基于迟滞非线性补偿系统的光学元件形貌检测

为了减少相移干涉仪中压电陶瓷致动器进行相移时,其迟滞非线性对相移算法中的相位计算带来的误差,设计了一套压电陶瓷致动器的控制系统.利用高精度电阻应变传感器和基于锁相放大原理的信号调理电路检测压电陶瓷致动器位移,建立多项式数学模型描述迟滞非线性,然后提出了一种前馈开环控制方法补偿其迟滞非线性.最后,基于所提出的方案对压电陶瓷致动器进行了期望轨迹的跟踪控制实验,同时将补偿控制系统与干涉仪相结合检测光学元件表面形貌.实验结果表明:补偿后,压电陶瓷致动器的跟踪误差在-0.156μm与+0.078μm之间,迟滞非线性度由10.4%降到2.4%,且干涉仪所测得的光学元件表面面形起伏高度均方根和峰谷分别改变了0.795nm和3.937nm.该系统对于高精度的光学元件形貌检测具有重要的意义.     

利用劳埃镜干涉测量压电陶瓷的压电系数

利用劳埃镜干涉测量了压电陶瓷的横向压电系数d31,将平面反射镜安装在压电陶瓷的一端,当压电陶瓷在外加横向电场的作用下产生微米量级的纵向形变时,劳埃镜干涉条纹间距将发生相应的变化,从而放大了压电陶瓷的微小形变.通过相机采集干涉条纹的位置与条纹间距的相关信息,并运用Matlab程序对其进行分析,得到压电陶瓷在不同驱动电压下对应的形变量,计算出该材料的压电系数.     

单面接线的厚度模压电换能器

常规的厚度模压电陶瓷换能器需要在压电陶瓷片的两个大面上接线.但是前表面的接线对于小换能器(直径小于1mm)和阵列换能器不利.两面接线还不便于批量生产,也不便于和匹配层的耦合.D.E.Laughlin等人1985年曾制作了如图1所示的小换能器.这种换能器的背电极分割成两半,分别连接电源的两极.前表面的电极不连线,与常规换能器不同,这种换能器工作时压电片的两半作反相振动,一半伸张时,另一半压缩;一半压缩时,另一半伸张.实测表明,这种换能器的声场由两个独立的声束组成(图2).     

用光纤光栅传感器研究压电陶瓷的特性

提出了一种利用光纤光栅传感器研究压电陶瓷特性的新方法.该方法采用非平衡Michelson扫描干涉仪对光纤光栅传感信号进行相位解调,通过观测波长漂移引起的相移,从而获得压电陶瓷的位移量与所加电压间的关系.实验分析了迟滞特性和蠕变现象,得到了压电陶瓷的电压-位移特性曲线以及蠕变特性曲线.实验表明,光源功率的波动对压电陶瓷迟滞特性不能造成影响且压电陶瓷的蠕变特性与电压方向无关.     

基于飞秒光频梳的压电陶瓷闭环位移控制系统

利用飞秒光频梳、外腔可调谐半导体激光器和法布里-珀罗干涉仪建立了一套压电陶瓷亚纳米级闭环位移控制系统. 将可调谐半导体激光器锁定至光频梳, 通过精确调谐光频梳的重复频率, 实现了半导体激光器在其工作频率范围内的精密调谐. 利用Pound-Drever-Hall锁定技术将带有压电陶瓷的法布里-珀罗腔锁定至半导体激光器, 进而通过频率发生系统控制压电陶瓷产生亚纳米级分辨率的位移. 实验研究发现锁定至光频梳后可调谐半导体激光器1 s的Allan标准偏差为1.68×10^-12, 将其在30.9496 GHz范围内进行连续闭环调谐, 可获得压电陶瓷的位移行程约为4.8 μm; 以3.75 Hz的步长扫描光频梳的重复频率, 实现了压电陶瓷的450 pm闭环位移分辨率并测定了压电陶瓷的磁滞特性曲线. 该系统不存在非线性测量误差, 且激光频率及压电陶瓷位移均溯源至铷钟频率源. 关键词： 光频梳 压电陶瓷 法布里-珀罗腔 可调谐半导体激光器     

一种在二步相移数字全息中实现准确相移的方法

相移数字全息中的相移准确性决定了重建结果的质量,本文提出了在二步相移数字全息中.实现准确相移的方法.该方法使用数字电压源开环控制普通的压电陶瓷微位移器,通过连续以微小的间隔来改变施加在压电陶瓷微位移器上的电压,可以获得一系列对应于不同相移角的全息图像,进而可以利用这些全息图像重建出来物光波在全息面上的强度分布.实验中采...     

