纳米孔隙薄膜中孔隙率与折射率关系的研究

用时域有限差分算法(FDTD)构造了纳米孔隙高分子薄膜的网格结构，并模拟了理想单色平面光波在纳米孔隙高分子薄膜中的传输过程，计算出不同孔隙率的薄膜所对应的等效折射率。模拟结果显示纳米孔隙薄膜的等效折射率与孔隙率呈线性递减的关系。还利用固体材料学中的混合材料等效介电常量理论建立了一种混合介质并联理论模型，很好地解释了纳米孔隙高分子薄膜孔隙率与等效折射率的关系而且得到了纳米孔隙高分子薄膜等效折射率与孔隙率的函数关系式。将模拟结果与混合介质并联理论模型相比较，发现该理论模型的函数曲线与时域有限差分算法模拟的结果相互吻合。     

激光入射角度对薄膜热场分布影响的数值分析

在多层介质薄膜中，激光的入射方式是影响薄膜抗损伤能力的关键因素之一.提出了一种模拟锥角高斯光入射多层介质薄膜后电场和热场分布的方法.该方法能够分析薄膜中高斯光各个角谱分量叠加形成的电场分布，进而得到由于薄膜本征吸收产生的热量沉积以及薄膜内部的温度场分布.针对中心波长为4.3 μm的中红外高反膜进行了分析，给出了高反膜系的温升峰值随激光入射角度和偏振态的变化.结果表明：对于s偏振光，斜入射时膜系的最高温升峰值高于垂直入射峰值，而p光的结果则相反.此种模拟方法克服了原有方法对激光入射角度的限制，较好地反映出斜入射情况下激光偏振态对薄膜损伤的影响. 关键词： 多层介质薄膜 高斯光 热过程 数值分析     

矩孔光子晶体可见光谱段窄带偏振陷波研究

提出一种可见光谱段内窄带偏振陷波滤波的矩孔光子晶体结构。通过建立矩孔光子晶体模型,将矩孔光子晶体结构等效为介质层-光栅层-介质层周期结构,利用Rugate滤波理论对矩孔光子晶体结构进行分析,结合等效介质理论(EMT)和传输矩阵方法(TMM)对结构模型的入射光s偏振、p偏振的透过率进行仿真。另外讨论了矩孔光子晶体纵向周期数m、光栅层填充比f、厚度d等参数对偏振陷波的中心波长、带宽以及截止带透过率的影响。针对417,497,582,685nm中心波长,设计带宽为10nm的p偏振窄带陷波结构,并用时域有限差分方法(FDTD)进行仿真验证,结果表明,矩孔阵列结构可以实现可见光谱段内窄带偏振陷波滤波。     

双平行圆柱形MDM纳米棒等离子体波导的传输特性分析

设计了一种由双平行圆柱形纳米棒构成的金属-介质-金属(MDM)型等离子体波导,采用时域有限差分方法(FDTD)分析了波导结构的传输特性。当光波垂直主轴入射时,电磁场被很好地局限在两纳米棒所形成的中间区域以及介质层中,从而在该波导中能够有效地耦合电磁场能量。在工作波长为1 550 nm的情况下,随着内层金属芯半径的增大,有效折射率减小,传播距离增大;而中间介质层厚度增大时,有效折射率增大,传播距离减小。当外层金属壳厚为20 nm时,电场可以很好地被限制在纳米棒的介质层内。上述结果表明:通过调整波导结构的几何参数可以显著提高金属纳米棒的场限制,降低波导本身的损耗, 使波导的有效折射率和传播长度达到最优化。这种等离子体波导能够实现亚波长的光限制,可以应用于光子器件集成和传感器领域。     

基于ZF6基底的可见光宽谱带高性能增透膜

以ZF6为基底,采用电子束蒸发物理气相沉积方法设计并制备了一种增透波长为0.4～0.8μm的宽谱带可见光区增透膜。薄膜材料仅含有TiO2和SiO2两种材料,分别作为高低折射率材料。利用Edinburgh光谱仪对双面镀制该膜系样品的透过率进行测量,测试结果表明：薄膜平均透过率达98.15%,实际样品的光学特性与设计结果基本相符,具有宽带的增透特性,减少了表面剩余反射。机械强度与环境测试表明：制备的薄膜具有良好的稳定性和牢固度,可以应用于可靠性要求较高的光学系统中。     

不同参数对一维光子晶体透射谱的影响

利用传输矩阵法计算并分析了垂直入射下一维光子晶体的透射谱特性,数值模拟得到两种介质的折射率不变,入射波长减小时中心波长减小,禁带宽度变窄。当入射波长不变时,两种折射率比值变大时禁带宽度变大,实验结果为一维光子晶体器件的设计提供了理论依据。     

利用非规整膜系实现宽角度入射减偏振、减反射薄膜的研究

利用非均匀膜系理论对宽角度入射减偏振、减反射薄膜进行优化设计,分析了在宽角度入射的情况下,偏振光产生透过率不同的原因,选取了Na3AlF6、Ta2O5和Al2O3三种不同折射率材料,采用BK7作为基底,模拟设计了光谱区在500～560 nm波段、入射角为0~70°之间的多层减偏振、减反射薄膜,设计结果表明,薄膜的透过率得到大幅度提高.     

