斜辐照激光等离子体辐射X光子特性

 在神光Ⅱ高功率激光装置上,实验研究了激光斜辐照形成的激光等离子体辐射X射线光子的特性及真空喷射热等离子体流的方向。采用针孔X射线相机测量了钕玻璃激光（基频1.053 μm）辐照铝靶形成的激光铝等离子体辐射的X射线光子的空间分布,并针对正入射和入射激光斜辐照情况下测得的X射线光子量及特性进行了分析和比较。结果发现：入射激光斜辐照固体平面靶产生的向真空喷射热等离子体流的方向是垂直靶面（即法线方向）;正入射和斜入射激光叠加驱动靶时,一定程度上能改善激光辐照的均匀性,但等离子体源辐射的X射线光子数并未发现显著地增加;当激光斜辐照与靶相互作用时,激光能量被等离子体吸收下降。     

激光功率密度对Al膜靶后表面快电子发射的影响

 报道了在20 TW皮秒激光器上完成的p偏振激光与等离子体相互作用过程中产生的快电子的角分布和能谱测量结果。实验得到：当激光功率密度小于10¹⁷ W/cm²时,电子发射没有明显定向性,在激光入射面内多峰发射;当激光功率密度大于10¹⁷ W/cm2,小于10¹⁸ W/cm²时,电子主要沿靶面法线方向发射;当激光功率密度达到相对论强度时,电子主要沿激光传播方向发射;激光功率密度未达到相对论强度时,靶后表面法线方向快电子能谱拟合平均温度符合共振吸收温度定标率;激光功率密度达相对论强度以上时,靶后表面法线方向快电子能谱拟合平均温度高于已有的温度定标率。     

利用H_β线的Stark加宽计算激光诱导Cu等离子体的电子密度

在潮湿空气中,用Nd:YAG脉冲激光器产生的1.06 μm激光烧蚀金属Cu靶产生等离子体,并观测了其空间分辨的发射光谱.依据光谱线波长、相对强度等参数估算了沿靶面法线不同位置等离子体的电子温度.在此基础上,由H_β线的Stark加宽、分别用三种方法计算得到等离子体的电子密度.讨论了电子温度和电子密度沿靶面法线的空间分布特征.结果分析表明:利用环境气体的谱线测量复杂元素等离子体电子密度的方法是可行的.在距离靶面1.0 mm的空间位置附近电子温度骤然降低、电子密度具有最大值的现象可以从激光诱导等离子体产生机制的角度得到定性解释.     

热阻塞效应对激光辐照靶材烧蚀过程的影响分析

研究了百兆瓦级激光烧蚀碳/碳复合材料靶材产生的等离子体吸收激光束能量引起的热阻塞效应。首先,基于逆轫致吸收理论,建立了激光在烧蚀靶材产生的等离子体中的传播模型;然后,基于磁流体理论,得到了等离子体在百兆瓦级激光形成的电磁场中的波动方程,建立了等离子体吸收激光能量引起热阻塞效应的模型。最后,对烧蚀过程中粒子的总密度、吸收系数、靶材表面等效热流随激光持续时间的变化规律以及是否考虑热阻塞效应时,靶面垂直方向的温度场进行了数值模拟。结果表明:等离子体的形成,对激光形成了明显的热阻塞效应,削弱了激光对靶材的烧蚀作用,使粒子总密度、吸收系数、靶材表面等效热流以及靶面垂直方向温度场的变化均呈现为非线性。     

基于双相延迟模型的飞秒激光烧蚀金属模型

为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.     

斜入射激光驱动的冲击波在样品中传播特性的实验研究

在“神光-Ⅱ”高功率激光装置上，利用弯折靶、双台阶靶实验及通过对等离子体喷射状态的实验测量，研究了激光斜入射情况驱动的冲击波传播特性.结果表明，即使在大角度(约45°)斜入射的激光驱动下，靶材料中的冲击波依然是沿着靶面法线方向传播的，并能形成很好的一维正击波. 关键词： 斜入射 冲击波 弯折靶 双台阶靶 激光状态方程     

