飞秒激光在空气和水中对硅片烧蚀加工的实验研究

采用1 kHz,800 nm,50 fs—24 ps的钛宝石激光脉冲对单晶硅样品在空气和水溶液环境中的烧蚀加工特性进行了研究.实验观察到了超短脉冲激光在空气氛围中烧蚀形成的双层环状结构,分析揭示了加工区域中心和边缘的烧蚀物理机制分别为热熔化和库仑爆炸,并测量了双层环状结构半径随入射激光能量、脉冲数及持续时间等的变化关系,结果表明获取较大深-宽比的加工效果需选择小能量脉冲激光的多次作用.在水溶液环境中,实验发现飞秒激光在样品表面诱导产生了亚微米量级的多孔状结构,而皮秒激光则更容易实现对硅表面的非热性去除.这是由于激光诱导的光机械应力和空泡效应随脉冲宽度变大而增强所致,在实验上确立了区分这两种不同加工状态的临界脉冲宽度. 关键词： 飞秒激光 硅片 激光加工     

线偏振光和圆偏振光下ZrO_2和Al_2O_3陶瓷材料的飞秒激光烧蚀性能

将不同脉冲数的飞秒激光作用于陶瓷材料表面,研究了线偏振和圆偏振激光对氧化锆和氧化铝陶瓷材料烧蚀阈值的影响,利用光学显微镜和扫描电子显微镜分析了烧蚀坑表面形貌,利用激光扫描共聚焦显微镜确定了烧蚀坑深度.结果表明:两种材料在线偏振光下的饱和烧蚀阈值均小于在圆偏振光下的值;当偏振态相同时,氧化锆饱和烧蚀阈值小于氧化铝.随脉冲数增加,线偏振和圆偏振光下氧化锆烧蚀坑表面结构均由无序向有序发展,出现了周期性环形波纹结构和纳米孔洞阵列.与线偏振光相比,圆偏振光对烧蚀坑深度的作用更明显,且烧蚀坑表面形貌对能量密度变化比较敏感,更容易产生周期性结构.     

多脉冲飞秒激光对锗材料的烧蚀效应

 开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J·cm^-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。     

PMP泡沫的飞秒激光烧蚀及切割方法

对密度为90 mg/cm3的PMP泡沫材料的飞秒激光烧蚀结果进行了分析,推导出该材料在脉宽50 fs、波长800 nm、重复频率为1000 Hz的飞秒激光作用下的蚀除阈值为0.91 J/cm2（100个激光脉冲）,获得了烧蚀直径分别随激光功率、脉冲数及聚焦物镜数值孔径的变化规律。相同飞秒激光加工系统下,对比了铜箔上获得的烧蚀形状,确定了PMP泡沫材料本身的多孔洞及其分布不均匀是造成烧蚀区域的形状不规则的重要因素。PMP泡沫在较高能量或是较长时间的飞秒激光作用下,烧蚀区域发生碳化的原因是由热作用引发的。提出了一种基于激光束耦合的飞秒激光切割厚度大于1 mm的薄膜-泡沫材料的方法,并获得了切割厚度大于1.5 mm、切割侧壁与光束光轴夹角小于5、切割面整洁的薄片。     

铜/金刚石复合材料电磁轨道烧蚀特性的实验研究北大核心CSCD

通过对电磁轨道发射初期阶段,铜/金刚石复合材料轨道在预紧力0.4-2.0kN、电流100-300kA下的滑动电烧蚀实验分析发现：由于受到焦耳热及电弧热的双重作用,铜/金刚石复合材料的质量损失、烧蚀深度随电流的增大而呈现增加趋势,随预紧力的增加而呈下降趋势;在主烧蚀区域形成凹凸不平的形貌,由于部分金刚石的脱落形成一定数量的微孔,在强交变温度场作用下产生了热应力裂纹;在烧蚀区域的边缘,主要由于熔融液态金属受强电磁场涡流的作用而形成微凸及飞溅形貌;在滑动电接触区域则表现为电枢微凸体与轨道之间摩擦形成的划痕,其磨损机制为磨粒磨损;在铜/金刚石复合材料主烧蚀区的横截面,由于轨道材料的长高比过大而造成散热速率的不同,形成不同尺度的晶粒组织,表面硬度下降较大。     

多脉冲激光辐照下介质损伤理论研究

针对纳秒脉冲和飞秒脉冲不同的损伤机制,分别建立了两种多脉冲激光损伤模型。脉宽小于10 ps时,损伤是由于等离子体形成造成介质发生烧蚀所致,对此建立了基于电子密度演化方程的介质击穿模型;脉宽大于100 ps时,损伤是由于热沉积造成介质发生熔融所致,对此建立了基于傅里叶热传导方程的介质热损伤模型。通过计算两种模型下激光参数和材料参数对多脉冲损伤的影响,发现由于损伤机理不同,不同参数对单脉冲损伤阈值和多脉冲损伤阈值的影响趋势不完全一致,敏感程度也不同。通过计算得到了与实验结果一致的多脉冲损伤阈值与脉冲数间关系,使定量预估多脉冲损伤阈值和元件使用寿命成为可能。     

