激光分光瞳共焦显微镜系统研制

为了满足生物类等样品对大工作距和高分辨率共焦显微镜的需求,将分光瞳技术与激光共焦显微技术结合应用到成像系统上。阐述了激光分光瞳共焦显微成像原理,首次成功搭建了相应的显微镜成像测量系统。理论分析和实验表明:分光瞳共焦显微技术独特的非共轴结构使系统的轴向分辨力是相同数值孔径物镜单轴系统的3倍以上,对理论高度为100nm的台阶样品进行成像测试,得到的样品三维形貌,成像质量良好。     

采用变焦液体透镜的共焦检测系统的设计与仿真

共焦显微技术越来越广泛地应用于微机电系统和半导体器件的三维轮廓测量。设计一种新型采用变焦透镜作为轴向扫描方式的共焦显微系统,利用变焦透镜的焦距变化来代替传统的轴向位移扫描。系统实现了无机械运动的轴向扫描,消除了传统共焦系统中由位移台移动带来的振动,不仅减小了系统的复杂度,而且降低了成本。进一步设计了基于位移台和变焦透镜的两种共焦检测系统,并且对其进行了仿真实验。实验结果表明:基于位移台和基于变焦透镜的共焦系统的聚焦成像和离焦成像结果类似,并且光强的轴向分布曲线也基本相同,表明此方法可行。     

基于OSLO的无限远像距消色差显微物镜的设计

共焦激光扫描显微镜对物镜有高分辨率、易于实现纵向扫描的要求,为此设计了高分辨率6片式无限远像距显微物镜.它的前置物镜与辅助物镜之间具有一段平行光路,因此容易实现轴向扫描.根据使用要求总体计算该物镜的外形尺寸,以像差理论为基础选择6片式的消色差物镜初始结构,用专业光学设计软件OSLO对物镜和辅助物镜进行设计和像质分析.设计结果显示,独特的6片式结构的20×物镜分辨率达到了800 lp/mm,符合共焦显微镜的使用要求.     

具有抗漂移特性的激光共焦拉曼光谱成像技术与系统

共焦拉曼技术结合了共焦显微技术和拉曼光谱技术,具有高分辨率、高灵敏度、可层析成像的优势,广泛应用于物理、材料科学、生物医学、文物鉴定以及刑侦等领域。由于拉曼光谱成像需要较长时间,测量中系统易受环境等因素影响产生漂移,造成离焦,而现有商用共焦拉曼光谱仪并无定焦能力,容易影响测量结果。针对此问题,研制了一种具有抗漂移能力的激光共焦拉曼光谱探测系统。在不改变共焦拉曼探测基本原理的基础上,利用拉曼轴向响应曲线最大值对应显微物镜焦面这一特性,对每个探测点进行轴向扫描,采集一定数量的轴向信号,通过曲线拟合寻找光谱强度极值位置,保证扫描过程中样品始终处于系统的焦点位置处,抑制离焦影响,改善拉曼光谱成像效果。以单层石墨烯样品进行单点测试,证明仪器在5 μm离焦范围内可以实现实时定焦,定焦后采集到的拉曼光谱强度几乎不变,具有良好的抗漂移能力;对硅台阶样品进行成像测试,结果表明成像过程中,信号强度未发生明显变化,且横向分辨率有一定改善,效果明显优于普通共焦拉曼光谱探测系统。     

基于偏振衍射色散共焦的光学元件轴向间距测量

光学元件轴向间距测量对精密光学系统的定位和装调具有重要意义。针对现有色散共焦测量系统中色散物镜结构复杂、色散范围小的问题,提出基于偏振衍射色散共焦的光学元件轴向间距测量方法,将传统折射共焦镜头几百毫米的轴向尺寸和复杂的装调需求简化为数毫米的单片镜,简化了系统结构。透镜间距和厚度测量实验表明,间距测量误差为10 μm。     

微分干涉差共焦显微膜层微结构缺陷探测系统

多层膜极紫外光刻掩模"白板"缺陷是制约下一代光刻技术发展的瓶颈之一,为提高对掩模"白板"上的膜层微结构缺陷的分辨能力,提出了一种微分干涉差共焦显微探测系统方案。基于标量衍射理论,计算了系统横向和轴向分辨率。利用MATLAB建模仿真,在数值孔径为0.65、工作波长为405 nm时,分析比较了微分干涉差共焦显微系统、传统显微系统和共焦显微系统的分辨率。结果表明微分干涉差共焦显微系统具有230 nm的横向分辨率和25 nm轴向台阶高度差的分辨能力(对应划痕等缺陷形式)。此外,仿真和分析了实际应用中探测器尺寸、样品轴向偏移等的影响,模拟分析了膜层微结构缺陷的探测,结果表明本系统可以探测200 nm宽、10 nm高的微结构缺陷,较另外两种系统有更好的探测能力。     