激光烧蚀掺杂金属聚合物羽流屏蔽特性数值研究

激光烧蚀推进中,烧蚀羽流对入射激光的屏蔽效应是影响推进性能的重要因素;当采用掺杂金属聚合物作为工质时,易电离金属掺杂物的引入,使屏蔽效应更加明显.本文建立了激光烧蚀掺杂金属聚合物羽流飞散及电离、屏蔽模型,计算了3—40 J/cm~2激光烧蚀掺杂微米铝颗粒聚甲醛工质的比冲,与实验数据对比表明模型能够有效模拟掺杂聚合物羽流的屏蔽特性.获得了不同激光能量密度下的电子数密度、吸收系数分布及屏蔽系数时间变化曲线.结果表明:低激光能量密度(5 J/cm~2)时,羽流屏蔽效应以未完全分解聚合物短链对入射激光能量的吸收为主;高激光能量密度(20 J/cm~2)下,羽流电子数密度逐步增大至1020m~(-3),形成明显的等离子体吸收,屏蔽系数的时间变化特征复杂.本文对掺杂金属聚合物烧蚀羽流的屏蔽特性进行了定量研究,可为激光烧蚀推进性能优化提供参考.     

Compton散射下的强激光等离子体冲击波对固体的热烧蚀效应

应用多光子非线性Compton散射理论,研究了Compton散射下的强激光等离子体冲击波对固体的热烧蚀效应,给出了冲击波功率密度与靶材熔化温度及沸腾温度与加热时间的表达式,得到了冲击波照射靶材烧蚀孔的最佳实验条件。结果表明：固体的生热率提高,温度分布发生变化,作用点达到熔化和沸腾温度所需时间和功率比无散射时小。当冲击波能量为250J,到靶面的距离为70~80mm时,对靶材烧蚀孔的效果较好。当时间为1.2~3.6ms,到靶面的距离为28~80mm时,烧蚀效果较好;当能量密度为400~2800J•cm-2时,烧蚀深度成较差的线性增加,功率密度与烧蚀斑尺寸近乎成反比。     

掺杂红外染料聚叠氮缩水甘油醚工质激光烧蚀推进性能优化探索

选择含能聚合物聚叠氮缩水甘油醚(GAP)作为激光烧蚀微推力器的工质,分析了红外染料掺杂对激光烧蚀GAP工质推进性能的影响.通过对比掺杂红外染料GAP在不同激光功率密度、掺杂浓度、靶材厚度和激光烧蚀模式下的推进性能数据和烧蚀羽流,初步探索了掺杂红外染料GAP工质的推进性能优化方式.实验结果表明:透射式激光烧蚀模式下,激光能量的指数衰减特性和掺杂红外染料GAP的强黏性使得烧蚀羽流中易存在未充分烧蚀的工质; GAP的推进性能受红外染料掺杂浓度和靶材厚度的综合影响,当靶材厚度与激光吸收深度接近时,靶材充分吸收激光能量使中心烧蚀区达到化学能释放的温度阈值,同时沿激光传播方向未充分烧蚀的质量最少,此时推进性能达到最优值.反射式下掺杂红外染料的聚合物的激光烧蚀过程遵循"先吸收激光能量先喷射"的规律,工质分解充分,推进性能优于透射式.     

激光诱导Al等离子体在背景气体中的流体现象

调Q-YAG脉冲激光（波长1.06μm,脉宽10ns,能量为250mJ/pu1se）烧蚀Al靶,用短焦距照相系统和光学多道分析仪（OMA）记录了等离子体在氩气背景气体及不同压强下所呈现的流体现象及其等离子体辐射的空间分辨光谱。实验发现,当背景气压为400Pa以下时,在靶面上存在一个明亮的发光球体,球体直径远大于激光烧蚀斑的大小,此球体向四周辐射等离子体光谱,只是在垂直靶面的方向辐射相对较强。在气压约为400Pa,等离子体辐射才以较为明显的羽状体形态向前喷散,且随气压增高,喷散的立体角变小。随着背景气压的继续升高,等离子体羽被压缩,成为一个明亮的发光小羽状体,当气压达20～30kPa,发光羽状体开始出现分解的迹象,在羽状体前端形成一个光球。气压继续升高,等离子体羽完全变成一串发光球。离开靶面越远,发光球的半径越大。用光学多道分析系统分析这些发光球的光谱特征,发现在靶面附近主要是Al等离子体的谱线,而较远的发光球,其主要谱线则来自背景气体。在气压为20kPa左右,等离子休羽呈现烧蚀点为明亮的白色亮点,而羽端为鲜艳绿色（氩的514nm）的彩色羽。     

Experimental investigation of plume expansion dynamics of nanosecond laser ablated Al with small incident angle

Experimental study of expansion dynamics of pulsed-laser ablation plasmas from Al is presented. A systematic investigation of plasma plume expansion is done. The laser beam is focused on the target with an incident angle between 0° and 20°. The results show that the plume growth is almost normal to the target surface, irrespective of the incident angle of the laser. Besides, the time evolution of the plasma plume geometry ratio at different incident angles shows that the incident angle of laser beam influences very slightly its shape at later delay time. The results imply that when the incident angle is small (ranging from 0° to 20°), the influence of the incident angle on the plume expansion is rather trivial.     

