氢原子谱线测定EACVD中电子平均温度

采用蒙特卡罗方法,对以CH₄/H₂混合气体为原料气体的EACVD中氢原子的发射过程进行了模拟。在模拟中考虑了电子与H₂的弹性碰撞及振动激发、分解、电子激发、相应于H_α, H_β, H_γ谱线的激发、电离及分解电离等非弹性碰撞过程;与CH₄的碰撞考虑了弹性动量传输及振动激发、分解、电子激发、电离及分解电离等非弹性碰撞过程。研究了不同CH₄浓度下基片表面上电子平均温度与氢原子谱线相对强度的关系,给出了一种对EACVD中电子平均温度进行实时监测的方法。对于有效控制工艺条件,生长出高质量的金刚石薄膜具有重要意义。     

电子助进化学气相沉积金刚石中发射光谱的空间分布

采用蒙特卡罗方法,对以CH₄/H₂为源料气体的电子助进化学气相沉积(EACVD)金刚石中的氢原子(H_α,H_β,H_γ)、碳原子C(2p3s→2p2：λ=165.7 nm)以及CH(A2Δ→X2Π：λ＝420～440 nm)的发射过程进行了模拟,研究了不同CH₄浓度下各发射谱线的空间分布。结果表明,不同CH₄浓度下各发射谱线在反应空间的大部分区域内均随距灯丝距离的增大而增大,而当到达基片表面附近时有所减弱。随着CH₄浓度的增加,H谱线强度减弱,CH与C谱线强度增强。     

EACVD中的Hα谱线与最佳生长条件

采用蒙特卡罗方法,模拟了CH4/H2混合气体为源气体的EACVD中的氢原子发射过程。考虑了电子与H2的弹性碰撞及振动激发、分解、电子激发、相应于Hα,Hβ,Hγ谱线的激发、电离及分解电离等非弹性碰撞过程;与CH4的碰撞考虑了弹性动量传输及振动激发、分解、电子激发、电离及分解电离等非弹性碰撞过程。研究了不同实验条件下产生的H,CH3的数目与Hδ谱线强度的关系,给出了一种通过Hα谱线来推断生长金刚石薄膜的最佳实验条件的方法。     

高气压MPCVD沉积金刚石的光谱研究

采用微波等离子体化学气相沉积方法(microwave plasma chemical vapor deposition, MPCVD)在高沉积气压(34.5 kPa)下制备多晶金刚石,利用发射光谱(optical emission spectroscopy, OES)在线诊断了CH₄/H₂/O₂等离子体内基团的谱线强度及其空间分布,并利用拉曼(Raman)光谱评价了不同O₂体积分数下沉积出的金刚石膜质量,研究了金刚石膜质量的均匀性分布问题。结果表明：随着O₂体积分数的增加,C₂, CH及H_α基团的谱线强度均呈下降的趋势,而C₂,CH与H_α谱线强度比值也随之下降,表明增加O₂体积分数不仅导致等离子体中碳源基团的绝对浓度下降,而且碳源基团相对于氢原子的相对浓度也降低,使得金刚石的沉积速率下降而沉积质量提高。此外,具有刻蚀作用的OH基团的谱线强度却随着O₂体积分数的增加而上升,这也有利于降低金刚石膜中非晶碳的含量。光谱空间诊断发现高沉积气压下等离子体内基团分布不均匀,特别是中心区域C₂基团聚集造成该区域内非晶碳含量增加,最终导致金刚石膜质量分布的不均匀。     

电子助进化学气相沉积金刚石中的光发射谱特性

采用蒙特卡罗方法,对以CH₄/H₂为源料气体的电子助进化学气相沉积(EACVD)金刚石中的氢原子(H_α, H_β, H_γ)、碳原子C(2p3s2p2∶λ=165.7 nm)以及CH(A2Δ→X2Π∶λ=420～440 nm)的光发射过程进行了模拟,气体温度随空间的变化采用温度梯度变化,研究了不同反应室气压及衬底温度下的光发射谱特性。结果表明,不同衬底温度下各谱线强度均随气压的增大先增大后减小; 当气压较低时,谱线强度随衬底温度的增大而减少,而气压较高时,谱线强度随衬底温度的增大而增大。     

MPCVD等离子体的发射光谱研究

在2.45 GHz, 800 W微波等离子体化学气相沉积装置上,利用发射光谱对CH₄/H₂等离子体进行在线诊断,分析了等离子体中存在的基团,研究了甲烷浓度对各基团浓度及基团的空间分布的影响。结果表明：等离子体中存在CH, H_α, H_β, H_γ, C₂ 基团和Mo杂质原子,随着甲烷浓度的升高,各基团的发射光谱强度均有增加,其中C₂基团强度显著增加。CH与H_α基团的发射光谱强度比值随甲烷浓度的增加变化不大,而C₂与H_α基团的发射光谱强度的比值随甲烷浓度的增加而显著增大。另外,甲烷浓度的增加使得等离子体中各基团在空间分布的均匀性变差。     

