外加气流对脉冲激光烧蚀制备纳米Si晶粒尺寸分布的影响

提出一种控制脉冲激光烧蚀制备纳米Si晶粒尺寸分布的新方法。在10Pa的Ar环境中,采用脉冲激光烧蚀高阻抗单晶硅靶沉积制备了纳米Si晶薄膜。在羽辉正上方2.0cm,距靶0.3～3.0cm范围内的不同位置引入氩气流,在烧蚀点正下方2.0cm处水平放置单晶Si(111)衬底来收集制备的纳米Si晶粒。利用扫描电子显微镜观察样品表面形貌,并对衬底不同位置上纳米Si晶粒进行统计。结果表明:在不引入气流时,晶粒的尺寸随靶衬间距的增加先增大后减小,晶粒尺寸峰值出现在距靶1.7cm处;引入气流后,晶粒尺寸分布发生变化,在距靶1.7cm引入气流时晶粒尺寸峰值最大,在距靶3.0cm引入气流时晶粒尺寸峰值最小,且出现晶粒尺寸峰值的位置随着引入气流位置的增加而增大。     

脉冲激光烧蚀制备纳米Si晶粒成核气压阈值及动力学研究

采用脉冲激光烧蚀技术,在室温、低压Ar气条件下通过改变气体压强及靶与衬底间距,对纳米Si晶粒成核的气压阈值进行了研究.根据扫描电子显微镜图像、拉曼散射谱和X射线衍射谱对制备样品的表征结果,确定了在室温、激光能量密度为4 J/cm²、靶与衬底间距为3 cm条件下形成纳米Si晶粒的阈值气压为0.6 Pa.结合流体力学模型和成核分区模型,对纳米晶粒的成核动力学过程进行了分析.通过Monte Carlo数值模拟,表明在气相成核过程中,烧蚀Si原子的温度和过饱和密度共同影响着纳米晶粒的成核. 关键词： 脉冲激光烧蚀 成核 气压阈值 Monte Carlo数值模拟     

飞秒激光多脉冲烧蚀镍钛合金的数值模拟

为了研究飞秒激光多脉冲累积效应对镍钛合金材料的影响,通过考虑多脉冲之间的时间间隔改写激光光源项,利用改进的双温模型,采用有限差分法,对飞秒激光三脉冲烧蚀镍钛合金的温度场分布进行数值模拟,得到了电子和晶格温度随时间和烧蚀深度的演化规律.分析了多脉冲累积效应的内在机理;讨论了三脉冲条件下不同参量对电子和晶格温度的影响.结果表明:镍钛合金在飞秒激光三脉冲的作用下,电子有3个递增的峰值温度,相比单脉冲的作用,三脉冲使电子和晶格温度明显升高;多脉冲的时间间隔直接影响多脉冲的累积效应;脉冲宽度影响电子的峰值温度和达到峰值温度所用的时间;激光能量密度影响电子和晶格的温度;电声耦合常量对电子与晶格的耦合时间和电子晶格的平衡温度也有重要影响.     

亚皮秒脉冲激光辐照硅薄膜热效应的模拟研究

基于Boltzmann方程,采用了Chen J K等人建立的自相关模型,考虑了Si薄膜的热容、热导率、弛豫时间等热力学参量随温度非线性变化的影响.采用有限差分法,数值求解了脉宽为500 fs的激光脉冲辐照2 μm厚硅膜的自相关模型.分析了膜表面载流子浓度、载流子温度、晶格温度等随入射激光功率和脉宽等的变化规律.结果表明：在脉冲辐照初期（t<0.68 ps）,载流子和晶格之间存在着明显的非热平衡性,之后通过相互之间的弛豫碰撞,逐渐达到热平衡,载流子热容是引起载流子温度在早期迅速上升的原因;载流子温度速率方程中单光子吸收、载流子-晶格能量交换和载流子能流变化率对载流子温升影响较大,而多光子吸收、双极能流和带隙能量变化率对载流子温升的影响较小,可以忽略;较高脉冲激光能量（Ф＞0.02 J·cm－2）辐照Si膜,会引起载流子密度方程中的俄歇复合项增大,从而使载流子密度下降率增大,导致载流子温度出现双峰.     

