Fractional Fringe Order Method Using Fourier Analysis for Absolute Measurement of Block Gauge Thickness

A fringe analysis method, which combines the Fourier transform with the fractional fringe order method for measuring the absolute thickness of a block gauge, is presented. An approximate integer part of the fringe order is estimated by mechanical measurements, and the fractional part is determined by Fourier analysis of the interferometric fringe patterns. The fringe patterns are obtained with a Michelson interferometer by illumination of several selected wavelengths, respectively. The use of the fractional fringe order method can determine accurately more than 2ϖ phase jumps. The measured thickness of a block gauge is 5999115.0 ± 0.7 nm, which is comparable with the standard thickness of 6 mm. The influence of wavelength and approximate integer part of fringe order on the measurement accuracy is discussed.     

一种基于傅里叶变换的分析载波条纹的新方法

针对传统傅里叶变换法处理光载波干涉条纹图时会有边缘效应产生的问题,提出了一种基于傅里叶变换法的外推延拓方法,并从理论上进行了数学推导。为了验证这种方法的正确性,分别对一维数字信号和二维空间载波条纹图进行了数值模拟,进一步分析了误差产生的原因,并与传统的傅里叶变换法对比。结果表明该法可以有效抑制传统傅里叶变换法处理光载波干涉条纹图时边缘效应所造成的较大误差,在基于空间域相位调制技术的波面干涉测量中,对空间载波条纹图进行处理,可以使相位的计算精度达到3.3 mrad。     

基于Gabor滤波的散斑条纹图平滑方法

提出了一种基于伽博(Gabor)滤波的散斑条纹图平滑方法.通过加窗傅里叶运算提取散斑条纹图的条纹频率和条纹梯度方向,并利用它们确定具有频率和方向选择性的Gabor滤波器对散斑条纹图进行Gabor滤波.数值模拟和实验结果表明,该方法在滤除散斑噪声的同时能够有效的保留散斑条纹图的条纹结构,为从单幅散斑条纹图中进一步提取条纹相位场奠定了良好的基础.     

干涉仪自适应抗振的空间移相术

根据时域移相算法的概念,提出了一种空间移相术,它能够检测因外界振动导致条纹抖动而引起的干涉图样的空间相位变化.运用这种技术在TwymanGreen移相式干涉仪中建立了一套自适应抗振系统,它可以实时测量振动引起的相位变化大小,并通过反馈器件PZT实时校正干涉条纹的相位,使得干涉条纹稳定以保证光学测量的正常进行,与此同时PZT还作为移相器件.     

Fractional derivative applied to the retrieval of phase distribution from an interferogram

This paper proposes a new method for determining the phase distribution of a 2D fringe pattern using 2D fractional derivatives. The fractional derivative of order?r (real 0??r??3), in the ?? direction (????[0,2??]) is defined by the Fourier transform and its inverse and gives as result a phase distribution. The fractional derivative of order r produces a phase displacement of r??/2 without significantly changes in normalized amplitude distribution. There are optimum values of r and ?? for which the phase distribution given by the fractional derivative represents the phase distribution for the fringe pattern. Also, we demonstrate the usefulness of a method based on four fractional derivatives to determine the phase and intensity distribution from a single interferogram and highlights small objects located in the fringe pattern. We demonstrate the proposed method using both numerical simulated and experimental interferograms.     

用于数字条纹轮廓术的一种基于广义分析模型的后滤波方法

由于数字投影和采集系统的非线性失真,传统的方法通常需对采集到的条纹进行低通或带通滤波从而抑制高次谐波并获取基频分量。基于广义分析模型针对数字条纹轮廓术提出一种对测量后的物体形貌进行后滤波的算法,消除了非线性失真对测量结果所造成的影响并提高了数字条纹轮廓术的测量精度。论述了条纹轮廓术的原理和广义分析模型,分析推导出后滤波算法。仿真和实验结果表明,后滤波方法能够快速准确地实现基于数字投影的三维形貌重建。     

影响条纹图形拼接法测量精度的主要误差因素

通过对计算机模拟和实验结果的分析表明，影响条纹图形拼接法测量精度的主要因素是子孔径面形测量精度，重叠区的大小，面形拟合阶次和拼接模式等。     

Absolute Positioning of Scanning Probe Microscope Tip by Two-Wavelength Synthetic Method

In this paper, we describe the absolute positioning of a probe tip in a scanning Wiener fringe optical microscope (SWOM) using a synthetic wavelength method. Two laser beams with different wavelengths are superimposed and are incident on a sample surface. A synthetic fringe which has a longer period than that of the Wiener fringe obtained with a single wavelength is formed on the surface. The order of Wiener fringe which is utilized as a feedback signal in the microscope can be determined by the synthetic fringe. A sample with known structure was observed for various defined fringe orders using the SWOM.     

A study of fringe pattern trace and analysis

In this paper,the gometric center and centroid method are suggested to tracecenter location of a close fringe pattern.The fringe pattern of the interferogram is analysed byusing the general Fourier method.The analytic accuracy is controlled by using P-test methodof statistics.The analytic accuracy and sampling speed of the fringe pattern depend on thequality of the interferogram and the numbers of the sampling points.     

