变宽度分割电极片状压电致动器的位移特性

针对硬磁盘驱动器中磁头定位两级伺服系统设计了一种新型压电致动器——悬臂梁式变宽度分割电极片状压电致动器.沿厚度方向极化的PZT压电陶瓷薄长片，宽度沿长度方向变化且沿长轴对称，一端固定一端自由构成悬臂梁.其上下两表面的电极均沿长轴分割成对称的两部分.施加电场使其中一半在d₃₁模式作用下伸长，而与其对称的另一半缩短，则压电片沿宽度方向产生弯曲，自由端便可产生致动位移.对该致动器的驱动电压-端部致动位移特性进行了理论分析、有限元模拟及实验验证.致动器中的电场诱导应力远小于陶瓷的抗张强度.致动器端部位移的测试结果略大于理论计算值.与现有磁头悬浮臂尺寸相近的致动器，在20—50V的电压驱动下均可获得1—2μm的致动位移.对25kTPI(track per inch)的高道密度硬磁盘，该位移已能覆盖至少一个磁道宽度，满足磁头定位两级伺服系统对第二级致动器致动位移的基本要求. 关键词：     

Dynamic properties of an omni-directional piezoelectric motor for precision position control

A piezoelectric motor capable of omni-directional movements has been developed to apply for robot joints, eyes, and precision positioning stage. The piezoelectric actuator has a simple structure of a cone type consisting of two piezoelectric ring-typed ceramics with electrodes divided into four segments and stainless steel elastic bodies. Before manufacturing the piezoelectric motor, the admittance characteristics and displacements of the actuator as a function of frequency were simulated. Elliptical motions of the actuator were created at several frequencies between the longitudinal and transverse resonance frequencies. The actual motor with alumina ball exhibited nice performance using a driving circuit with two rotary encoders and a PID controller. The moving element was omni-directionally operated at a driving frequency of 53.8 kHz and an output voltage of 280 V_p-p. The developed motor enables the moving element to move to a desired position with a resolution of 1.2°/pulse, an angular velocity of 4 rad/s, and a thrust force of 200 g.     

Design of an ultrasonic sensor for measuring distance and detecting obstacles

This paper introduces a novel method for designing the transducer of a highly directional ultrasonic range sensor for detecting obstacles in mobile robot applications. The transducer consists of wave generation, amplification, and radiation sections, and a countermass. The operating principle of this design is based on the parametric array method where the frequency difference between two ultrasonic waves is used to generate a highly directional low-frequency wave with a small aperture. The aim of this study was to design an optimal transducer to generate the two simultaneous longitudinal modes efficiently. We first derived an appropriate mathematical model by combining the continuum model of a bar and countermass with the compatibility condition between a piezoelectric actuator and a linear horn. Then we determined the optimal length of the aluminum horn and the piezoelectric actuator using a finite element method. The proposed sensor exhibited a half-power bandwidth of less than ±1.3° at 44.8 kHz, a much higher directivity than existing conventional ultrasonic range sensors.     

Nonlinearity in inverse and transverse piezoelectric properties of Pb(Zr0.52Ti0.48)O3 film actuators under AC and DC applied voltages

The motion of domain walls is a crucial factor in piezoelectric properties and is usually related to the irreversible and hysteretic behaviors. Herein, we report on the investigation of inverse and transverse piezoelectric coefficients of capacitor-based and microcantilever-based Pb(Zr_0.52Ti_0.48)O₃ films with a change in the DC bias and the AC applied voltage. A large inverse piezoelectric strain coefficient of about 350 p.m./V, and a low strain hysteresis of about 7.1%, are achieved in the film capacitors under a low applied voltage of 2 V (20 kV/cm) which can benefit the actuators for motion control in high-precision systems. The field-dependences of the transverse piezoelectric coefficients, obtained from four-point bending and microcantilever displacement, are in good agreement with each other. The results also reveal that the irreversible domain-wall motion is attributed to the nonlinearity in the field-dependent piezoelectric strain and cantilever displacement.     

悬线式力矩器磁路设计中的有限元分析应用

光学头力矩器的空间磁场分布直接决定了力矩器的动态性能,对磁场进行准确分析是力矩器设计的前提。分析了悬线式力矩器的空间磁场产生机理,并采用有限元分析法进行了理论推导。以一款动线圈式二维对称型只读悬线式力矩器为例,采用有限元仿真软件（ANSYS）分析并设计了其空间磁场分布,对影响力矩器空间磁场分布的相关因素进行了分析。将采用有限元法对悬线式力矩器空间磁场仿真计算得出的力矩器动态特性参数与实测力矩器动态特性参数相比,其结果均符合力矩器的设计要求,证明基于有限元分析法的悬线式力矩器空间磁场设计是可行的。     