纳秒脉冲激光沉积薄膜过程中的烧蚀特性研究

研究了高能短脉冲激光薄膜制备的整个烧蚀过程.首先建立了基于超热理论的烧蚀模型，然 后利用较为符合实际的高斯分布表示脉冲激光输入能量密度，给出了考虑蒸发效应不同阶段 的烧蚀状态方程.结合适当的边界条件，以Si靶材为例，利用有限差分法得到了靶材在各个 阶段温度随时间和烧蚀深度的演化分布规律及表面蒸发速度与烧蚀深度在不同激光辐照强度 下随时间的演化规律.结果表明，在脉冲激光辐照阶段，靶材表面的蒸发效应使得靶材表面 温度上升显著放缓；在激光辐照强度接近相爆炸能量阈值时，蒸发速度与蒸发厚度的变化由 于逆流现象将显著放缓.还得到了考虑了熔融弛豫时间及蒸发效应的固-液界面随时间的演化 方程，这一结论较先前工作更具有普适性. 关键词： 脉冲激光烧蚀 热流方程 温度演化 有限差分法     

脉冲CO2激光烧蚀锡靶等离子体的数值研究

使用一维辐射流体力学程序MULTI模拟了脉冲CO2激光烧蚀平面锡靶的过程,研究了脉冲宽度、峰值功率密度、靶材初始密度对锡等离子体电子密度、电子温度的时空分布的影响,并结合统计分析得到最有利于产生13.5 nm 极紫外光的激光脉冲宽度。模拟结果表明,脉冲宽度为100~200 ns的长脉冲激光产生的等离子体有利于实现极紫外输出的最佳条件,通过分析等离子体的电子密度、电子温度的分布对这一结论进行了解释。临界电子密度区域有效吸收了脉冲能量,而低密度的羽辉对激光与极紫外辐射的吸收很少。采用长脉冲激光,使得辐射极紫外等离子体持续时间更长,是提高极紫外辐射效率的有效手段。同时模拟还发现,靶材初始密度对等离子体参数的影响不大。     

脉冲CO_2激光烧蚀锡靶等离子体的数值模拟

使用一维辐射流体力学程序MULTI模拟了脉冲CO_2激光烧蚀平面锡靶的过程,研究了脉冲宽度、峰值功率密度、靶材初始密度对锡等离子体电子密度、电子温度的时空分布的影响,并结合统计分析得到最有利于产生13.5nm极紫外光的激光脉冲宽度。模拟结果表明,脉冲宽度为100~200ns的长脉冲激光产生的等离子体有利于实现极紫外输出的最佳条件,通过分析等离子体的电子密度、电子温度的分布对这一结论进行了解释。临界电子密度区域有效吸收了脉冲能量,而低密度的羽辉对激光与极紫外辐射的吸收很少。采用长脉冲激光,使得辐射极紫外等离子体持续时间更长,是提高极紫外辐射效率的有效手段。同时模拟还发现,靶材初始密度对等离子体参数的影响不大。     

脉冲激光烧蚀过程中靶材表面熔融前温度分布与激光功率密度分布的研究

用较为符合实际的高斯分布表示了脉冲激光输出功率密度分布，讨论了脉冲激光功率密度分布函数形状变化对烧蚀过程中靶材表面熔融前温度分布的影响。建立了考虑热源项的热传导方程，并给出了相应的边界条件。以Si为例，用有限差分方法模拟了温度随时间、位置的变化规律，模拟过程中强调了对边界条件的处理，使整体截断误差保持最小。通过改变脉冲激光功率密度分布函数的形状，分析了温度分布的变化。结果表明，相比恒定脉冲功率密度输出，功率密度高斯分布的激光束与靶材作用时高温阶段的温度变化率变大，靶材表面熔融时刻热扩散距离增加；当激光器上升沿变陡时，在有效作用时间内温度上升得更快，对加工区域周围热效应的影响明显减弱，而热扩散距离变小。     

Ar环境气压对脉冲激光烧蚀制备纳米Si晶粒平均尺寸的影响

采用XeCl脉冲准分子激光器，烧蚀高阻抗单晶Si靶，在1—500 Pa的Ar气环境下沉积制备了纳米Si薄膜. x射线衍射谱测量证实，纳米Si晶粒已经形成.利用扫描电子显微镜观测了所形成纳米Si薄膜的表面形貌，结果表明，随着环境气压的增加，所形成的纳米Si晶粒的平均尺寸增大，气压为100 Pa时达到最大值20 nm，而后开始减小. 从晶粒形成动力学角度，对实验结果进行了定性分析. 关键词： 纳米Si晶粒 脉冲激光烧蚀 表面形貌     