铜/金刚石复合材料电磁轨道烧蚀特性的实验研究

通过对电磁轨道发射初期阶段,铜/金刚石复合材料轨道在预紧力0.4~2.0kN、电流100~300kA下的滑动电烧蚀实验分析发现:由于受到焦耳热及电弧热的双重作用,铜/金刚石复合材料的质量损失、烧蚀深度随电流的增大而呈现增加趋势,随预紧力的增加而呈下降趋势;在主烧蚀区域形成凹凸不平的形貌,由于部分金刚石的脱落形成一定数量的微孔,在强交变温度场作用下产生了热应力裂纹;在烧蚀区域的边缘,主要由于熔融液态金属受强电磁场涡流的作用而形成微凸及飞溅形貌;在滑动电接触区域则表现为电枢微凸体与轨道之间摩擦形成的划痕,其磨损机制为磨粒磨损;在铜/金刚石复合材料主烧蚀区的横截面,由于轨道材料的长高比过大而造成散热速率的不同,形成不同尺度的晶粒组织,表面硬度下降较大。     

纳秒激光刻蚀玻璃基质铬薄膜直写微光栅结构

利用波长为351 nm的半导体泵浦全固态脉冲激光器,采用双光束干涉方法,对蒸镀在石英玻璃衬底上的铬薄膜直接刻蚀形成微光栅结构的方法进行了实验研究.通过实验,分析了激光能量和脉冲数与微光栅结构槽形和一级衍射效率之间的关系.利用光学显微镜和原子力显微镜检测分析光栅槽形,测得槽深为253 nm的最佳微光栅结构,并测得其在波长为532 nm的激光的一级衍射效率为6.5%.结果表明：在激光能量为1 150 μJ时,适当增加曝光脉冲数有利于提高制备光栅的槽深和一级衍射效率.     

纳秒激光刻蚀玻璃基质铬薄膜直写微光栅结构

利用波长为351 nm的半导体泵浦全固态脉冲激光器,采用双光束干涉方法,对蒸镀在石英玻璃衬底上的铬薄膜直接刻蚀形成微光栅结构的方法进行了实验研究.通过实验,分析了激光能量和脉冲数与微光栅结构槽形和一级衍射效率之间的关系.利用光学显微镜和原子力显微镜检测分析光栅槽形,测得槽深为253 nm的最佳微光栅结构,并测得其在波长为532 nm的激光的一级衍射效率为6.5%.结果表明:在激光能量为1 150 μJ时,适当增加曝光脉冲数有利于提高制备光栅的槽深和一级衍射效率.     

飞秒激光诱导硬质合金YG6表面累积效应

采用波长800nm的飞秒激光对硬质合金YG6表面进行多脉冲加工,利用光学显微镜测量微凹坑损伤形貌及损伤直径,研究了飞秒激光在不同能量密度和脉冲数下硬质合金YG6的损伤阈值和损伤直径的变化规律及其损伤机制.试验结果表明:硬质合金YG6的多脉冲损伤阈值随着脉冲数增加而降低,呈现明显的累积效应.试验得到了多脉冲飞秒激光加工YG6的损伤阈值、损伤直径与脉冲数及中心能量密度的定量关系,YG6多脉冲损伤阈值主要与脉冲数相关,由单脉冲损伤阈值和累积系数共同决定,试验得到YG6单脉冲损伤阈值为1.14±0.06J/cm2,累积系数为0.84±0.02.损伤直径主要与光束中心能量密度和脉冲数相关,由光束束腰半径,单脉冲损伤阈值和累积系数共同决定.试验采用多组平均功率和脉冲数对YG6进行烧蚀,验证了单脉冲损伤阈值和累积系数的可靠性.     

Numerical modeling and theoretical analysis of femtosecond laser tweezers

Optical trapping (also called optical tweezers) is a widespread technique, with a large number of applications in biology and other fields. Taking femtosecond laser pulses as a sampling of CW light, we theoretically demonstrate the feasibility of femtosecond laser tweezers and present the formulae of the induced forces which femtosecond laser pulses exert on micrometer-sized spheres. We also demonstrate the stability condition for femtosecond laser tweezers. As an example, we present the numerical results for a sphere with a radius of 10 mm.     

Self-assembled volume vortex grating induced by femtosecond laser pulses in glass

We presented a microfabrication process for optical volume vortex grating inside glass by femtosecond laser pulses. The self-trapped filament of femtosecond laser pulses can induce hundreds μm-long region refractive-index changes in glass. We realized the restructured optical vortex beams using a collimated He–Ne laser beam. The maximum first-order diffraction efficiency was about 19.6%. The volume vortex grating structure fabricated in glass is polarization dependent.     

