椭偏法测膜厚的直接计算方法

改进了椭偏法测薄膜折射率和膜厚的迭代计算方法，由测量得到的起偏角A和检偏角P直接算出薄膜折射率和膜厚．     

玻璃在线激光测厚误差的透反互补抑制

为了抑制激光在线测厚时入射角波动引起的误差,根据几何光学分析了激光透射式和反射式测厚原理,发现激光在特定入射角附近波动时,两种方式的测厚误差一正一负,具有互补性,在此基础上提出基于透射和反射同时测量的互补式测厚方法,该方法可将误差限定在透射式和反射式测量误差之间,抑制在线测厚误差.对于有机玻璃平板,理论计算表明,当激光入射角在67.013°±4°波动时,相对误差绝对值在1%以内,误差抑制率均值大于90%;当入射角为61.536°时,误差抑制率为100%.利用线结构激光器和两个线阵CCD相机搭建互补式测厚实验系统,测量了标称厚度为1~5mm的有机玻璃平板,与透射式和反射式测厚结果进行对照,除厚度为1mm的玻璃外,互补式测厚误差被限制在透射式和反射式之间,最大误差抑制率达61%.实验结果表明,该互补式方法有效抑制了误差,提高了在线厚度测量准确度,解决了在线测量不可重复性导致的无法通过均值法减小误差的问题.     

高校椭偏测厚实验的计算机辅助教学

分析了高校椭偏测厚实验中存在的问题，成功研制出具有教学特点的多功能智能椭偏测厚仪和编制了一套该实验的CAI课，实验表明：椭偏测厚实验的计算机辅助教学效果良好。     

迈克尔逊干涉仪测透明介质厚度及折射率

提出了使用用迈克尔逊干涉仪,改变光源入射方式及观测方式以获得稳定、清晰等厚干涉现象的方法.探究了在光路中插入的被测透明介质如何对等厚干涉条纹产生影响,并导出了被测介质厚度、折射率及旋转角度与等厚干涉条纹移动量之间的关系.实现对透明介质厚度、折射率进行简练、快速的同时测量.     

基于AVR单片机的高精度光学测厚系统设计

对薄膜测厚系统进行了详尽剖析,从整体上论述了膜厚测量系统,研究了测厚系统中薄膜测厚仪的关键硬件电路,对薄膜测厚仪的软件流程进行了离散设计。以AVR单片机为核心处理器进行了数据采集和处理,设计并生产出了在线式光学薄膜厚度测量与监控系统。通过与实际膜厚进行对比实验,验证了薄膜测厚系统具有高精度、高稳定性和高可靠性,可应用于实际工业生产。     

射线检测管道垢厚方法的研究进展

报告了我国开展射线检测原油管道垢厚的研究进展. 介绍了γ射线透射检测垢厚的基本原理、 模拟实验装置及主要研究成果. 研究表明, 研制透射型测垢仪是可行的. 另外, 还给出了南京大学关于表面型中子测垢仪和γ射线测垢仪的初步预研结果.     

混凝土公路路面的超声测厚

本文讨论了在混凝土公路路面的超声测厚中所遇到的有关问题及解决方法,研制了实验用的换能器及测试电路,通过实验取得比较满意的结果     

椭偏测厚实验的CAI软件设计

分析了椭偏测厚实验存在的困难,采用Authorware等工具软件,成功地设计和编制一套椭偏测厚实验的CAI仿真程序,使用表明,软件界面友好,仿真度高,互动功能强,实验内容丰富,可用于辅助教学。     

利用等厚干涉法测量玻璃弹性模量简

提出了一种基于等厚干涉原理测量玻璃弹性模量的方法。在标准平板玻璃上表面和待测平板玻璃下表面形成空气薄膜劈尖,分别测量待测平板玻璃在自然和受力两种状态下等厚干涉条纹的分布情况,从而得出玻璃弹性模量。该方法有效消除了玻璃平板表面不平整、材料内部不均匀和自身重力等因素对测量结果的影响。干涉条纹的分布信息通过CCD图像采集及计算机处理获得。该方法原理简单,设备常见,测量精度高,适用于实验教学,也可用于科研测量。     

利用等厚干涉法测量玻璃弹性模量

提出了一种基于等厚干涉原理测量玻璃弹性模量的方法。在标准平板玻璃上表面和待测平板玻璃下表面形成空气薄膜劈尖,分别测量待测平板玻璃在自然和受力两种状态下等厚干涉条纹的分布情况,从而得出玻璃弹性模量。该方法有效消除了玻璃平板表面不平整、材料内部不均匀和自身重力等因素对测量结果的影响。干涉条纹的分布信息通过CCD图像采集及计算机处理获得。该方法原理简单,设备常见,测量精度高,适用于实验教学,也可用于科研测量。     

