半导体垂直腔面发射激光器的微腔效应

应用腔量子电动力学和半导体物理学讨论了半导体垂直腔面发射激光器的微腔效应,得到了实际腔结构和注入载流子下的半导体生趣腔面发射激光器的自发发射谱,计算结果表明,半导体分布布拉格反射垂直腔激光器的单方向自发发射可以境强约２００倍。     

分布反射面发射垂直微腔半导体激光器的微腔效应

从理论上分析了作为垂直腔面发射半导体激光器反馈面的异质多层结构对光腔中激光传输振荡过程的影响．指出其相位匹配和等效反射面位置对改善激光器性能的重要作用．说明目前这种被认为很有希望的微腔结构，实际上难以观察到微腔效应的物理根源，并指出其改进的途径． 关键词：     

径向桥电极高功率垂直腔面发射激光器

为改善高功率垂直腔面发射半导体激光器的热特性,提高它的输出功率,研制了新型径向桥电极高功率垂直腔面发射半导体激光器器件,对新型半导体激光器的结构模型进行理论分析表明,采用径向桥式电极可以降低器件P型DBR电阻,减小焦耳热;降低热阻,提高器件的散热能力。实验制备了出光孔径同为200μm的径向桥电极与常规电极的高功率垂直腔面发射半导体激光器,并对器件的性能进行了实验对比测试。结果表明径向桥电极高功率垂直腔面发射半导体激光器器件的微分电阻为0.43Ω;室温下最大输出功率可达340 mW,是常规电极垂直腔面发射半导体激光器的1.7倍;器件的热阻为0.095℃/mW,在80℃时,仍能正常激射,具有良好的热特性,径向桥电极高功率垂直腔面发射半导体激光器的光电特性与温度特性要远好于常规电极的高功率垂直腔面发射半导体激光器器件。     

高速调制响应垂直腔面发射激光器中的微腔效应

应用微腔物理和量子阱物理，计算了量子阱垂直腔面发射激光器的自发发射谱和自发发射寿命，通过对半导体激光器传输函数的研究，发现缩短自发发射寿命是垂直腔面发射激光器实现高速调制响应的主要原因.     

垂直腔面发射激光器湿法氧化工艺的实验研究

为实现对垂直腔面发射半导体激光器氧化孔径的精确控制,提高其光电特性,对湿法氧化工艺进行了实验研究.在不同的氧化温度下,对相同结构的垂直腔面发射半导体激光器模拟片进行湿法氧化.采用X射线能谱分析仪,对氧化后模拟片的氧化层按不同的氧化深度对其氧化生成物进行检测.依据氧化生成物中氧元素组分浓度的变化,对氧化过程进行了分析与讨论,推导出在一定的温度下,氧化速率随时间变化的一般规律.提出了在垂直腔面发射半导体激光器的湿法氧化工艺过程中,适当降低氧化温度,延长氧化时间,可减小氧化限制孔径的控制误差,提高氧化工艺的准确性与稳定性.     

表面液晶-垂直腔面发射激光器阵列的热特性

液晶与垂直腔面发射半导体激光器(VCSELs)阵列结合可实现波长可调谐、偏振精确控制等,同时液晶的引入也会改变垂直腔面发射半导体激光器阵列的热特性,本文设计了表面液晶-垂直腔面发射激光器阵列结构,并开展了阵列的热特性实验研究.对比分析了向列相液晶层对VCSEL阵列热特性的影响,实验结果表明,1×1,2×2,3×3三种表面液晶-VCSEL阵列的阈值电流温度变化率最高可降低23.6%,热阻降低26.75%;同时,激光器阵列各发光单元之间的温度均匀性显著提高,出光孔与周围温差小于0.5℃.综上所述,VCSEL阵列中液晶层的引入不仅大大加速激光器阵列单元热量扩散,而且降低了有源区结温,提高了VCSELs激光器阵列热特性,为实现高光束质量的单偏振波长可控VCSEL激光器阵列打下了良好的理论和实验基础.     

电流孔的尺寸对双氧化限制垂直腔面发射激光器阈值的影响

通过双氧化限制垂直腔面发射激光器中电场、载流子密度、光场和热场空间耦合方程自洽数值求解,研究了垂直腔面发射激光器中阈值特性.得到了氧化层及有源区附近的电势,模拟电流孔的边缘效应,给出了不同双氧化限制电流孔半径下阈值电流密度、载流子密度、基模光场和热场的空间分布.发现了实现最小阈值电流的最佳限制电流孔半径,进而设计了双氧化限制垂直腔面发射激光器的结构. 关键词： 双氧化限制垂直腔面发射激光器 自洽 阈值     

利用光学薄膜模型研究垂直腔面发射激光器的光学特性

可以把垂直腔面发射激光器看作是多层光学薄膜,应用光学薄膜原理对其光学薄膜的特性进行了研究。计算分析了布拉格反射镜和谐振腔模的反射谱受器件结构变化的影响。通过利用菲涅耳系数矩阵法计算,得到了光在垂直腔面发射激光器器件结构中形成的驻波场分布。结果表明,利用菲涅耳系数矩阵法设计垂直腔面发射激光器的光学薄膜是一种快捷准确的方法。     