Characterization of aerosol plumes in nanosecond laser ablation of molecular solids at atmospheric pressure

Ablation of molecular solids with pulsed ultraviolet lasers at atmospheric pressure is an important process in (bio-)organic mass spectrometry. Of practical importance for analytical sampling and analysis are the plume formation and expansion. Plumes formed by atmospheric-pressure laser ablation of anthracene and 2,5-dihydroxybenzoic acid (2,5-DHB) were studied by light scattering imaging, which showed significant material release in the form of aerosols. The monitored plume expansion dynamics could be fitted to the drag-force model, yielding initial plume velocities of 150 m/s for anthracene and 43 m/s for DHB. While the angle of incidence does not affect the plume direction and propagation, a large dependence of the plume-expansion velocity on the laser pulse energy could be found, which is limited at atmospheric pressure by the onset of plasma shielding. With respect to analytical applications, the efficiency of sampling of the laser ablation products by a capillary could be experimentally visualized.     

Ionization effect to plasma expansion study during nanosecond pulsed laser deposition

The dynamic characteristic and effects of plasma play an important role in film growth process of pulsed laser deposition (PLD). Based on numerical hydrodynamic modeling, supposed the laser radiation and partial ionization of the plasma as a dynamic source, we deduce a set of new plasma expansion dynamics equations. Based on which, as an example of carbon target, using finite difference method, the plasma flow dynamics evolvement in vacuum is investigated. Our results show the dynamic partial ionization increases the expansion in all directions, which changes into a new dynamic source for plasma expansion. In the axial direction, because of the collisional interactions between particles, the plume density peak is in the vicinity of the target surface and the acceleration of plasma occurs mainly near the target surface too. In the transverse direction, the plume peak is not near the target, but at the surface. The space expansion distance is far less than the axial direction because there is no high initial velocity component in this direction. The predictions of the plasma expansion action based on the proposed dynamics source assumption are found to be in agreement with the experimental observation.     

Bi靶激光等离子体极紫外光源以及碎屑辐射特性研究

激光等离子体极紫外光源具有体积小、稳定性高和输出波长可调节等优势,在极紫外光刻领域发挥着重要的作用。Bi靶激光等离子体极紫外光源在波长9～17 nm范围内具有较宽的光谱,可应用于制造极紫外光刻机过程中所需的极紫外计量学领域。利用平像场光谱仪和法拉第杯对Bi靶激光等离子体极紫外光源以及离子碎屑辐射特性进行了实验研究。在单脉冲激光打靶条件下,实验中观察到Bi靶激光等离子极紫外光谱在波长12.3 nm处出现了一个明显的凹陷,其对应着Si L-edge的吸收,是Bi元素光谱的固有属性。相应地在波长为11.8和12.5 nm位置处产生了两个宽带的辐射峰。研究了两波长光谱特性以及辐射强度随激光功率密度的变化。结果表明,在改变聚焦光斑大小实现不同激光功率密度（0.7×1010～3.1×1010 W·cm-2）过程中,当功率密度为2.0×1010 W·cm-2时两波长处的光辐射最强,其原因归结为Bi靶极紫外光辐射强度受激光能量用于支撑等离子膨胀的损失和极紫外光被等离子体再吸收之间的平衡制约所致。在改变激光能量实现不同激光功率密度过程中,由于烧蚀材料和产生两波长所需高阶离子随着功率密度的增加而增加,增强了两波长处的光辐射。进一步,研究了双脉冲激光对Bi靶极紫外光谱辐射特性影响,实验发现双脉冲打靶下原来在单脉冲打靶时出现在波长13～14 nm范围内的凹陷消失。最后,对单脉冲激光作用Bi靶产生极紫外光源碎屑角分布进行了测量。结果表明,当探测方向从靶面法线方向移动到沿着靶面方向上的过程中,探测到Bi离子动能依次减小,并且离子动能随激光脉冲能量降低而呈线性减小。此项研究有望为我国在研制极紫外光刻机过程所需的计量学领域提供技术支持和打下夯实的基础。     

