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漂移量反馈控制式激光准直方法
引用本文:赵维谦,谭久彬,马洪文,邹丽敏.漂移量反馈控制式激光准直方法[J].光学学报,2004,24(3):73-377.
作者姓名:赵维谦  谭久彬  马洪文  邹丽敏
作者单位:哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨,150001;哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨,150001
基金项目:国家自然科学基金 (5 0 0 75 0 2 0 ),哈工大校基金 (HIT 2 0 0 12 6 )资助课题
摘    要:提出一种集光纤准直与光束漂移量反馈控制准直技术于一体的激光光束准直方法 ,它是在单模光纤对激光器出射光束漂移量进行初级准直的基础上 ,进一步对光束的漂移量进行反馈控制 ,进而提高出射光束的方向稳定性。准直系统中利用漂移量分离光路和光电检测系统对光束的平漂量和角漂量进行了分离检测 ,并各自构成相应的光束空间平漂量反馈控制系统和光束空间角漂量反馈控制系统 ,减小了平漂量和角漂量反馈控制中的相互耦合。引入单模光纤使激光器与光束漂移量反馈控制准直系统相隔离 ,减小了激光管热源温度变化等因素对准直系统的影响 ,同时还便于准直系统使用中的安装布置。上述方法的应用 ,提高了准直精度及准直效率。实验表明目前该方法准直精度可达 0 .7× 10 -7rad。

关 键 词:物理光学  激光准直  光束漂移  单模光束  激光基准  纳米控制
收稿时间:2003/6/3

Laser Collimation Method Based on the Drift Feedback Control
Zhao Weiqian,Tan Jiubin,Mao Hongwen,Zou Limin.Laser Collimation Method Based on the Drift Feedback Control[J].Acta Optica Sinica,2004,24(3):73-377.
Authors:Zhao Weiqian  Tan Jiubin  Mao Hongwen  Zou Limin
Abstract:A new laser beam collimation method that combines fiber collimation technique with laser beam drift feedback controll is investigated. In this method, the laser beam drift is initially collimated by passing though a single-mode fiber, then it is collimated further by a feedback control system for the purpose of improving the direction stabilization of the laser beam. In this feedback system, the displacement drift and angle drift are not only measured respectively using a drift separation optical system and a drift photoelectric measurement system, but also each of them has a corresponding independent feedback control system to restrain itself, at the same time the coupling between them is decreased. Due to the single-mode fiber is used, the laser system is far from the beam drift feedback control system. So the temperature effect from the laser source on the collimation system is decreased and the collimation system can be easily arranged. By applying these techniques, the collimation precision and efficiency are improved and experimental results show the collimation precision for the laser beam drift can reach 0.7×10-7 rad.
Keywords:physical optics  laser collimation  light beam drift  single\|mode fiber  laser datum  control system with nanometer resolution
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