A novel drum piezoelectric-actuator

This paper presents a large displacement, piezoelectric-metal structure actuator, named the piezoelectric drum actuator. The drum actuator consists of a short, thick-walled steel cylinder sandwiched by two thin composite disks, which are fabricated from a brass disk bonded with a piezoceramic disk. The piezoceramic disk, which is polarized in its thickness direction, has a large diameter thickness ratio, producing a large radial displacement under an applied voltage in the thickness, leading to a large transverse deflection of the composite disks in the drum. The drum (outer diameter: 12.0 mm) has a displacement that is about eight times larger than that of a cymbal actuator made with the same ceramic material and comparable dimensions under the same dc driving voltage of 270 V. The drum actuator also showed a large resonance displacement of 56.7 μm under an ac voltage of 90 V. The effective piezoelectric charge coefficient d’₃₃ of the drum is about twice as large as that reported for the cymbal. PACS 77.65 -j; 85.50.+k; 43.38.fx     

Designing and manufacturing a piezoelectric tile for harvesting energy from footsteps

The objective of this research is to design a piezoelectric tile for harvesting energy from footsteps and to optimize the system for harvesting maximum energy. Because piezoelectric modules easily break when directly subjected to energy generated by human movements, we designed a tile that employs indirect energy transmission using springs and a tip mass. We aimed at matching the mechanical resonance frequency of the tile with that of the piezoelectric modules. The resonance frequency of a piezoelectric module with a 10-g tip mass was almost similar to the vibration frequency of the tile at 22.5 Hz when we dropped an 80-g steel ball from a 1-m height. We performed impedance matching and realized a matching value of 15 kΩ. Under these optimal mechanical and electrical conditions, we harvested 770-μW RMS and 55-mW peak output power.     

Vibration characteristics of a rotating flexible arm with ACLD treatment

In this paper, the vibration behavior and control of a clamped–free rotating flexible cantilever arm with fully covered active constrained layer damping (ACLD) treatment are investigated. The arm is rotating in a horizontal plane in which the gravitational effect and rotary inertia are neglected. The stress–strain relationship for the viscoelastic material (VEM) is described by a complex shear modulus while the shear deformations in the two piezoelectric layers are neglected. Hamilton's principle in conjunction with finite element method (FEM) is used to derive the non-linear coupled differential equations of motion and the associated boundary conditions that describe the rigid hub angle rotation, the arm transverse displacement and the axial deformations of the three-layer composite. This refined model takes into account the effects of centrifugal stiffening due to the rotation of the beam and the potential energies of the VEM due to extension and bending. Active controllers are designed with PD for the piezosensor and actuator. The vibration frequencies and damping factors of the closed-loop beam/ACLD system are obtained after solving the characteristic complex eigenvalue problem numerically. The effects of different rotating speed, thickness ratio and loss factor of the VEM as well as different controller gain on the damped frequency and damping ratio are presented. The results of this study will be useful in the design of adaptive and smart structures for vibration suppression and control in rotating structures such as rotorcraft blades or robotic arms.     

Design and vibration control of a notch-based compliant stage for display panel inspection applications

Both fast positioning and eliminating relative vibration between automatic optical inspection devices and the associated workpieces are critical for enhancing the throughput of product inspection. Both goals can be achieved by proper control of the stage where the camera is mounted. In this work, a one-dimensional compliant stage, consist of a notch-based structure and a mechanical amplifier, is designed and controlled for fulfilling the above mentioned goals. Essential finite element simulation and structural testing are performed to further characterize the structure and to obtain the system dynamics for controller design. The fundamental natural frequency of the designed stage is approximately 410 Hz and a displacement amplification ratio of 1.21 is achieved. The stage is actuated by a PI-843.40 piezoelectric actuator and the motion is monitored by an ASP-10-CTR capacitance probe. The entire signal acquisition and control are performed under a NI LabView environment using a NI cRIO-9014 FPGA real time controller, where both PID and sliding motion controllers are implemented. The results indicate that a close loop bandwidth of 12 Hz or 29 Hz and a steady state resolution of 50 nm can be achieved after PID or sliding mode control. With such a response, the motion induced vibration may be suppressed for subsequent automatic optical inspection and other applications such as coordinate measurement systems.     