The absorption of incident beams during laser drilling of metals

Laser produced plasma plays an important role in the laser drilling of sheet metals as it can partially block and absorb the incident laser beam. A previous study of the transient properties of charged particles in the plasma plume has shown that, at low electron densities with high electron temperatures, laser drilling improves. This suggests that measurement of the absorption of the plasma plume is essential.The present study covers measurement of the absorption of a HeNe beam passing transversely through the plasma plume. The measurement was carried out using two fast response photodiodes and was repeated for sub-atmospheric pressures of air.The results obtained show that drilling is best at a pressure of 200 torr (2.7 x 10⁴ Pa) and rapid expansion of the flares is favourable at 2 mm above the surface. Coupling of absorption and heating is also best at this pressure.     

Dynamics of femtosecond laser-produced plasma ions

We investigated the ion laser-produced plasma plume generated during ultrafast laser ablation of copper and silicon targets in high vacuum. The ablation plasma was induced by ≈50 fs, 800 nm Ti:Sa laser pulses irradiating the target surface at an angle of 45°. An ion probe was used to investigate the time-of-flight profiles of the emitted ions in a laser fluence range from the ablation threshold up to ≈10 J/cm². The angular distribution of the ion flux and average velocity of the produced ions were studied by moving the ion probe on a circle around the ablation spot. The angular distribution of the ion flux is well described by an adiabatic and isentropic model of expansion of a plume produced by laser ablation of solid targets. The angular distribution of the ion flux narrows as the laser pulse fluence increases. Moreover, the ion average velocity reaches values of several tens of km/s, evidencing the presence of ions with kinetic energy of several hundred eV. Finally, the ion flux energy is confined in a narrow angular region around the target normal.     

Laser ablation of silicon and copper targets. Experimental and finite elements studies

The ablation process induced by excimer lasers is a collective phenomenon that basically involves two phenomena: the laser radiation–matter interaction and the dynamic of the ablation plume. The laser parameters, the thermal and optical properties of the material, and the surface morphology are critical factors in the ablation mechanisms affecting the direction of the ablation plume expansion. In this study, the role of the surface roughness and the evolution of its morphology under the laser irradiation were investigated. Assuming a thermal ablation model, a theoretical study of the initial steps of the laser ablation process by a finite element method using ANSYS (6.1) was performed. Different ablation experiments were carried out on silicon and copper targets using a XeCl laser. The target surface morphology changes were observed by SEM and the plume deflection was recorded by a digital camera. An acceptable agreement between the experimental and simulated results was found. This study contributes to a better understanding of the physical processes involved in the laser ablation and the relations between the plume deflection angle and the surface roughness. PACS 79.20.Ds; 81.40.Gh; 44.05.+e     

cm级空间碎片的激光清除过程分析

为了研究高能激光对cm级空间碎片的清除过程,通过分析空间碎片在激光作用下的变轨过程,建立了物理模型;数值模拟了空间碎片在激光作用下烧蚀反喷进入大气层烧毁的过程。结果表明:空间碎片运行速度与速度增量之间的夹角大于90,才能满足进入大气层烧毁的条件;cm级空间碎片的清除,需要105 W以上的高功率激光器。     

激光辐照铝靶汽化过程的高速纹影诊断技术

应用高速纹影系统记录激光束辐照在Ly12铝靶时所产生的汽化羽扩张、空气爆炸波、熔融物质喷溅以及穿靶等现象.并由扫描摄影记录的轨迹图测出汽化羽的扩张速度为150～190m/s,空气冲击波速度为450～500m/s,靶表面高压蒸汽速度为5～7.8km/s。     

Particles formation in an expanding plasma

Interaction of a laser beam with a target generates a high velocity expanding plasma plume, solid debris and liquid nano- and microparticles. They are produced from plasma recombination and vapor condensation and can be deposited on optical elements located nearby the target. Two distinct kinds of particles were observed depending on the temperature achieved in the plasma plume: large micrometer-size fragments for temperatures lower than the critical temperature, and very small nanometer-size particles for higher temperatures. The paper presents experimental observations of fragments and nanoparticles in plasma plumes and a comparison with models.