具有高空间分辨力的整形环形光式差动共焦测量法

提出一种新的具有高空间分辨力的整形环形光式差动共焦测量方法。该方法通过整形环形光式共焦测量法和锐化爱里斑主瓣，改善系统横向分辨力；通过差动共焦测量法改善系统的轴向分辨力，最终达到提高系统空间分辨能力的目的。理论分析和实验表明：整形环形光内孔归一化半径ε越大，横向分辨力改善越明显，量程扩展范围越宽；当入射光波长λ=632.8nm，物镜数值孔径取NA=0.85，ε=0.5时，该系统的横向分辨力优于0.2μm，轴向分辨力优于2nm。该方法为光触针测量系统空间分辨力的提高提供了1种新的方法，可广泛应用于超精密三维微细结构工件的超精密测量。     

差动共焦式纳米级光聚焦探测系统的研究

为解决纳米级大范围的非接触测量问题 ,提出了基于差动式共焦显微技术的光聚焦探测系统。介绍了系统的工作原理和结构装置 ,对系统中的关键技术进行了优化设计 ,通过对共焦光路的差动设计 ,可以有效地抑制光源的噪声和漂移对测量结果的影响。初步实验结果表明 ,该系统的轴向分辨率可达 2 nm     

基于斯托克斯参量测量的偏振共焦显微成像技术的研究

提出了一种基于斯托克斯(Stokes)参量测量的偏振共焦显微成像新方法。以斯托克斯参量、偏振度、相位差、方位角和椭率角等偏振参量作为成像物理量,通过系统集成方法将斯托克斯参量测量系统整合到共焦显微成像系统,通过共焦显微成像系统的显微物镜将激光聚焦到样品表面,而带有样品偏振信息的反射光进入斯托克斯参量测量系统进行偏振测量,把从斯托克斯参量测量系统中出射的4个斯托克斯光分别聚焦到4个点探测器进行光电探测,实现斯托克斯参量的共焦探测,同时获得同一物点的4个斯托克斯参量以及偏振度、相位差、方位角和椭率角等偏振参量。对样品进行二维扫描,获得不同物点的4个斯托克斯参量及其相关的偏振参量,利用计算机软件进行图像重建,从而获得样品的斯托克斯参量及其相关偏振参量的共焦显微图像。     

内窥式散斑类共聚焦系统层析能力分析

本文研究了内窥式散斑类共聚焦系统(Endoscope-based speckle quasi-confocal system,EBSQCS)的层析能力。从散斑类共聚焦显微镜(Speckle quasi-confocal microscope,SQCM)成像原理出发,详细分析了内窥镜光学结构对散斑类共聚焦显微镜散斑场波动的影响规律,推导了内窥镜光学结构与内窥式散斑类共聚焦系统轴向分辨力的关系。实验测得了基于光纤束的内窥式散斑类共聚焦系统的轴向分辨力曲线。选用放大倍率4倍,光纤直径5μm的内窥镜系统的内窥式散斑类共聚焦系统轴向分辨力曲线的全峰半高是散斑类共聚焦显微镜的2.3倍,与理论计算值相符。实验结果表明内窥式散斑类共聚焦系统具有很好的轴向层析能力。     

Dual-axes differential confocal microscopy with high axial resolution and long working distance

We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours.     

An optical system incorporating gradient-index lens for confocal inspection

A differential confocal measurement system features high lateral resolution and depth-discriminated sections. In comparison with conventional lens, gradient-index lens is lighter in weight, smaller in volume and easy to couple. In order to facilitate the measurement of a small irregular surface in a limited space, a small optical inspection system is presented, which combines the high axial resolution and absolute position tracking capability of a differential confocal microscopy and the compact design of gradient-index lens, and uses gradient-index lens to obtain a small detector of 1 mm in diameter. The operating principle and construction of the measurement system are detailed. The differential design of the two detectors eliminates both the fluctuation of light source and the electronic noise from probes, and increases the axial resolution as well.     