Finite element modelling of piezolaminated smart structures for active vibration control with distributed sensors and actuators

Finite element modelling of laminated structures with distributed piezoelectric sensor and actuator layers and control electronics is considered in this paper. Beam, plate and shell type elements have been developed incorporating the stiffness, mass and electromechanical coupling effects of the piezoelectric laminates. The effects of temperature on the electrical and mechanical properties and the coupling between them are also taken into consideration in the finite element formulation. The piezoelectric beam element is based on Timoshenko beam theory. The plate/shell element is a nine-noded field-consistent element based on first order shear deformation theory. Constant-gain negative velocity feedback, Lyapunov feedback as well as a linear quadratic regulator (LQR) approach have been used for active vibration control with the structures subjected to impact, harmonic and random excitations. The influence of the pyroelectric effects on the vibration control performance is also investigated. The LQR approach is found to be more effective in vibration control with lesser peak voltages applied in the piezo actuator layers as in this case the control gains are obtained by minimizing a performance index. The application of these elements in high-performance, light-weight structural systems is highlighted.     

Analysis of a disk-type stator for the piezoelectric ultrasonic motor using impedance matrix

Impedance and admittance matrices of a piezoelectric annular actuator with segmented electrodes are presented for the analysis of the disk-type piezoelectric ultrasonic motors (USM). Equations of motion and the conjugate parameters for the impedance and admittance matrices are derived using the variational principle. In the derivation, the electric field in the piezoelectric layer is assumed to be constant over the area covered by a particular electrode, and the effects of both shear deformation and rotary inertia are taken into account. The resonance and antiresonance frequencies and the vibrating modes are calculated for the various resonance modes and boundary conditions, and the results are compared with those by the three-dimensional finite element methods. They are in excellent agreement with each other. It is expected that the derived impedance matrix can be effectively applied to the analysis and the design of the USM.     

Design and optimization of carbon nanotube/polymer actuator by using finite element analysis

In recent years,actuators based on carbon nanotube(CNT) or graphene demonstrate great potential applications in the fields of artificial muscles,smart switches,robotics,and so on.The electrothermal and photothermal bending actuators based on CNT/graphene and polymer composites show large bending actuations,which are superior to traditional thermaldriven actuators.However,the influence of material parameters(thickness,temperature change,etc.) on the actuation performance needs to be further studied,because it is a critical point to the design and fabrication of high-performance actuators.In this work,finite element analysis(EEA) is employed to simulate the actuation performance of CNT/polymer actuator,which has a bilayer structure.The main focus of this work is to design and to optimize material parameters by using computational method.FEA simulation results show that each layer thickness of actuator has an important influence on the actuation deformation.A maximum curvature of 2.7 cm~(-1) is obtained by simulation,which is much larger than most of the actuator curvature reported in previous experiments.What is more,larger temperature change and larger difference of coefficient of thermal expansion(CTE) between two layers will result in larger bending actuation.This study is expected to provide valuable theoretical reference for the design and realization of CNT-based thermal actuator with ultra-large actuation performance.     

幂函数型环形聚能器径向振动的等效电路

基于机电类比原理和变厚度薄圆环的平面应力方程,推导了幂函数型环形聚能器径向振动的等效电路、共振频率方程和位移放大系数。讨论了第一、二阶径向共振频率及相应的位移放大系数随圆环半径比的变化关系。结果表明,幂函数型环形聚能器径向振动的等效电路是一种非互易二端口等效网络;一阶和二阶共振频率随圆环内外半径比的增大而增大;一阶径向共振模式下位移放大系数随圆环半径比的增大先降低后升高,二阶径向共振模式下位移放大系数随圆环半径比的增大而降低,但二阶时的位移放大系数整体大于一阶,因此二阶径向共振模式具有更好的径向振动性能。用COMSOL有限元软件对解析理论分析结果进行了验证,仿真模拟结果与解析理论符合良好。根据幂函数型环形聚能器的等效电路模型,进一步设计了一种压电环形换能器,计算了第一、二阶径向共振频率、反共振频率及有效机电耦合系数,通过与COMSOL有限元软件模拟结果对比,符合良好。本文研究结果为幂函数型环形聚能器及压电环形换能器的工程应用提供了简明设计理论,文中研究结论可作为一种径向超声切割刀在超声工程中获得重要应用。      

Application of the FEM and the BEM to compute the field of a transducer mounted in a rigid baffle (3D case)

A three-dimensional finite element model has been developed which allows the harmonic analysis of a piezoelectric structure mounted on a rigid baffle and radiating into water. The solution of this problem consists of coupling a finite element method to a boundary element method. The first one enables the modelling of the vibrating structure and the second one the modelling of propagating waves in the semi-infinite fluid medium surrounding the structure. In this way, the near-field and the far-field pressures are calculated as well as the displacement field of the piezoelectric structure taking into account the acoustical interaction. Numerical and experimental results are provided which validate the numerical procedure. The good agreement obtained indicates that this three-dimensional model is a very useful tool to optimise the design of transducer arrays used in medical imaging.     