反射型光变色超表面滤光结构

提出了一种反射型超表面滤光结构,该滤光结构由基底、低折射率纳米光栅、Ag光栅、SiNx高折射率介质层组成.理论模拟结果表明:45°入射角下,在垂直于光栅栅线的入射平面内,反射谱峰值出现在475 nm波长处;在平行于光栅栅线的入射平面内,反射谱峰值出现在550 nm波长处.其电场分布特性表明,在不同的平面内TE偏振入射光激发的导模共振区域不同,TM偏振下激发的导膜共振强度与表面等离子体共振强度不同,导致该结构在垂直于光栅栅线方向与平行于光栅栅线方向的两个平面内表现出两种截然不同的颜色.基于此制备的超表面结构样品不但光变色效果明显,且易于与纳米压印工艺相结合实现大幅面光变色结构制备,在防伪和图案信息编码等领域有广阔的应用前景.     

二氧化硅亚波长纳米微结构的增透特性

对亚波长纳米微结构-非紧密堆积多晶胶体晶体光学薄膜的增透特性进行了研究。采用浸渍-提拉法在玻璃表面组装了亚波长纳米微结构,并利用等效介质理论分析其光学性质,理论和实验符合。研究表明实验制备的纳米微结构具有优异的增透性质,通过控制组装条件可以控制膜层厚度实现高增透效率从可见光到近红外的有效调谐,且微结构在玻璃基底上的等效折射率接近1.22,透射率最大能提高约7%,达到99.8%的增透效果。     

多孔氧化铝薄膜的制备和光学特性研究

采用阳极氧化法制备了二维有序纳米孔氧化铝膜.研究了工艺参数对多孔薄膜有序性、孔径、膜厚度等的影响，测量了多孔氧化铝有序膜的光透过、光吸收和光发射等光学特性.结果表明，在波长360 nm附近多孔氧化铝有序膜的光透过谱线和光吸收谱线发生突变，波长大于360 nm时，光透过增强；波长小于360 nm时，光吸收增强.多孔氧化铝有序膜的光致发光强度和峰位与激发光波长有关，光致发光谱范围在340~600 nm.     

Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring

Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system(SWLOMS). In this paper, a broadband antireflection(AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering(IBS). Ta_2O_5 and Si O_2 were chosen as high and low refractive index coating materials,respectively. The optimized coating structure contains 9 non-quarter-wave(QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.     

可见与红外双波段宽带增透膜的研制

根据军用光学仪器的使用要求,在多光谱ZnS基底上镀制增透膜,要求薄膜在可见与近红外波段400～1000 nm及远红外波段7～11 μm的平均透射率均大于90%.采用电子束真空镀膜的方法并加以离子辅助沉积系统,通过选择ZnS和YbF3作为高低折射率材料,利用最新OptilLayer软件三大模块的功能辅助,调整镀膜工艺参数,改进监控方法,减少膜厚控制误差,在多光谱ZnS基底上成功镀制符合使用要求的增透膜.所镀膜层在可见与近红外波段400～1000 nm的平均透射率大于91%,远红外波段7～11μm的平均透射率大于90%,能够承受恶劣的环境测试,完全满足军用光学仪器的使用要求.     

Enhanced optical absorption by Ag nanoparticles in a thin film Si solar cell

Thin film solar cells have the potential to significantly reduce the cost of photovoltaics. Light trapping is crucial to such a thin film silicon solar cell because of a low absorption coefficient due to its indirect band gap. In this paper, we investigate the suitability of surface plasmon resonance Ag nanoparticles for enhancing optical absorption in the thin film solar cell. For evaluating the transmittance capability of Ag nanoparticles and the conventional antireflection film, an enhanced transmittance factor is introduced. We find that under the solar spectrum AM1.5, the transmittance of Ag nanoparticles with radius over 160 nm is equivalent to that of conventional textured antireflection film, and its effect is better than that of the planar antireflection film. The influence of the surrounding medium is also discussed.     

可见光波段及1 064 nm波长处用于Glan-Taylor棱镜减反射膜

为了提高Glan-Taylor棱镜的透射率,研究了Glan-Taylor棱镜在可见光波段及1 064 nm波长处减反射膜膜的设计和制备.为提高薄膜和冰洲石晶体的附着力,采用沉积Al2O3为过渡层,ZrO2作缓冲层的方法,用单纯形优化的方法进行膜系优化设计.用电子束沉积和离子束辅助沉积的方法制备了多层减反射膜,并采用石英晶体振荡法监控膜厚和沉积速率.测量结果表明,在可见光波段及1 064 nm波长处的剩余反射率均小于0.5%经测试薄膜与冰洲石晶体的附着力性能良好.     