微型差动式共焦自聚焦光聚焦探测系统

为解决微小内轮廓尺寸为代表的微小尺寸的非接触式超精密测量问题，提出了将自聚焦透镜体积小的特点与共焦显微技术的高分辨率和绝对位置跟踪特性相结合的差动式自聚焦共焦微型显微技术的光探测技术，建立了相应的传感系统，介绍了系统的工作原理和构成，自聚焦透镜测头直径为1mm，两个探测器差动设置，不但消除了光源的光强漂移和探测器的电子漂移产生的共模噪声，提高了测量信噪比，而且有效地提高了系统的轴向分辨率，初步实验表明，系统轴向分辨率在倾斜率小于20度的范围内可达5nm。     

Dual-axes confocal microscopy with post-objective scanning and low-coherence heterodyne detection

We present a dual-axes confocal microscope that employs postobjective scanning and low-coherence heterodyne detection to collect vertical cross-sectional images from biological tissue with high axial resolution, reduced noise from scattered light, deep tissue penetration, and a large dynamic range. This architecture can be scaled down to millimeter dimensions with microelectromechanical systems technology for performance of in vivo optical biopsy.     

反射式光纤共焦扫描成像的研究

建立了反射式光纤共焦扫描成像系统,分析了光纤－集光透镜参数Ａ及物透镜有效数值孔径等对系统成像分辨率的影响。并在此基础上选择了合适参数的透镜,获得了优化的反射式光纤共焦扫描成像系统,测试结果表明,该系统具有亚微米级横向成像能力,微米级向层析能力,成像稳定性那,它将应用于材料及生物组织三维成像检测中。     

Enhancement of lateral resolution in confocal self-interference microscopy

We describe confocal self-interference microscopy with enhanced lateral resolution. A uniaxial anisotropic crystal is used to cause interference between two linearly polarized beams that are reflected from the same pointlike object in the focal plane of the objective lens. Theory and the optimal design that maximizes the sensitivity of the interference signal are presented. A numerical experiment shows a 38% decrease in the lateral FWHM for simple confocal self-interference microscopy.     

Spectrally encoded slit confocal microscopy

A simple and cost-effective method for real-time imaging in confocal microscopy is proposed. Spectrally encoded slit confocal microscopy (SESCoM) uses a spectral encoding technique together with a confocal slit aperture to achieve two-dimensional images. Simulation and experimental results of the SESCoM's axial and lateral performances are presented. The measured FWHM of the axial response is 1.15 mum when an objective with a NA of 0.95 is used. FWHMs of the lateral line spread functions are measured to be 236 and 244 nm along the x and y directions, respectively. Both the axial and the lateral experimental results agree well with the simulation results.     

Microstructure measurement based on frequency-shift feedback in a-cut Nd:YVO_4 laser

A new optical method based on frequency-shift feedback and laser confocal microscopy is presented to noninvasively measure a microstructure inside a sample. Due to the limit of axial resolution caused by poor signal detection ability, conventional laser feedback cannot precisely measure the microstructure. In this Letter, the light scattered by the sample is frequency shifted before feedback to the laser to obtain a magnification. Weak signals that change with the microstructure can be detected. Together with the tomography ability of laser confocal microscopy, the inner microstructure can be measured with high axial resolution.     

Improved axial resolution in confocal fluorescence microscopy using annular pupils

The axial image of a thick fluorescent layer is studied in a confocal microscope consisting of either circular or annular pupils. The response for circular pupils is sharper than that for annular pupils if a small pinhole detector is used. But when the size of the pinhole is larger than a certain value, the response in the latter case can become sharper than that in the former. This result implies that for a given detector of finite size, axial resolution in confocal fluorescence microscopy can be improved when an annular lens is used. Our experimental results qualitatively demonstrate the theoretical prediction. The strength of optical sectioning and the axial cross-section of the three-dimensional optical transfer function are also derived from the measured data.     

A lateral super-resolution differential confocal technology with phase-only pupil filter

In order to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, phase-only pupil filtering differential confocal microscopy (PFDCM), a new approach is proposed based on the differential confocal microscopy (DCM), which uses a three-zone phase-only pupil filter with lateral super-resolution capability obtained through optimized design to change the distribution of DCM three-dimensional point spread function, so that the DCM lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFDCM are better than 0.2 μm and 2 nm, respectively, when wavelength of incidence laser beam , numerical aperture of measuring lens NA=0.85, and lateral spot size with a three-zone phase-only pupil filter G_T=0.65. It is therefore concluded that PFDCM is a new approach to further improvement of lateral resolution in laser probe measurement systems.