声表面波气相色谱快速定性分析姜黄挥发油*

应用声表面波气相色谱快速定性分析姜黄挥发油。声表面波气相色谱采用DB-5毛细管色谱柱,初始温度45℃,6℃/s程序升温至160℃,检测结果与气相色谱质谱结果进行比较。姜黄挥发油定性分析中, 声表面波气相色谱20s完成检测,而气相色谱-质谱需要30min完成,声表面波气相色谱检测更高效;同时,声表面波气相色谱与气相色谱质谱共同检测出姜黄挥发油中10种化学成分,且10种化学成分相对百分含量总和占挥发油总成分的90%以上,由于色谱柱长度区别,声表面波气相色谱检出的化学成分相对较少;定量分析中,对声表面波气相色谱进样方式进行了考察,顶空进样与液体进样对化学成分相对百分含量检测有较大差异;采用与气相色谱质谱一致的液体进样方式,对姜黄挥发油中反式石竹烯定量分析,声表面波气相色谱最低检出限可以达到16.9 pg,在0.001624~0.01624 mg/mL范围内R=0.9976具有较好的线性关系,且精密度和重复性较好。声表面波气相色谱能够用于姜黄挥发油的快速定性和定量分析,为中药挥发油的分析提供了新的快捷的检测技术基础。     

声表面波气相色谱仪快速定性分析姜黄挥发油

应用声表面波气相色谱仪快速定性分析姜黄挥发油。声表面波气相色谱仪采用DB-5毛细管色谱柱,初始温度45℃,按6℃/s程序升温至160℃,将检测结果与气相色谱-质谱仪结果进行比较。在姜黄挥发油定性分析中,声表面波气相色谱仪20 s完成检测,而气相色谱-质谱仪需要30 min完成,声表面波气相色谱仪检测更高效;同时,声表面波气相色谱仪与气相色谱-质谱仪共同检测出姜黄挥发油中10种化学成分,且10种化学成分相对百分含量总和占挥发油总成分的90%以上,由于色谱柱长度区别,声表面波气相色谱仪检出的化学成分相对较少;定量分析中,对声表面波气相色谱仪进样方式进行了考察,顶空进样与液体进样对化学成分相对百分含量检测有较大差异;采用与气相色谱-质谱仪一致的液体进样方式,对姜黄挥发油中反式石竹烯定量分析,声表面波气相色谱仪最低检出限可以达到16.9 pg,在0.001624～0.01624 mg/mL范围内R=0.9976具有较好的线性关系,且精密度和重复性较好。声表面波气相色谱仪能够用于姜黄挥发油的快速定性和定量分析,为中药挥发油的分析提供了新的快捷的检测技术基础。     

新型成膜法的SAW气体传感器聚合物膜的粘弹性分析

分析了一种基于自组装和分子印迹技术的声表面波气体传感器的响应模型。首先利用Martin理论和Auld的摄动方法分析金膜对于声表面波的扰动效应,然后将其扩展至覆盖于金膜上的聚合物膜对于声波的扰动分析。以剪切模量的实部为参量,可以将聚合物分为三种状态,即玻璃状膜、玻璃状-橡胶态膜和橡胶态膜。最后模拟分析了聚合物膜对于气体的吸附特性。结果表明由于聚合物膜的粘弹特性,传感器响应与其工作频率并不完全呈线性。通过实验获得了不同膜厚的采用新型成膜方法的聚合物对SAW的扰动效应并与理论计算结果进行对比,结果显示相对不考虑活性表面金膜的Martin理论,对于衰减扰动的分析与实验结果更加一致。但是对速度的扰动与实验结果有一定偏差。另外还模拟了基于新型成膜方式的气体传感器聚合物敏感膜对于气体的吸附效应,结果显示对于玻璃状膜,传感器的响应随着敏感膜厚的增加而递增,并与气体浓度呈现良好的线性特性,但是对于橡胶态膜,传感器灵敏度与膜厚之间的关系相对复杂。     