Antireflection subwavelength structures analyzed by using the finite difference time domain method

Antireflection subwavelength structures (ASSs) are analyzed by using the finite difference time domain (FDTD) method in the visible light spectrum. Low reflectance can be obtained by both the conical and pyramidal shapes over a broadband range. Comparing the reflectance of different structure shapes and aspect ratios by the FDTD method, it shows that the antireflection efficiencies of the pyramidal structures are better than that of the conical structures when the aspect ratio is up to 0.8. It is found that, for the conical structure surface, the average transmittance increases gradually with the aspect ratio and the average transmittance is about 99.6% with the aspect ratio of 2.0. However, for the pyramidal structure with the aspect ratio ranging from 1.0 to 2.0, the average transmittance is up to 99.7%.     

1064nm激光与远红外共窗口成像系统波长分离膜的研制

根据激光与远红外共窗口成像系统的技术要求,研制了一种波长分离膜,实现通过共窗口的激光与远红外光分离成像,即1 064nm高反射、8~14μm高透射.分析薄膜的微观结构,研究了薄膜材料吸潮前后的折射率变化,结合光学薄膜理论,优化膜系结构.在薄膜应力的基础上,优化膜层厚度,提高薄膜牢固性.研制的分离膜,1064nm反射率为99.71%,8~12μm平均透过率为97.1%,12~14μm平均透过率为90.1%,满足户外环境中长期使用的要求.     

Design, formation and characterization of a novel multifunctional window with VO2 and TiO2 coatings

A novel multifunctional window was demonstrated using VO₂-based thermochromic films with a TiO₂ antireflection coating. A strong enhancement in luminous transmittance of VO₂ was calculated using either a single layer or a double layer of TiO₂ for antireflection, with the double layer giving the better performance. A TiO₂ (25 nm)/VO₂ (50 nm)/TiO₂ (25 nm) structure, of which the film thickness has been optimized to a maximum integrated luminous transmittance (T_lum) by calculation, was formed on SiO₂ glass by sputtering in turn a V target in Ar+O₂ for VO₂ and a TiO₂ target in Ar for TiO₂. Optical properties were measured with a spectrophotometer, and the integrated solar and luminous properties were calculated based on the measured spectra. A maximum increase in T_lum by 86% (from 30.9% to 57.6%) was obtained for VO₂ after double-layer TiO₂ antireflection coating. The deposited VO₂ film on SiO₂ exhibits good thermochromism with a sharp optical transition at 58.5 °C, which decreased slightly to 57.5 °C after TiO₂ coating. The proposed window is the most advanced among those similarly reported in being multifunctional with automatic solar/heat control, ultraviolet stopping and possibly a wide range of photocatalytic functions in addition to a high value of the luminous transmittance. PACS 42.79.Wc; 78.20.-e; 71.30.+h     

可见光波段及1064nm波长处用于Glan-Taylor棱镜减反射膜

为了提高Glan-Taylor棱镜的透射率,研究了Glan-Taylor棱镜在可见光波段及1064nm波长处减反射膜膜的设计和制备．为提高薄膜和冰洲石晶体的附着力,采用沉积Al2O3为过渡层,ZrO2作缓冲层的方法,用单纯形优化的方法进行膜系优化设计．用电子束沉积和离子柬辅助沉积的方法制备了多层减反射膜,并采用石英晶体振荡法监控膜厚和沉积速率．测量结果表明,在可见光波段及1064nm波长处的剩余反射率均小于0．5％经测试薄膜与冰洲石晶体的附着力性能良好．     

透射光谱法测试双面薄膜的光学参数

由于普通的化学气相沉积法制作高掺Sn的二氧化硅薄膜比较容易产生结晶,而溶胶-凝胶法制备薄膜化学组成比较容易控制,可以制作出掺Sn浓度较大的材料。文章采用了溶胶-凝胶的方法制备出了66 mol%和75 mol%两种不同浓度的掺Sn的SiO₂薄膜,用浸渍法多次提拉薄膜以增加薄膜的厚度,之后用紫外-可见分光光度计测量了薄膜的透射光谱。之前基于透射光谱的方法计算玻璃基底上薄膜的光学参数都是针对单面薄膜,该文针对浸渍法产生的双面薄膜,建立了相对应的薄膜模型,并分别用包络线法计算出了两种不同薄膜样品的光学参数。计算结果表明两种不同薄膜样品的折射率随着波长的增加而增加,薄膜的厚度都为900 nm左右。     

Heat-insulation film with gold layer deposited on antireflection subwavelength-structured surface

The optical properties of gold layer deposited on antireflection subwavelength-structured surface are first exposed. The experimental results of the reflectances and transmittances for several different thicknesses of gold-deposited layers on the subwavelength structures are carried out. The nanostructured surface with spatial period and a diameter of about 230 nm and height of about 150 nm on polyethylene terphthalate (PET) film is fabricated by micro-replication process of UV imprinting. Comparing these with the bare gold-deposited layer and bare nanostructure, the results show that the optical films with the suitable gold layer deposited on antireflection subwavelength-structured surface has high transmittance and low glare in the visible spectral range and high reflectance in the infrared range. That is to say, when the antireflection subwavelength-structured surface is coated with a gold layer of several tens of nm thickness, it will have some unique optical characters.