A piezoelectric bone-conduction bending hearing actuator

A prototype of a novel bone-conduction hearing actuator based on a piezoelectric bending actuator is presented. The device lies flat against the skull which would allow it to form the basis of a subcutaneous bone-anchored hearing aid. The actuator excites bending in bone through a local bending moment rather than the application of a point force as with conventional bone-anchored hearing aids. Through measurements of the cochlear velocity created by the actuator in embalmed human heads, the device is shown to exhibit high efficiency, making it a possible alternative to present-day electromagnetic bone-vibration actuators.     

A disk-pivot structure micro piezoelectric actuator using vibration mode B11

Micro piezoelectric actuator using vibration mode B(11) (B(mn), where m is the number of nodal circles, n is the nodal diameters) is designed. Different from conventional wobble-type ultrasonic motor using piezoelectric rod or cylinder, piezoelectric disc is used to excite wobble modes and metal cylinder stator is used to amplify the transverse displacement, metal rod rotor is actuated to rotate. The outer diameter of the actuator is 14mm. There are features such as low drive voltage, micromation, and convenient control of wobble state by modifying the structure of stator, etc. Finite element analysis (FEA) of the stator has been made. It is found that the resonant frequency of vibration mode B(11) is 49.03kHz, which is measured at 45.7kHz by the laser vibrometer and impedance analyzer. The rotation speed has been measured, which could be as high as 10,071rpm under an alternating current 100V. Such piezoelectric actuator can be optimized and adjusted to fit practical conditions. It can be applied in the fields of precise instrument, bioengineering and other micro actuator system.     

Finite element modelling of dielectric elastomer minimum energy structures

This paper presents an experimentally validated finite element model suitable for simulating the quasi-static behaviour of Dielectric Elastomer Minimum Energy Structure(s) (DEMES). A DEMES consists of a pre-stretched Dielectric Elastomer Actuator (DEA) adhered to a thin, flexible frame. The tension in the stretched membrane causes the frame to curl up, and when a voltage is applied, the frame returns to its initial planar state thus forming a useful bending actuator. The simulation method presented here incorporates a novel strain energy function suitable for simulating general DEA actuator elements. When compared against blocked force data from our previous work, the new model provides a good fit with an order of magnitude reduction in computational time. Furthermore, the model accurately matched experimental data on the free displacement of DEMES formed with non-equibiaxially pre-stretched VHB4905 membranes driven by 2500 V. Non-equibiaxially pre-stretching the membranes allowed control of effective frame stiffness and bending moment, this was exploited by using the model to optimise stroke at 2500 V in a hypothetical case study. Dielectric constant measurements for non-equibiaxially stretched VHB4905 are also presented.     

Investigation of scattering of elastic waves by cylinders in 1-3 piezocomposites

The scattering behavior of P-waves in piezoelectric composites with 1–3 connectivity is studied. The method of wave function expansion is adopted for the theoretical derivations. Analytical expressions are obtained for the distributions of mechanical displacement in z-direction along the circumferences of piezoelectric cylinders. These solutions are used to study the influence of each element of the stiffness matrix and the piezoelectric matrix on the various resonant modes of vibration. Numerical results obtained indicate that perturbations of the elements c₄₄ and e₁₅ significantly affect resonant frequencies and amplitudes, perturbations of c₁₁ and c₁₂ have pronounced effects on resonant modes of high frequencies also. However, the resonant modes are not so sensitive to the perturbations of c₁₃, e₃₁ and e₃₃. The dynamic characteristics of 1–3 connectivity piezoelectric composites exposed here are meaningful for the design and manufacture of sensor/actuator elements by this kind of composites as well as the on-line health monitoring of the mechanical properties variations of the composites itself.     

Identification of the piezoelectric material coefficients using the finite element method with an asymptotic waveform evaluation

A rapid identification of the piezoelectric material constants for a piezoelectric transducer is proposed. The validity of a three-dimensional finite element routine was confirmed experimentally. The asymptotic waveform evaluation (AWE) was adopted for a fast frequency sweep of the finite element analysis. The three-dimensional finite element method with an AWE and a design sensitivity method was used for a material inversion scheme of piezoelectric transducers. In order to confirm the inversion routine of the material constants, the mechanical displacements, which mean the mode shape, were calculated along the vertical and lateral position of the sample transducer.     

Identification of the piezoelectric material coefficients using the finite element method with an asymptotic waveform evaluation

A rapid identification of the piezoelectric material constants for a piezoelectric transducer is proposed. The validity of a three-dimensional finite element routine was confirmed experimentally. The asymptotic waveform evaluation (AWE) was adopted for a fast frequency sweep of the finite element analysis. The three-dimensional finite element method with an AWE and a design sensitivity method was used for a material inversion scheme of piezoelectric transducers. In order to confirm the inversion routine of the material constants, the mechanical displacements, which mean the mode shape, were calculated along the vertical and lateral position of the sample transducer.