一种高灵敏度的桥型声表面波应变传感器*

为了提高声表面波传感器应变灵敏度,该文提出了一种桥型声表面波应变传感器。首先根据受压弯曲构件中应变分布特点设计了桥型声表面波应变传感器,并建立有限元模型,结合微扰法分析了桥型结构几何参数与声表面波应变传感器灵敏度的关系。根据分析结果确定桥型声表面波应变传感器几何结构参数,并与传统声表面波应变传感器的应变灵敏度进行了对比研究,在此基础上搭建受压弯曲微动平台开展实验研究,结果表明:在直梁构件受压弯曲应变测量时,Y34°切向的桥型声表面波应变传感器的应变灵敏度为1692 Hz/με,传统声表面波传感器应变灵敏度为1328 Hz/με,桥型声表面波应变传感器的应变灵敏度较传统声表面波应变传感器有明显提高。     

谐振式检测器指条厚度对质量型声表面波传感器灵敏度的影响

研究了谐振器指条厚度对质量型声表面波传感器灵敏度的影响.利用耦合模方程推导出耦合模参量与周期栅阵禁带边界频率的关系,结合有限元及P矩阵模型,获得了声表面波传感器灵敏度随指条厚度的变化关系。制备3种不同铝指条厚度(1600?,1900?,3100?)的声表面波谐振器,通过对其表面中心区域沉积SiO_2层验证了计算结果。结果表明:采用ST-X石英基底的声表面波谐振器对SiO_2负载检测时,传感器的灵敏度随铝指条厚度的增加先变大后减小,最优归一化指条厚度为1.9%。分析表明,指条厚度对传感器灵敏度的影响主要来自于传播速度和耦合系数的共同作用,通过优化指条厚度的方法可改善传感器的灵敏度.     

基于指条厚度优化的冷凝式SAW气体传感器灵敏度提升方法

该文通过对声表面波谐振器指条厚度的优化提升了冷凝式气体传感器的灵敏度。基于流固耦合理论,利用有限元商业软件建立了有液膜负载和无液膜负载下的多物理场三维周期模型,并提取了相应的耦合模参量,利用耦合模模型及P矩阵级联技术,计算了不同指条厚度下液膜负载引起的传感器响应,获得了冷凝式声表面波气体传感器灵敏度随指条厚度的变化关系。实验中制备了6种不同电极厚度的声表面波谐振器,并利用甲基膦酸二甲酯实验样品完成了传感器的响应测试,验证了理论分析的正确性。结果表明,冷凝式声表面波气体传感器的灵敏度随指条厚度的增加先变大后减小,最优归一化电极厚度为6.4%～7.6%之间。该研究结果对进一步提升传感器灵敏度具有重要意义。     

新型声表面波电流传感器*

将声表面波技术的快速响应特点与磁致伸缩薄膜的高磁敏特点相结合,可实现一种快速、高灵敏、稳定可靠的新型电流检测技术。传感器由双通道差分式振荡器与沉积在传感通道器件表面的声传播路径上的磁致伸缩薄膜组成。该文基于分层介质中声传播理论及磁致伸缩效应,对声表面波电流传感机理进行了分析,以实现对传感器结构的优化设计。实验研制了采用铁钴(FeCo)薄膜的声表面波电流传感器,测试结果表明,该传感器具有快速响应和高灵敏特点。为抑制磁致伸缩薄膜自身的剩磁效应所带来的高磁滞误差,采用的有效途径是将沉积的磁致伸缩薄膜进行图形化设计。实验结果表明,采用栅阵化FeCo薄膜结构的传感器表现出更高检测灵敏度、更好线性及更低的磁滞误差。     

声表面波梁式加速度传感器的优化设计

为获得传感器的优化设计,对一种声表面波梁式加速度传感器敏感机理进行了研究。从声波波动方程出发,结合有限元分析以及微扰理论对加速度作用力作用下声表面波传播特性进行分析,以此构建梁式声表面波加速度传感器敏感机理的理论模型,特别分析了压电梁材料及几何结构、振子质量对传感响应的贡献以确定传感器优化的几何参数。为验证理论分析结果,实验研制了基于ST-X石英悬臂梁结构的差分振荡式声表面波加速度传感器,并利用精密振动台对所研制传感器性能进行评价。实验结果显示,在给定加速度测试范围内,采用ST-X石英梁并延长梁长度、降低梁厚度以及采用较大的阵子质量将有效的改善传感器检测灵敏度,在±2 g范围内加速度灵敏度可达27 k Hz/g,且实验结果很好的验证了理论模型。     

声表面波生物传感器质量灵敏度的理论与实验验证

针对声表面波传感器在生物检测中的性能评价与优化,提出一种快捷验证适用于生物传感器的声表面波器件质量负载灵敏度的实时检测方法.首先基于二维近似假设和周期性边界条件,建立了以石英为压电基底材料、SiO2为波导层的Love波传感器的三维有限元分析模型,从理论上验证了波导层对Love波传感器灵敏度的影响.在实验上,通过MEMS...     