超短脉冲激光辐照硅膜的热弹性

 考虑到热电子崩力的影响,在基于玻耳兹曼理论弛豫时间近似的非线性自相关模型基础上,将晶格温度与应变速率相耦合,建立了超短脉冲激光作用下半导体材料的超快热弹性模型。在单轴应变条件下,利用有限差分法模拟了500 fs脉冲激光作用下2 μm厚硅膜内的载流子温度、晶格温度、载流子数密度、热应力和热电子崩力等的变化情况。结果表明：在低能量密度激光条件下,热弹性效应对半导体材料的影响很小;载流子温度达到峰值的时间比激光强度达到峰值的时间早,随后载流子数密度达到峰值,以及激光脉冲作用5 ps以后硅膜趋于总体热平衡;在脉冲辐照早期,非热平衡阶段形成的热电子崩力在超快损伤过程中起主要作用。     

Comparison of temperature field due to laser step input and time exponentially varying pulses

Laser evaporative heating of the solid surface is considered and the effect of temporal variation of laser pulse shape on temperature rise is examined. In the analysis, time exponentially varying and step input pulses are employed and closed-form solutions for temperature rise are presented. Comparison of temporal variation of surface temperature is carried out for various laser pulse parameters of exponential and step input pulses. The pulse energies are kept the same for all pulses used in the comparison. It is found that temperature distributions corresponding to pulses used in the simulations are different and temperature decay in cooling cycle (after ending of the laser pulse) is clearly evident for step input pulses; however, this is not clearly identified for exponential pulses.     

Optimum peak pulse investigation for OTDR instrumentation

This work presents an experimental study of the optimal peak-power pulse for testing telecommunications fibers. Using a Q-switched fiber laser at 1060 nm, we obtained 100-ns pulses at a 10-kHz repetition rate with an average power of 60 mW corresponding to a 60-W peak power. With these pulses, we generated up to fifth-order Stokes within the fiber, with wavelengths on the third window of telecommunications. We demonstrate that the power exceeding the optimum peak power does not increase the penetration length of OTDR systems because of the pump depletion. The shape of the Stokes-shifted pulses attained at the end of the test fiber is similar to the pulse shape from a Q-switched fiber laser, also showing the possibility to produce suitable peak powers and pulse shapes for OTDR applications at different wavelengths.     

Laser pulses designed in time by adaptive hydrodynamic modeling for optimizing ultra-fast laser–metal interactions

Determining optimal temporal pulse shapes is an essential aspect for controlling the nature and the energetic characteristics of the ablation products following laser irradiation of materials on ultra-fast scales. In this respect, adaptive feedback loops based on temporal pulse manipulation have been inserted into a hydrodynamic code. The procedure enables us to reach the theoretical maximal temperature at a certain energy input. Several regimes have been considered with fluences ranging from the ablation threshold (F _th=0.34 J/cm²) up to 10 J/cm², proposing an optimal coupling for laser–solid and laser–plasma interactions in these fluence regimes. We determine shapes of optimal pulses on ultra-short and short scales (up to 42 ps) and forecast optimized interaction scenarios with fundamental control factors difficult to access experimentally. Simulations performed on aluminum reveal that ultra-short pulses are the natural better solution for localizing energy in space and time for F～F _th. For higher fluences, pulses spread over tens of picoseconds and ended by a final peak enable a better impulsive coupling with the nascent plasma, optimizing its maximal temperature.     

超短光脉冲波形对门模单光子探测的影响

采用两种不同的皮秒光脉冲波形进行了门模单光子探测实验.测量了单光子探测效率随探测器和超短脉冲光源之间的同步延迟细微调节时的变化曲线.结果表明：光脉冲波形直接影响光子到达时间与门脉冲时间窗口之间的精确同步和探测效率,使用其中一种脉宽较短的皮秒光脉冲时探测效率比使用另一种脉冲提高了约9%.     