甲烷电离特性的等离子体发射光谱法研究

应用等离子体发射光谱法,用CCD(charge coupled device)光栅光谱仪记录并标识了脉冲电晕甲烷等离子体370～1 100 nm的发射光谱,确定了常温常压下高纯甲烷(99.99%)经100 kV, 100 Hz脉冲高压电离后的产物为H,C+,CH,C,C₂,C₃, C₄,C₅和烃等。通过分析实验检测到的甲烷等离子体发射光谱,给出了甲烷经脉冲高压电离形成电晕等离子体的机理和自由基CH_n(n=3,2,1)、碳、烃等产物的电离途径。结果显示甲烷分子经高能电子非弹性碰撞后脱氢程度很高,大量氢原子及其离子和甲烷自由基在进一步被高能电子作用下合成了烯烃、炔烃、烷烃和高聚碳化物。实验所获得的脉冲甲烷等离子体发射光谱及其机理分析可为甲烷及其转化研究提供相关依据。     

DKDP晶体的拉曼散射谱分析

根据空间群理论分析和指认了磷酸二氘钾晶体[K(D_xH_1-x)₂PO₄,简称DKDP]的拉曼活性晶格振动模,测量了其室温拉曼光谱。结果表明DKDP晶体的晶格振动谱主要是由D₂PO-₄阴离子团簇的内振动引起的。与H₂PO-₄阴离子稀溶液的拉曼谱和NaD₂(PO₄)₂晶体的拉曼谱比较,DKDP晶体中D₂PO-₄阴离子的四个特征内振动模可被指认为881 cm-1(ν₁),357 cm-1(ν₂),514/541 cm-1(ν₃),965 cm-1(ν₄)。     

介质阻挡放电中点线放电的谱线线型及振动温度

在氩气/空气的混合气体近大气压介质阻挡放电中,首次观察到点状与线状放电共存的放电现象, 测量比较了点状与线状放电的谱线频移和振动温度。谱线频移的测量利用的是氩原子ArⅠ(2P₂→1S₅)的发射谱线,振动温度的测量利用的是氮分子第二正带系(C3Π_u→B3Π_g) 的发射谱线。结果表明：点放电中的ArⅠ(2P₂→1S₅)谱线的频移大于线放电谱线的频移,表明前者电子密度较高;而点放电振动温度低于线放电的振动温度。     

拉曼光谱在优化处理绿松石中的应用研究

优化处理绿松石的大量面市,给绿松石的鉴定带来了挑战。通过激光拉曼光谱测试分析、压制及人工注塑处理绿松石为研究对象,对优化处理绿松石的激光拉曼光谱特征进行了研究。结果表明,拉曼光谱技术是一种有效鉴别绿松石及其处理品的无损检测方法,OH,H₂O,PO₄ 及CH₂基团的振动模式和频率决定了优化处理绿松石的激光拉曼光谱特征。优化处理绿松石除具绿松石典型拉曼光谱特征外,在2 937和2 883 cm-1处普遍出现一组具鉴定意义的由外来添加物中CH₂伸缩振动及CH₂弯曲振动致拉曼谱带。依据这些特征拉曼谱带,有助于将天然绿松石与优化处理品区分开。该研究为快速、准确、无损鉴别绿松石提供了一种新思路。     

电子助进化学气相沉积金刚石中发射光谱的蒙特卡罗模拟

采用蒙特卡罗方法，对源料气体为CH4/H2混合气的电子助进化学气相沉积（EACVD）中 的氢原子(H)、碳原子(C)以及CH基团的发射过程进行了模拟.研究了CH4浓度、反应室气压 和衬底偏压等工艺参数对发射光谱及成膜的影响.研究发现，CH基团可能是有利于金刚石薄 膜生长的活性基团，而碳原子不是；偏压的升高可提高电子平均温度及衬底表面附近氢原子 的相对浓度；通过氢原子谱线可测定电子平均温度并找到最佳成膜实验条件.该结果对EACVD 生长金刚石薄膜过程中实时监测电子平均温度，有效控制工艺条件，生长出高质量的金刚石 薄膜具有重要的意义. 关键词： 蒙特卡罗模拟 金刚石薄膜 发射光谱     

Ionization in Ps–H scattering

Coulomb–Born approximation has been used to study three different types of ionization in positronium (Ps) and hydrogen scattering. The present Ps–H system contains four centers; we have considered all the Coulomb interactions and neglected exchange assuming the fact that at relatively higher energies above thresholds, the effect of exchange is not so important. All the important target elastic and inelastic channels are included. The non-unitarity problem in the target elastic channels, discussed by McAlinden et al. in 1996 in their positronium–atom scattering studies is overcomed in the present calculation using the orthonormality properties of target wavefunctions and a simple algebra. Comparative studies are made among ionization cross sections with different target excitations and different Ps-excitations together with summed Ps-ionization, summed H-ionization, both-ionization, summed excitation, total ionization and total cross sections. The present Letter indicates the importance of all the three different types of ionization and the importance of target elastic channels in Ps–H scattering.     