低压微位移驱动电路及控制方法

讨论了低压微位移驱动电路及控制方法在光电轮廓仪上的运用。采用低压驱动电路驱动压电陶瓷相移器对参考光束进行相移，从而使仪器质量减轻、体积缩小、成本降低。在运用该电路时，为了解决压电陶瓷低电压区非线性误差大的问题，用PC计算机控制压电陶瓷上所加电压的电压值，由摄像头摄取图像并计算出干涉条纹的间隔，然后由PC计算机修改压电陶瓷上所加的电压值，直至干涉条纹相位差达到要求值。该方法的优点是：可消除压电陶瓷低压区的非线性误差，使得开环电路得到闭环的效果；可降低机械零部件的装配难度。     

脉冲电压上升沿对He大气压等离子体射流管内放电发展演化特性的影响

通过仿真和实验相结合的手段,以直流脉冲电压驱动的双环电极结构He大气压等离子体射流为例,研究了电压上升沿时间对管内放电等离子体发展演化特性的影响.随着电压上升沿的改变,管内介质阻挡放电(dielectric barrier discharge, DBD)区出现空心和实心两种放电模式.上升沿为纳秒和亚微秒量级时,以空心模式发展,上升沿持续增加后转变为实心模式.放电模式本质上受鞘层厚度、管内电场和表面电荷密度分布的影响,鞘层厚度小于1.8 mm时等离子体通常以空心模式传播,等于1.8 mm时等离子体的径向传播范围有限而转变为实心传播.管内DBD区,电场以轴向分量为主时,等离子体以放电起始时的模式传播;而在地电极内部,由于外施电场方向发生径向偏转,同时管壁沉积的正电荷形成径向自建电场,两者叠加形成的强径向电场致使放电以空心模式传播.     

压电条SH声辐射场研究

具有一定宽度和厚度的无穷长压电条置于均匀各向同性半空间上, 压电条在电激励下产生机械振动从而在整个空间产生声场. 将压电条取为6mm晶系, 其对称主轴沿长度方向. 针对这 种压电换能器结构, 深入研究了SH波的激发和辐射特性. 首先将压电条中的声场展开为傅里 叶级数, 而将压电条下的无界半空间中的声场展开为傅里叶积分, 然后根据边界条件得到了 整个空间中声场的求解方案, 通过数值模拟计算了声场的分布特性, 并和传统方法进行了定 量的对比和分析. 最后采用最陡下降法(鞍点法)研究并得到了压电条声辐射场的远场近似表 达式, 分析了声场的指向性规律. 结果表明只有当频率f和压电条宽度a的乘积 fa<1 kHz·m 时, 传统方法得到的结果是可靠的，当频率升高时，压电条内应力和位移呈振荡式分布，频率愈高振荡愈激烈，且与传统方法的差异愈大.本文对声学微系统与声传感器件的研究具有 重要意义. 关键词： 压电条 6mm晶系 表面位移 指向性因子     

随钻声波测井四极子发射换能器的设计*

提出一种基于金属基片结构的随钻四极子发射换能器,其一阶弯曲模式可用于随钻四极子声源。利用有限元法对该换能器进行了设计分析,结果表明在5kHz附近存在一阶弯曲振动模态,其径向位移分布及发射电压级响应均优于单纯的瓦片状压电阵子,非常适合随钻四极子工作频率及声场的测量需求。针对一阶弯曲振动模态,数值模拟了几何尺寸对换能器性能参数的影响。换能器谐振频率随着陶瓷片厚度、陶瓷片高度、陶瓷片张开角度、金属基片厚度的增大而升高。最大发射电压级幅值随着陶瓷片高度、陶瓷片张开角、金属片厚度的增大而升高;随着陶瓷片厚度的增大,最大发射电压级幅值先升高后逐渐降低。金属基片采用铝片可以使换能器有较大的发射功率。数值模拟结果可以对随钻声波测井仪四极子发射换能器的设计起到良好的指导作用。     