声表面波气相色谱仪在禁毒工作中的应用初探*

声表面波气相色谱仪具有灵敏度高、色谱柱升温速度快(～20℃/s)、体积小等特点,可实现痕量气体的广谱(挥发和半挥发性有机物)、快速(5 min)、高灵敏度(ppb～ppt级)现场分析,可应用于地下制毒工场/窝点探查、毒驾与吸毒人员筛查等方面。该文介绍了该课题组在甲基苯丙胺(冰毒)检测、羟亚胺制作窝点现场检测方面的研究进展。     

谐振式检测器谐振腔对声表面波气相色谱仪灵敏度的影响

研究了谐振式检测器谐振腔对声表面波气相色谱仪灵敏度的影响。构建无液膜负载和有液膜负载下压电基片和金属指条结构的三维有限元模型,利用有限元方法提取不同周期结构的耦合模参量,结合P矩阵级联技术,推导出传感器灵敏度随检测器腔体结构改变的变化关系。实验制备了两种三换能器结构的声表面波谐振器,其输入换能器与输出换能器间距离分别为22.25倍波长和1.25倍波长,通过测试甲基膦酸二甲酯气体,验证理论计算结果。结果表明:缩短谐振器的谐振腔长度使器件中心处能量更为集中,有效地提高了声表面波气相色谱仪灵敏度。      

Sniffing lung cancer related biomarkers using an oxidized graphene SAW sensor

Decane is one of the volatile organic compounds (VOCs) in human breath. Successful detection of decane in human breath has vast prospects for early lung cancer diagnosis. In this paper, a novel detecting device based on a filter surface acoustic wave (SAW) gas sensor is presented. SAW sensors coated with a thin oxidized graphene film were used to detect decane in parts per million (ppm) concentrations. Control and signal detection circuits were designed using a vector network analyzer with a detection resolution of insertion loss down to 0.0001 dB. The results showed that the SAW sensor could respond quickly with great sensitivity when exposed to 0.2 ppm decane. This device shows tremendous potential in medical diagnosis and environmental assessment.     

基于声表面波的氢气传感器*

将钯基材料对氢气分子的特异选择性吸附能力与声表面波的快速响应特点相结合,可实现一种快速、高灵敏和低功耗的氢气检测与报警技术。传感器由双通道差分式振荡器与沉积在传感器件表面的声表面波传播路径上的钯基气敏薄膜组成。为提升传感器响应速度,该文探讨了采用钯镍合金薄膜与钯铜纳米线作为气敏材料的氢气传感器响应特性,通过对气敏材料制备方法及参数的优化,研制了两种沉积不同钯基气敏材料的氢气传感器件,并对其性能进行了评测。实验测试结果表明:钯铜纳米线气敏材料由于具有大体积表面积比和多孔结构,大幅提高了SAW氢气传感器响应速度,针对浓度为10%、4%以及0.5%的氢气响应时间可达～2s。     

应用于气体传感器的具有铝/金电极的单模式两端对声表面波谐振器

为改善气体传感器性能,通过器件优化设计获得了一种应用于气体传感器的具有低损耗、高品质因子(Q)的单模式两端对声表面波(SAW)谐振器。该谐振器由两个换能器、分置于换能器两边的短路栅反射器以及在换能器之间分布的用于敏感膜镀膜的约2.5mm金属薄层构成。谐振器采用铝/金双层电极以降低测试气体环境的腐蚀影响。利用经典耦合模(COM)理论对器件性能进行了仿真以提取优化的结构设计参数。基于仿真结果,实验研制了基于300MHz频率的新型铝/金电极SAW两端对谐振器,测试结果显示所研制器件具有较低损耗(〈7dB),较高Q值(-3000)以及单一谐振模式的特点,并且,以所研制的新型谐振器为频率控制单元的谐振器型振荡器表现出良好的频率稳定度(t15Hz/h),这对于改善气体传感器的检测下限及稳定性等性能指标具有重要意义。      