808nm大孔径垂直腔面发射激光器研究

垂直腔面发射激光器(VCSEL)中的载流子聚集效应使注入到有源区的工作电流只是通过边缘环形区域很窄的通道,激光功率密度分布不均匀;尤其当器件尺寸较大时,激射光斑呈现环状,环中间光强很弱.这是研制电抽运高功率大尺寸VCSEL尤为突出的技术难题.采用新型结构成功研制出808 nm波段高功率大孔径VCSEL,在注入电流为1A时,室温下连续输出功率达0.3 W. 关键词： 半导体激光器 垂直腔面发射激光器 高功率 大孔径     

1.3μm GaAs基量子点垂直腔面发射激光器结构设计与分析

结合垂直腔面发射激光器（VCSEL）原理以及量子点增益特点，计算了不同结构VCSEL的腔内损耗和量子点的模式增益.分析了激光器阈值特性以及氧化限制层对光损耗的影响.设计了含 氧化限制层的13μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 增益     

On the thermal resistance of vertical-cavity surface-emitting lasers

Thermal properties of vertical-cavity surface-emitting lasers (VCSELs) are studied using their comprehensive, three-dimensional, self-consistent, thermal-electrical simulation. The thermal resistance versus operation current relation is found to be completely different for two basic VCSEL configurations, i.e. for proton-implanted top-surface-emitting lasers (top-emitting VCSELs) and etched-well lasers (bottom-emitting VCSELs). The above fact is explained using a concept of the average centre of heat generation within a laser volume and its shift with an increase in an operation current. This revised version was published online in November 2006 with corrections to the Cover Date.     

Light polarization fingerprints on nonlinear dynamics of vertical-cavity surface-emitting lasers

In this paper we summarize the recent results on nonlinear dynamics of vertical-cavity surface-emitting lasers (VCSELs) which are bearing the fingerprints of the particular polarization properties of VCSELs. Due to the surface emission and cylindrical symmetry, VCSELs lack strong polarization anisotropy and may undergo polarization switching and polarization mode-hopping. This provides new specificities to the rich nonlinear dynamics induced in VCSELs by an external perturbation. We unveil both experimentally and theoretically these new specificities for the case of optical feedback, optical injection, and unidirectional synchronization between VCSELs.     

Photonic Crystal VCSELs

Photonic crystal vertical cavity surface emitting lasers (PC VCSELs) are reviewed. The PC VCSEL shows single-transverse-mode continuous wave operation in the entire current range with side mode suppression ratio 35-40dB. A simple 3-D plane wave expansion method is found to be very effective in analyzing the modal properties of the PC VCSELs.     

Suppression of polarization switching in vertical-cavity surface-emitting lasers by use of optical feedback

The polarization properties of vertical-cavity surface-emitting lasers (VCSELs) subject to optical feedback are studied experimentally. It is thereby demonstrated that polarization-selective optical feedback can be utilized to entirely eliminate VCSEL polarization switching over the entire device operating range.     

Thermoreflectance imaging of laser diodes and VCSELs along and perpendicular to the emission direction

Thermal characterization of semiconductor lasers is an important issue for optoelectronics. This paper presents our thermoreflectance measurements on two different types of laser diodes: classical ridge laser diodes and vertical cavity surface emitting lasers (VCSELs). We first studied the external temperature increase in ridge diodes in order to determine inhomogeneity. Then, we tried to determine the inner temperature of the VCSELs.     

Synchronization properties and effects of parameter mismatches in unidirectionally coupled chaotic vertical-cavity surface-emitting lasers

We numerically investigate the effects of parameter mismatches on chaos synchronization in vertical-cavity surfaceemitting lasers (VCSELs). We assume injection-locked chaos synchronization in a unidirectionally coupled and openloop optical feedback system. The accuracy of chaos synchronization is greatly affected by the mismatches of the device parameters and operation conditions between the two lasers. In particular, the oscillation frequency of the laser is one of the important parameters in a system of injection-locked chaos synchronization. However, the variations of the device characteristics of VCSELs are very large compared with those of other types of semiconductor lasers. We study the effects of parameter mismatches related to the oscillation frequency of VCSELs on chaos synchronization. We proved that mismatches in terms of the birefringence and the injection current play crucial roles for the quality of chaos synchronization.     

A review of progress on nano-aperture VCSELInvited Paper

This paper reviews the progress on nano-aperture vertical-cavity surface-emitting lasers (VCSELs). The design, fabrication, and polarization control of nano-aperture VCSELs are reviewed. With the nanoaperture evolving from conventional circular and square aperture to unique C-shaped, H-shaped, I-shaped, and bowtie-shaped aperture, both the near-field intensity and near-field beam confinement from nanoaperture VCSELs are significantly improved. As a high-intensity compact light source with sub-100-nm spot size, nano-aperture VCSELs are promising to realize many new near-field optical systems and applications.     

表面等离子体调制的纳米孔径垂直腔面发射激光器

在普通850nm垂直腔面发射激光器基础上制备了表面等离子体调制的纳米孔径垂直腔面发射激光器.当小孔直径为200nm，周围光栅的周期为400nm时，在15mA驱动电流下最大输出光功率达到了0.3mW.介绍了该器件的制备工艺，并从实验和理论两方面分析了周期性光栅结构对光束的约束作用.     

High speed intracavity-contacted vertical cavity surface emitting lasers with separated quantum wells

In this work, the simulation of the 980 nm InGaAs intra-cavity-contacted oxide-confined vertical-cavity surface-emitting lasers (ICOC VCSELs) with separated triplets of quantum wells (STQW) is presented. We analyze the thermal, electrical and optical properties of such devices. Results of simulations show the larger optical power efficiency and higher modulation bandwidth for devices with included STQW.