一种可实现薄膜厚度在线测量的方法

介绍了一种测量固体薄膜厚度的光学方法。该方法具有测量速度快、可实现在线测量等特点。为解决薄膜生产过程中厚度在线检测问题,构造了一套软硬件实验系统,利用该系统进行实验的结果表明:在10~100μm厚度范围,测量误差小于10%,满足实际生产需要。     

利用光学方法测量薄膜厚度的研究

介绍了测量固体薄膜厚度的光学方法。分析了这些方法的光学原理,对所使用的光源、测量范围、测量精度、实现的难度以及方法所适用的场合等多种因素进行了比较分析,结果表明:对于厚度在10～100μm范围的固体薄膜而言,激光干涉法是一种简单、易于实现且测量精度较高的方法。     

Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry

The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method,its measurable range is limited due to the low resolution of the current spectrometer embedded in the reflectometer.We present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution,to extend the measurable transparent film thickness. A large measuring range up to 385 m in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple,easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability.     

Real-time measurement of a thickness of a thin coating by means of sheet laser

An ingenious optical method was developed for measuring the thickness of a coating directly and in real time at a measuring frequency of a few tens of Hz. The basic optical arrangement is very simple, and consists of a semiconductor laser, two cylindrical lenses, and a silicon photodiode array or CCD camera. The range of measurable thickness is roughly between λ and 100λ, where λ is a wavelength of the laser light, and its measuring error is a few percent. The previously developed method for measuring the thin film in air, which can be analyzed theoretically, can also be applied for estimating the thickness of a coating on the substratum within an error of 2%.     

A spectroscopic method for determining thickness of quartz wave plate

A spectroscopic method to determine thickness of quartz wave plate is presented. The method is based on chromatic polarization interferometry. With the polarization-resolved transmission spectrum (PRTS)curve, the phase retardation of quartz wave plate can be determined at a wide spectral range from 200 to2000 nm obviously. Through accurate judgment of extreme points of PRTS curve at long-wave band, the physical thickness of quartz wave plates can be obtained exactly. We give a measuring example and the error analysis. It is found that the measuring precision of thickness is mainly determined by the spectral resolution of spectrometer.     

Measurement of acoustic dispersion using both transmitted and reflected pulses

Traditional broadband transmission method for measuring acoustic dispersion requires the measurements of the sound speed in water, the thickness of the specimen, and the phase spectra of two transmitted ultrasound pulses. When the sound speed in the specimen is significantly different from that in water, the overall uncertainty of the dispersion measurement is generally dominated by the uncertainty of the thickness measurement. In this paper, a new water immersion method for measuring dispersion is proposed which eliminates the need for thickness measurement and the associated uncertainty. In addition to recording the two transmitted pulses, the new method requires recording two reflected pulses, one from the front surface and one from the back surface of the specimen. The phase velocity as well as the thickness of the specimen can be determined from the phase spectra of the four pulses. Theoretical analysis and experimental results from three specimens demonstrate the advantages of this new method.     

薄透明体厚度及折射率的测量

介绍了测量薄透明体厚度及折射率的一种方法.     

泄漏波导法精确测量薄膜参数的理论和实验研究

对泄漏波导法测量薄膜折射率和厚度的实验方法做了介绍,基于四层介质结构的理论模型,通过严格的电磁场理论推导出了测量方法依据的本征色散方程,并使用了Newton-Raphson方法求解复传播常数,保证了测量的精确与快捷.以等离子增强化学气相沉积法生长的SiO2薄膜为例,对其折射率和厚度进行了测定.实验证明,本文方法与传统方法相比,不仅具有更高的测量精度,而且数据处理更加快捷,完成一片样品测试,仅花费机时60 ms.     

基于透射谱的GaN薄膜厚度测量

通过对蓝宝石衬底异质外延GaN薄膜光学透射谱的分析，结合晶体薄膜的干涉效应原理并考虑折射率随光子波长变化的影响，从理论上推导出了实用的薄膜厚度计算方法. 实际应用表明，该方法是一种快速准确的GaN薄膜厚度测量方法. 关键词： GaN 透射谱 厚度测量     

Film thickness measurement with white light fringes

A method is described of measuring the thickness of thin films by using white light fringes obtained in a double pass Michelson interferometer. The method is suitable for the determination of thickness ranging from 15 nm to 2500 nm.