Collisional and radiative processes with participation of highly excited states of atoms and molecules

A number of processes in which highly excited states of atoms and molecules participate are investigated. These processes are of interest for the kinetics of a low-temperature plasma, for atomic and molecular spectroscopy, and for astrophysics. A quasiclassical theory is developed for transitions between Rydberg states with change of the principal quantum number, and also for the processes of direct and associative ionization of highly excited atoms, which result from collisions between a neutral particle and its atomic core. The state of the inner electrons of a quasimolecular (molecular) ion is not altered by transitions of the outer electrons. Specific calculations are carried out for the case of the collision of hydrogen H(n) with helium He (1s²) atoms. It is shown that the cross sections and the rate constants of these processes are determined in this case by the mechanism investigated in the paper, and not by scattering of the Rydberg electron by the neutral particle. The cross sections for dipole excitation and dissociation of molecular ions from high vibrational energy levels by electron impact is calculated in the Born-Coulomb approximation. The cross sections and the rates of dissociative and three-particle attachment of electrons to ions are determined. The processes of autoionization and autodissociation decay of Rydberg states of vibrationally excited molecules are determined. Also investigated are radiative transitions near the dissociation limit of diatomic molecular ions and neutral molecules, viz., photodissociation and radiative decay of high vibrational levels, and photodissociation and translational (inverse-bremsstrahlung) absorption in collision of atomic particles.Translated from Trudy Ordena Lenina Fizicheskogo Instituta im. P. Lebedeva AN SSSR, Vol. 145, pp. 80–130, 1984.     

High-throughput backbone resonance assignment of small 13C,15N-labeled proteins by a triple-resonance experiment with four sequential connectivity pathways using chemical shift-dependent, apparent 1J(1H,13C): HNCACBcodedHAHB

The proposed three-dimensional triple-resonance experiment HNCACBcodedHAHB correlates sequential 15N, 1H moieties via the chemical shifts of 13Calpha, 13Cbeta, 1Halpha, and 1Hbeta. The four sequential correlation pathways are achieved by the incorporation of the concept of chemical shift-coding [J. Biomol. NMR 25 (2003) 281] to the TROSY-HNCACB experiment. The monitored 1Halpha and 1Hbeta chemical shifts are then coded in the line shape of the cross-peaks of 13Calpha, 13Cbeta along the 13C dimension through an apparent residual scalar coupling, the size of which depends on the attached hydrogen chemical shift. The information of four sequential correlation pathways enables a rapid backbone assignment. The HNCACBcodedHAHB experiment was applied to approximately 85% labeled 13C,15N-labeled amino-terminal fragment of Vaccinia virus DNA topoisomerase I comprising residues 1-77. After one day of measurement on a Bruker Avance 700 MHz spectrometer and 8 h of manual analysis of the spectrum 93% of the backbone assignment was achieved.     

EACVD中用氢原子谱线测定电子平均能量

采用蒙特卡罗方法，对EACVD中氢原子的发射过程进行了模拟。给出了由氢原子谱线测定电子平均能量的方法，结果对EACVD生长金刚石薄膜过程中实时监测电子平均能量，进而可以有效地控制工艺条件，生长出高质量的金刚石薄膜具有重要意义。     

弱电离大气等离子体电子碰撞能量损失的理论研究

在前期计算电子能量分布函数的基础上, 求出弱电离大气等离子体中各碰撞反应过程的电子能量损失. 由于在弹性碰撞中电子-重粒子能量交换很少, 同时氮气、氧气分子又有很多能量阈值较低的转动、振动能级存在, 因此在大气等离子体中弹性碰撞电子能量损失所占份额很小(直流电场下小于6%). 研究发现, 弱电离大气等离子体中在不同能量区间占主导的能量损失过程不同. 随着有效电子温度(或约化场强)增加, 占主导的电子能量损失过程依次为转动激发、振动激发、电子态激发、碰撞电离、加速电离产生的二次电子. 在约化场强E/N=1350 Td (或有效电子温度为14 eV)附近, 平均电离一个电子所需的能量最小, 约为57 eV. 因此可以根据不同的需求调节电场强度, 从而达到较高的能量利用率. 关键词： 弱电离大气等离子体 碰撞反应过程 电子能量损失     

Investigation of optical emission spectroscopy in diamond chemical vapor deposition by Monte Carlo simulation

The optical emission spectra(atomic hydrogen(Hα,Hβ,Hγ),atomic carbon C(2p3s→2p2:λ=165.7 nm) and radical CH(A2△→X2П:λ=420-440 nm))in the gas phase process of the diamond film growth from a gas mixture of CH4 and H2 by the technology of electron-assisted chemical vapor deposition (EACVD)have been investigated by using Monte Carlo simulation.The results show that the growth rate may be enhanced by the substrate bias due to the increase of atomic hydrogen concentration and the mean temperature of electrons.And a method of determining the mean temperature of electrons in the plasma in-situ iS given.The strong dependence on substrate temperature of the quality of diamond film mainly attributes to the change of gas phase process near the substrate surface.