| 差动共焦式纳米级光聚焦探测系统的研究 |
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| 引用本文： | 王富生,谭久彬.差动共焦式纳米级光聚焦探测系统的研究[J].光学技术,2001,27(3):232-234. |
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| 作者姓名： | 王富生 谭久彬 |
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| 作者单位： | 哈尔滨工业大学 自动化测试与控制系, |
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| 基金项目： | 总装备部九五预研项目!(1 8.6.1 .4/ 9760 0 0 - 0 5) |
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| 摘 要： | 为解决纳米级大范围的非接触测量问题 ,提出了基于差动式共焦显微技术的光聚焦探测系统。介绍了系统的工作原理和结构装置 ,对系统中的关键技术进行了优化设计 ,通过对共焦光路的差动设计 ,可以有效地抑制光源的噪声和漂移对测量结果的影响。初步实验结果表明 ,该系统的轴向分辨率可达 2 nm
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| 关 键 词： | 共焦显微镜 光聚焦探测 差动 纳米 系统优化 |
| 文章编号： | 1002-1582(2001)03-0232-03 |
| 修稿时间： | 2000年12月11 |
Optical focus detection system with nanometer resolution using differential confocal microscope |
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| WANG Fu sheng,TAN Jiu bin.Optical focus detection system with nanometer resolution using differential confocal microscope[J].Optical Technique,2001,27(3):232-234. |
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| Authors: | WANG Fu sheng TAN Jiu bin |
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| Abstract: | An optical focus detection system based on differential confocal microscope is presented for wide range non contact measurement with nanometer resolution The measurement principle and structure, optimizes the key technique in the system are described With differential confocal path, the source noise and shift are effectively suppressed The feasibility of the differential confocal system is experimentally verified and the axial resolution is up to 2nm |
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| Keywords: | confocal microscope optical focus detection differential nanometer system optimizing |
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