is assumed to be free radical combinations, we propose other possibilities involving cations with the aim of putting forward a new perspective on plasma polymerization mechanisms and thereby stimulating discussion. 相似文献
43.
Nak-Jin Seong Young-Hun Jo Myung-Hwa Jung Soon-Gil Yoon 《Journal of magnetism and magnetic materials》2006
Epitaxial Ti0.97Co0.03O2:Sb0.01(TCO:Sb) films were deposited on R-Al2O3 (1 1 0 2) substrates at 500 °C in various deposition pressures by pulsed laser deposition. The solubility of cobalt within the films increases with decreasing deposition pressure at a deposition temperature of 500 °C. The TCO:Sb films deposited at 5×10−6 Torr exhibit a p-type anomalous Hall effect having a hole concentration of 6.1×1022/cm3 at 300 K. On the other hand, films deposited at 4×10−4 Torr exhibits an n-type anomalous Hall effect having an electron concentration of about 1.1×1021/cm3. p- or n-type DMS characteristics depends on the change of the structure of TCO:Sb films and the solubility of Co is possible by controlling the deposition pressure. 相似文献
44.
Tungsten trioxide and titanium dioxide thin films were synthesised by pulsed laser deposition. We used for irradiations of oxide targets an UV KrF* (λ = 248 nm, τFWHM ≅ 20 ns, ν = 2 Hz) excimer laser source, at 2 J/cm2 incident fluence value. The experiments were performed in low oxygen pressure. The (0 0 1) SiO2 substrates were heated during the thin film deposition process at temperature values within the 300-500 °C range. The structure and crystalline status of the obtained oxide thin films were investigated by high resolution transmission electron microscopy. Our analyses show that the films are composed by nanoparticles with average diameters from a few to a few tens of nm. Moreover, the films deposited at substrate temperatures higher than 300 °C are crystalline. The tungsten trioxide films consist of a mixture of triclinic and monoclinic phases, while the titanium dioxide films structure corresponds to the tetragonal anatase phase. The oxide films average transmittance in the visible-infrared spectral range is higher than 80%, which makes them suitable for sensor applications. 相似文献
45.
R. Cristescu G. Dorcioman E. Axente A. Moldovan T. Kocourek M. Albulescu D. Mihaiescu D.B. Chrisey 《Applied Surface Science》2006,252(13):4647-4651
We report the first successful deposition of triacetate-pullulan polysaccharide thin films by matrix assisted pulsed laser evaporation. We used a KrF* excimer laser source (λ = 248 nm, τ ≈ 20 ns) operated at a repetition rate of 10 Hz. We demonstrated by FTIR that our thin films are composed of triacetate-pullulan maintaining its chemical structure and functionality. The dependence on incident laser fluence of the induced surface morphology is analysed. 相似文献
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The kinetics of carbon deposition over a Ni/α-Al2O3 commercial catalyst, has been studied using CH4−H2 gas mixtures in the range of 748–873 K. A Hougen-Watson type model gives good agreement with the experimental rates. 相似文献
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