| PMP泡沫的飞秒激光烧蚀及切割方法 |
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| 引用本文： | 宋成伟,李国,黄燕华,杜凯,杨亮.PMP泡沫的飞秒激光烧蚀及切割方法[J].强激光与粒子束,2013,25(10):2587-2591. |
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| 作者姓名： | 宋成伟 李国 黄燕华 杜凯 杨亮 |
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| 作者单位： | 1.中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621 900 |
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| 摘 要： | 对密度为90 mg/cm3的PMP泡沫材料的飞秒激光烧蚀结果进行了分析，推导出该材料在脉宽50 fs、波长800 nm、重复频率为1000 Hz的飞秒激光作用下的蚀除阈值为0.91 J/cm2（100个激光脉冲），获得了烧蚀直径分别随激光功率、脉冲数及聚焦物镜数值孔径的变化规律。相同飞秒激光加工系统下，对比了铜箔上获得的烧蚀形状，确定了PMP泡沫材料本身的多孔洞及其分布不均匀是造成烧蚀区域的形状不规则的重要因素。PMP泡沫在较高能量或是较长时间的飞秒激光作用下，烧蚀区域发生碳化的原因是由热作用引发的。提出了一种基于激光束耦合的飞秒激光切割厚度大于1 mm的薄膜-泡沫材料的方法，并获得了切割厚度大于1.5 mm、切割侧壁与光束光轴夹角小于5、切割面整洁的薄片。
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| 关 键 词： | 飞秒激光 PMP泡沫 烧蚀 切割 |
| 收稿时间： | 2012-11-01 |
Femtosecond laser ablation and cutting technology on PMP foam |
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| Affiliation: | 1.Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China |
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| Abstract: | The femtosecond laser ablation results of PMP foam (density of 90 mg/cm3) were analyzed. The laser pulses used for the study were 800 nm in wavelength, 50 fs in pulse duration and the repetition rate was 1000 Hz. The ablation threshold of the foam was 0.91 J/cm2 when it was shot by 100 laser pulses. The impacts of laser power, the pulse number and the numerical aperture of the focusing objective on the crater diameter were obtained. In the same femtosecond laser machining system, comparing with the ablation shape into copper foil, the important factor causing the irregular shape of the ablation region was verified that there were many different sizes and randomly distributed pores inside PMP foam. The carbonation phenomenon was observed on the edge of the ablated areas when the sample was ablated using high laser power or/and more laser pulses. Thermal effect was considered to be the causes of the carbonation. A new method based on coupling laser beam to cut thickness greater than 1 mm film-foam with femtosecond laser was proposed. Using this method, the femtosecond laser cutting thickness was greater than 1.5 mm, the angle between the cutting side wall and the laser beam optical axis might be less than 5, and the cutting surface was clean. |
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