Development of two-port surface acoustic wave resonator with Al/Au electrodes for gas sensing

Simple and efficient surface acoustic wave(SAW)two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing.It was composed of two shorted grating reflectors and adjacent intedigital transducers(IDT),and an active metal film in the cavity between the IDTs for the sensitive film coating.The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments.Excellent device performance as low insertion loss,high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness,cavity length and acoustic aperture.Prior to fabrication,the coupling of modes(COM)model was performed for device simulation to determine the optimal design parameters.The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of~6.5 dB and loaded Q factor in the 3000 range.Using the fabricated resonator as the feedback element,a dualresonator-oscillator with excellent frequency stability(0.1 ppm)was developed and evaluated experimentally,and it is significant for performance improvement of SAW gas sensor.     

用于电流传感的声表面波磁致伸缩效应

利用声表面波(SAW)磁致伸缩效应可以实现一种快速、高灵敏度的电流检测方法,但磁致伸缩薄膜内部矫顽力导致了明显的磁滞误差。磁致伸缩薄膜的栅阵化设计可以减小磁致伸缩时薄膜内部矫顽力,抑制磁滞现象,从而实现高灵敏和低迟滞误差的SAW电流检测。结合有限元和耦合模理论对沉积铁钴(FeCo)薄膜栅阵的声表面波电流传感器中的磁致伸缩效应进行分析,对传感响应进行仿真,确定优化的传感结构参数。为验证理论分析,实验研制了频率为150 MHz的声表面波电流传感器件,并结合差分振荡电路及亥姆霍兹线圈,建立传感器测试系统.实验结果表明,磁致伸缩薄膜的栅阵设计大幅降低了迟滞误差,并显著提升了传感器灵敏度。      

Nonlinear frequency shift in surface acoustic wave resonator operating as a gas sensor

The shift in the resonance frequency of a two-port quartz surface acoustic wave (SAW) resonator operating as a gas sensor without a selective layer is studied versus the power of an SAW excited in the resonator. At working frequencies of the resonator (≈389 MHz) placed in the flow of moisture-containing nitrogen gas, an anomalously large positive shift of the resonance frequency is observed as the SAW power exceeds 1 mW. This shift is one order of magnitude larger than that due to the nonlinear amplitude-frequency effect, which is known for quartz SAW resonators. Possible physical mechanisms underlying this phenomenon are analyzed. Experimental data indicate that such a shift is associated with the influence of a powerful SAW on sorption processes taking place on the active surface of the resonator rather than being a direct consequence of heating of the SAW substrate by the powerful SAW.     

High frequency SAW stabilized oscillators for chemical agents sensors

The surface acoustic wave (SAW) chemical agents sensors usually operate in the oscillator feed-back configuration. It converts a molecular interactions between SAW surface and chemisensitive layer placed on it to relative easy to measurement electrical quantities (most often it is an operating frequency or phase change). Although in the SAW sensors the key role play chemisensitive coatings but nearly as important as the coatings are electronic circuits cooperating with SAW devices. The results of theoretical calculations show that the SAW sensors operating frequency increasing is profitable from the sensitivity point of view. Unfortunately, an advantageous sensitivity-frequency dependence is hard to apply because of decreasing of SAW device dimensions and thereby the area of the chemisensitive layer with the operating frequency. The smaller area of the layer, the smaller amount of detecting gas particles sorbed and the weakest response of the sensor. It is possible to avoid the problem using special constructions of SAW stabilised oscillators. In the paper such constructions have been described.     

Universal SAW gas sensor

A new principle of designing a SAW gas sensor is described. This sensor, being essentially of sorption type, also offers properties of thermometric SAW sensors. The basic idea here is that heat fluxes propagate between the SAW substrate and the working surface of the temperature-regulating system with some delay. A sensor based on this principle can detect not only the vapors of volatile substances but also gases by their thermal properties, retaining high temperature stability and speed of response unlike conventional SAW thermometric sensors. The design of this sensor built around a LiNbO₃ SAW delay line is described, and experiments on detecting a household propane-butane mixture with this sensor are reported. In particular, the responses of the sensor are measured at different gas-flow rates, two different SAW substrate temperatures, and two propane-butane concentrations. Ways of improving the sensor’s performance are discussed.