A novel drum piezoelectric-actuator

This paper presents a large displacement, piezoelectric-metal structure actuator, named the piezoelectric drum actuator. The drum actuator consists of a short, thick-walled steel cylinder sandwiched by two thin composite disks, which are fabricated from a brass disk bonded with a piezoceramic disk. The piezoceramic disk, which is polarized in its thickness direction, has a large diameter thickness ratio, producing a large radial displacement under an applied voltage in the thickness, leading to a large transverse deflection of the composite disks in the drum. The drum (outer diameter: 12.0 mm) has a displacement that is about eight times larger than that of a cymbal actuator made with the same ceramic material and comparable dimensions under the same dc driving voltage of 270 V. The drum actuator also showed a large resonance displacement of 56.7 μm under an ac voltage of 90 V. The effective piezoelectric charge coefficient d’₃₃ of the drum is about twice as large as that reported for the cymbal. PACS 77.65 -j; 85.50.+k; 43.38.fx     

基于虚拟仪器的压电陶瓷驱动技术研究

针对压电陶瓷驱动器的非线性应变,以压电陶瓷微位移驱动原理为基础,分析了扫频激光器腔长控制原理;在硬件时钟的定时下,分析了压电陶瓷的驱动特性,并通过调整驱动信号的步长电压来调节压电陶瓷的非线性。设计了基于虚拟仪器的控制系统,并对线性化方法进行了原理分析和实验。实验结果表明,该测量系统可以使压电陶瓷在其伸长范围内线性地伸长。     

Exploitation of inter-track interference in a shingled replay system

The expected increase in areal density in hard drives will require very narrow tracks. Tracks which are of a similar width to the read head and which are not separated by guardbands normally suffer from large inter-track interference (ITI) or crosstalk. Here, we show that it is possible to read from tracks which are not separated by guardbands and that are narrower than the head. In addition to the significant increase in areal density obtainable by reducing the unrecorded area of the disk and narrowing the tracks, such a system would also lead to a decrease in data retrieval times. We have identified across-track magnetization constraints for future coding across three adjacent tracks so that it will be possible to read from tracks which are only 73% as wide as the read head. Reading from tracks not separated by guardbands which have been written under these constraints yields an increase in track density of at least 47% greater than that possible in conventional drives.     

Thin-disk piezoceramic ultrasonic motor. Part I: design and performance evaluation

The purpose of this study is to gain the knowledge and experience in the design of thin-disk piezoceramic-driving ultrasonic actuator dedicated. In this paper, the design and construction of an innovative ultrasonic actuator is developed as a stator, which is a composite structure consisting of piezoceramic (PZT) membrane bonded on a metal sheet. Such a concentric PZT structure possesses the electrical and mechanical coupling characteristics in flexural wave. The driving ability of the actuator comes from the mechanical vibration of extension and shrinkage of a metal sheet due to the converse piezoelectric effect, corresponding to the frequency of a single-phase AC power. By applying the constraints on the specific geometry positions on the metal sheet, the various behaviors of flexural waves have been at the different directions. The rotor is impelled by the actuator with rotational speeds of 600 rpm in maximum using a friction-contact mechanism. Very high actuating and braking abilities are obtained. This simple and inexpensive structure of actuator demonstrates that the mechanical design of actuator and rotor could be done separately and flexibly according to the requirements for various applications. And, its running accuracy and positioning precision are described in Part II.A closed loop servo positioning control i.e. sliding mode control (SMC) is used to compensate automatically for nonlinearly mechanical behaviors such as dry friction, ultrasonic vibrating, slip-stick phenomena. Additionally, SMC scheme has been successfully applied to position tracking to prove the excellent robust performance in noise rejection.     

Finite element analysis of piezoelectric actuator with PMN–PT single crystals for nanopositioning

A piezoelectric bending actuator has been used widely in areas related to precision position controlling, loudspeakers, and pressure sensing. In this paper, a fine focusing actuator is designed using a computer aided design tools, Solid Works 2004, for an optical disk drive pick-up system. The finite element analyses are performed with the software COSMOS Work 2004 and the ANSYS 5.7. The tip displacement of the piezoelectric bending actuator with PMN-PT single crystals is 46 μm at 10 V. It is 15 times larger than tip displacement of PZT ceramics for the same design. The tip displacement obtained from the finite element analyses agrees with the measured data very well.     