Femtosecond laser-induced damage morphologies of crystalline silicon by sub-threshold pulses

The effect of sub-threshold pulses of circularly polarized Ti:sapphire femtosecond laser system on crystalline (1 0 0) silicon wafer was investigated. Surface damage morphologies were studied by irradiating the test silicon surface with pulses (peak fluence of 0.25 J/cm²) in succession. These pulses were below the single-pulse surface damage threshold. After the few initial pulses, the observed surface damage morphologies were found to be characterized by a minor phase change region and a major surface damage area at the center, corresponding to the well-known laser-induced periodic surface structure (LIPSS). Further increase in the number of pulses resulted in the formation of new surface morphologies with different features such as ablation, modification, and re-deposited materials. These features were reproducible and more distinguishable at higher number of pulses.     

In situ observation of photoinduced refractive-index changes in filaments formed in glasses by femtosecond laser pulses

We investigated the relationship between the formation of filaments and local refractive-index changes induced by femtosecond laser pulses in silica glass. In situ observation revealed that the location of a filament coincided with that of the refractive-index change. Observation also showed that the region of refractive-index change was elongated toward the upstream direction of the laser pulses with increasing exposure time. The region of refractive-index change was several hundred micrometers long, and its diameter was smaller than 2 mum. The refractive-index change was confirmed by two of three different methods to be as large as 0.8 x 10(-2).     

Micromachining soda-lime glass by femtosecond laser pulses

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.     

Generation of femtosecond X-ray pulses via laser–electron beam interaction

The generation of femtosecond X-ray pulses will have important scientific applications by enabling the direct measurement of atomic motion and structural dynamics in condensed matter on the fundamental time scale of a vibrational period. Interaction of femtosecond laser pulses with relativistic electron beams is an effective approach to generating femtosecond pulses of X-rays. In this paper we present recent results from proof-of-principle experiments in which 300 fs pulses are generated from a synchrotron storage ring by using an ultrashort optical pulse to create femtosecond time structure on the stored electron bunch. A previously demonstrated approach for generating femtosecond X-rays via Thomson scattering between terawatt laser pulses and relativistic electrons is reviewed and compared with storage-ring based schemes.     

Fabrication of magneto-optical microstructure by femtosecond laser pulses

We investigate femtosecond laser direct writing (FLDW) in the fabrication of magneto-optical (MO) microstructures. The experimental results show that FDLW can introduce positive refractive index change in the MO materials. With the increase of the writing intensity of femtosecond laser pulses, refractive index change increases, whereas Verdet constant of the damaged area decreases nonlinearly. With suitable writing intensity, we obtain a single-mode waveguide in which Verdet constant is 80% of the bulk MO glass.     

Role of ambient gas in heating of metal samples by femtosecond pulses of laser radiation

In this work we consider an experimentally observed effect of significant increasing of the residual heat in metal targets at their irradiation with femtosecond laser pulses in an ambient gas in respect to the vacuum conditions. Numerical modelling of heating of a platinum target by femtosecond laser pulses in argon under normal conditions has been performed taking into account gas breakdown in the focussing region of the laser beam in front of the target. The applied model is based on a combination of a thermal model describing heating and phase transitions in irradiated samples and a hydrodynamic model to describe motion of the ambient gas perturbed by laser irradiation as a result of multiphoton ionization. The hot ambient gas is shown to heat efficiently the irradiated sample. The hydrodynamic processes in the ambient gas play an important role in heating. This work was financially supported by the Russian Foundation for Basic Research (Project 08-01-00264-a) and the INTAS/SB RAS Program (Project 06-1000013-8949).     

飞秒激光脉冲与金属光阴极相互作用

本文从理论上分析了飞秒激光与光阴极相互作用过程，采用双温模型分析了飞秒激光脉冲辐照下金属薄膜的温度效应。通过建立一个简单的光电效应模型，获得了最佳的金属光阴极厚度，通过该模型可以发现，产生的光电流对在飞秒激光脉冲辐照下的电子温度和晶格温度有着很大的依赖关系。     

Nanoparticles size modifications during femtosecond laser ablation of nickel in vacuum

Nanoparticles were synthesized by irradiating a nickel target with femtosecond laser pulses in high vacuum, and subsequently analyzed. The proof-of-principle experiments aim to modify the size characteristics of the produced nanoparticles. For nickel it is found that: (i) ultraviolet laser pulses lead to a remarkable change in the nanoparticles size distribution with respect to visible laser pulses; (ii) irradiation of the femtosecond pulses induced ablation plume with a second, delayed ultraviolet laser pulse can change the size characteristics of the produced nanoparticles.