不同波形脉冲激光的时域误差对相干合成的影响

相干合成技术是实现高功率、高亮度光纤激光系统的重要技术途径.然而, 脉冲激光阵列中常常存在时域误差,这将影响脉冲激光的相干合成效果. 建立了脉冲激光存在时域误差时的相干合成理论模型,并在不同波形(方波、三角波、正弦波) 的脉冲激光存在时域误差时,对相干合成光束在远场的脉冲波形、峰值功率、 光强分布和桶中功率(PIB)等特性进行了数值计算和对比分析.计算结果表明: 方波脉冲激光相干合成光束的脉冲波形受时域误差影响严重,光强分布和PIB随着时域误差 的增大发生线性变化;三角波脉冲激光相干合成光束的脉冲波形和峰值功率受时域误差 影响严重,光强分布和PIB在时域误差较大时随着时域误差的增大发生较为剧烈的变化; 正弦波脉冲激光相干合成光束具有较好的输出特性,在两路正弦波脉冲激光相干合成中, 将两脉冲之间的时延控制在脉冲持续时间的10%以内,就能取得良好的合成效果.     

A new type of laser-induced surface damage of GaAs

The damage of surface layers of GaAs induced by a laser pulse with 15 ns and 600 ns duration has been studied by means of channeling. It is found that damage induced by 600 ns pulses is much more pronounced than that by shorter pulses and that 600 ns pulses produce As-rich layers at the surface. Results are discussed on the basis of calculated temperature rise during and after a laser pulse.     

Surface temperature evolution in pulsed laser action of millisecond range

An originally developed multi-wavelength pyrometer (12 wavelengths in the range 1.001-1.573 μm, 50 μs acquisition time for each photodiode, 800 μm spatial resolution, 900-3500 °C brightness temperature range) is used to measure brightness temperature under the pulsed action of Nd:YAG laser (HAAS-HL62P) on stainless steel (INOX 304L) substrates. Specially developed “notch” filters (10⁻⁶ transparency at 1.06 μm wavelength) are applied to avoid the influence of laser radiation on temperature measurements. The true temperature is restored on the basis of method of multi-colour pyrometry. The accuracy of brightness temperature measurements is examined by comparing the temperature evolution for pulses with different durations but with the same value of energy density flux.The influence of the following parameters is studied keeping the remaining ones constant: pulse duration (6-20 ms, rectangular pulse shape), energy per pulse (10-33 J, rectangular pulse shape), pulse shape (three types of triangulars and one rectangular). Finally the evolution of surface temperature for pulses with more complex shapes but with the same pulse duration and energy per pulse is compared.     

The effect of pulse to pulse variation on ultrashort pulsewidth measurements

An alternate interpretation is presented for the exponential shapes of the second harmonic autocorrelation functions obtained from synchronously pumped mode locked dye laser systems. The shape is reinterpreted as being due to a weighted average of pulses of varying widths and smoothly varying pulse shapes in time. Such pulse width measurements in the past have averaged over a large number of pulses. Several pulse shapes and pulse width distributions are examined all leading to exponential shaped autocorrelation functions. This interpretation implies that the currently determined pulsewidths are shorter, possibly many times shorter than the actual average pulsewidths. A method for selectively descriminating the shortest pulses from the train to increase the time resolution of current laser systems is presented.     

基频和三倍频Nd:YAG激光诱导熔石英损伤特性

 采用光电探测器和数字示波器检测散射光脉冲信号,研究了基频和三倍频Nd:YAG激光诱导熔石英损伤过程,给出了泵浦光和探针光的散射光光电信号;比较了基频和三倍频激光作用下熔石英烧蚀斑显微照片,并分析了其损伤机理。结果显示:在ns脉冲激光作用下,熔石英损伤均发生在泵浦激光脉冲峰值附近,且基频光作用下损伤开始时间点比三倍频作用下早;在多脉冲或高能量激光辐照下,检测到了等离子体闪光信号,等离子体闪光发生在时间延迟21 ns附近。基于Keldysh理论计算了基频光和三倍频光作用下,熔石英光致电离速率同激光强度的关系。     

Simulation of laser ablation in aluminum: the effectivity of double pulses

Lasers are becoming a more and more important tool in cutting and shaping materials. Improving precision and effectivity is an ongoing demand in science and industry. One possibility is double pulses. Here, we study laser ablation of aluminum by the two-temperature model. There the laser is modeled as a source in a continuum heat conduction equation for the electrons, whose temperature then is transferred to a molecular dynamics particle model by an electron–phonon coupling term. The melting and ablation effectivity is investigated depending on the relative intensity and the time delay between two Gaussian shaped laser pulses. It turns out that at least for aluminum the optimal pulse shapes are standard Gaussian pulses. For double pulses with delay times up to 200 ps, we find a behavior as observed in experiment: The ablation depth decreases beyond a delay of 10 ps even if one does not account for the weakening at the second pulse due to laser–plasma interaction.