Design and calibration of a piezoelectric actuator for interferometric applications

The present work reports a possible solution for a low-cost piezoelectric actuator available for interferometric applications. In the paper the design, the assembly and the calibration of the actuator are described in detail.

The solution adopted consists of a machined stainless steel case deformed by three low-voltage multilayer plumbum zirconate titanate (PZT) ceramic blocks. In the proposed arrangement a three degree of freedom device is obtained, by which a translation and two rotations can be performed.

The PZTs are driven by a supply voltage provided by a 16 bit D/A converter directly connected to the parallel port of a personal computer which guarantees a very accurate output. This voltage is applied on each ceramic by means of a variable resistor, by which it is possible to adjust the maximum driving voltage for the single block. This electrical solution allows to match up the strokes of the ceramics in order to obtain a straight expansion of the whole actuator.

After the mechanical and electrical set-up of the actuator, a static calibration was carried out by inserting it along one arm of a Michelson speckle interferometer. The calibration procedure had emphasized the hysteresis loop and the non-linearity of the electromechanical behaviour of the actuator.     

Numerical investigation of airflow inside a 1-in hard disk drive

The increasing application of the hard disk drive in consumer electronic devices has pushed the usage of the small form factor hard drives. At the same time, the data storage industry continues to enhance the capacity and performance of computer hard disk drive. The concerns of track mis-registration caused by various runout still remain with the form factor change. The objective of the current study is to numerically investigate the airflow characteristic inside a 1 in hard disk drive.     

230 MeV超导回旋加速器磁场调节棒驱动系统研制

在230 MeV超导回旋加速器中,磁场调节棒及其驱动系统是束流调试的重要辅助装置。为满足束流对中和束流引出所需的磁场,设计并研制了16套磁场调节棒及其驱动装置。机械执行机构采用美国Thomson公司的精密直线执行器,其重复定位精度为±0.01 mm,位置传感器采用德国Novotechnik公司的直线位移电子尺,其重复精度为0.002 mm。此外,运动控制采用PLC加直线位移传感器负反馈闭环的方案。在实际工况下,系统定位精度达到0.05 mm,重复精度达到±0.02 mm,优于设计要求。此外,对该系统进行了静电放电测试、电快速瞬变脉冲群测试和浪涌抗扰度测试,结果满足医用电气设备电磁兼容标准YY 0505-2012/IEC 6060 1-1-2:2004的要求。该驱动系统的研制,克服了在强电离辐射、高磁场强度、狭小安装空间的特殊环境中达到高定位精度和高重复精度的难点,对优化束流的径向进动、减小加速区域的相干振荡振幅、提高引出区的束流引出效率等具有重要意义。     

基于单神经元PID控制器的压电陶瓷控制方法

卫星地面综合测试是卫星研制过程中的重要环节,对系统功能验证及性能评估具有重要作用。传统的卫星地面综合测试系统存在研制周期长、投入较大、自动化流程不够完整、可重用性较差等不足。而北斗导航卫星地面综合测试系统采用分布式、高实时性、可配置、多主机的集成体系结构,是集计算机通讯、实时控制、实时数据处理、事后分析等功能于一体的测试系统,适用于从卫星总装集成到发射各个阶段的电气测试。通过卫星系统级的各项接口、功能、性能指标测试,表明该系统满足支持系统论证、状态确认、问题排查等测试需求,有力支撑了北斗导航卫星的成功发射和在轨运行。     

Dynamic properties of an omni-directional piezoelectric motor for precision position control

A piezoelectric motor capable of omni-directional movements has been developed to apply for robot joints, eyes, and precision positioning stage. The piezoelectric actuator has a simple structure of a cone type consisting of two piezoelectric ring-typed ceramics with electrodes divided into four segments and stainless steel elastic bodies. Before manufacturing the piezoelectric motor, the admittance characteristics and displacements of the actuator as a function of frequency were simulated. Elliptical motions of the actuator were created at several frequencies between the longitudinal and transverse resonance frequencies. The actual motor with alumina ball exhibited nice performance using a driving circuit with two rotary encoders and a PID controller. The moving element was omni-directionally operated at a driving frequency of 53.8 kHz and an output voltage of 280 V_p-p. The developed motor enables the moving element to move to a desired position with a resolution of 1.2°/pulse, an angular velocity of 4 rad/s, and a thrust force of 200 g.