用图像运算技术对光弹性条纹进行倍增

在光弹应力分析中,利用分数级条纹可以提高分析精度,于是,产生分数级条纹的方法研究就变得非常重要。利用图像处理技术,首先采集一幅图像,然后通过对这幅图像的算术运算就可以产生分数级条纹。给出了详细的理论分析,并进行实验。利用本文方法,在两条整数级条纹之间,可以相继产生７条分数级条纹。     

基于调制方向提取载波散斑条纹中心线的方法

条纹中心线法是一种重要的电子散斑干涉条纹解调方法,其前提条件是获得高准确度的条纹中心线.本文在分析载波电子散斑干涉条纹自身特征的基础上,提出了一种基于载波条纹调制方向提取条纹中心线的方法.该方法首先通过同态滤波有效滤除高频乘性散斑噪音,提取出载波条纹;然后应用基于调制方向提取中心线算法确定载波条纹灰度极值点并做二值化处理;再采用基于中心线拟合或者基于条纹间距的边沿中心线补偿法,获得完整的条纹中心线图.实验结果表明:该方法简单、可靠,能快速、准确地提取出连续的中心线.     

基于调制方向提取载波散斑条纹中心线的方法

条纹中心线法是一种重要的电子散斑干涉条纹解调方法,其前提条件是获得高准确度的条纹中心线.本文在分析载波电子散斑干涉条纹自身特征的基础上,提出了一种基于载波条纹调制方向提取条纹中心线的方法.该方法首先通过同态滤波有效滤除高频乘性散斑噪音,提取出载波条纹;然后应用基于调制方向提取中心线算法确定载波条纹灰度极值点并做二值化处理;再采用基于中心线拟合或者基于条纹间距的边沿中心线补偿法,获得完整的条纹中心线图.实验结果表明:该方法简单、可靠,能快速、准确地提取出连续的中心线.     

纳米云纹法条纹倍增技术研究

提出了一种纳米云纹法的条纹倍增技术，可用于单晶材料纳米级变形测量.在测量中，单晶材料的晶格结构由透射电镜（TEM）采集并记录在感光胶片上作为试件栅，几何光栅作为参考栅.对纳米云纹条纹的形成原理，透射电镜放大倍数与试件栅的频率关系，条纹倍增技术，位移、应变测量方法等进行了详细讨论.该方法不仅能够测量连续力学参量，如应变和位移，而且能够表征纳观非连续参量，如位错、夹杂.     

基于条纹中心线的载波散斑条纹解调方法

针对传统傅里叶变换法在处理含有多突起的载波散斑条纹图时,由于存在频谱展宽会出现严重的解调相位失真,提出了一种基于条纹中心线的载波散斑条纹解调方法.根据载波调制时所采用平行调制方式和倾斜调制方式,分别从理论上对相关的中心线解调法进行数学推导,并进一步采用最小二乘三次曲面拟合法获得被测物面全场的离面位移信息.实验结果表明:利用上述中心线解调法和曲面拟合法能解调出复杂的载波条纹图,并获得具有亚像素定位准确度、连续光滑的全场离面位移信息.     

傅里叶变换轮廓术中相位失真的预矫正方法

介绍了一种基于傅里叶变换轮廓术的三维面形测量系统中相位失真的预矫正方法。由于投影系统和成像系统的空间三角位置关系、投影仪的发散照明和两套系统蕴含的光学畸变,投影一幅相位与空间坐标成理想线性关系的标准正弦光场,拍摄到的条纹相位和空间坐标不再呈线性分布,引起相位失真,甚至会影响系统测量精度。该方法借鉴反向条纹投影的思想,计算拍摄光场的非线性相位分布与理想的线性相位分布之间的关系,预先矫正,反算出一个新的待投影光场。实验结果表明这种方法能有效地减小该类相位失真所导致的测量误差,获得了更好的测量结果．     

Holographic determination of the residual strength of arbitrarily clamped, centrally thinned circular plates

In holographic inspection, the perturbed fringe patterns which reveal internal defects in components are generally distinct. However, in the case of a uniformly loaded circular flat plate containing a central circular defect, distinct fringe perturbation is not visually obvious except through quantitative analysis of the fringe pattern. During the analysis, ambiguities frequently arise in correctly assigning the fringe order, which is often fractional, at the centre of the plate. With the use of carrier fringes, accurate fringe orders at the central region of the plate can be determined. These, together with an iterative procedure, enable accurate estimation of both the size and depth of the defect. As the present method also determines the actual clamping condition along the plate boundary, the use of the von Mises yield criterion enables estimation of the residual strength, expressed in terms of the proportional reduction in the allowable pressure which can be applied to the defective plate.     

基于横向莫尔条纹的自准直测角方法

本文提出了基于横向莫尔条纹的自准直测角方法,用遮光原理分析了莫尔条纹的位移放大作用.并基于该方法搭建了原理光路,得到的莫尔条纹信号稳定且能够满足测量需求.在此基础上对系统进行了定量标定,简化了数据处理步骤,实现了动态测量,系统分辨率达到10″,进一步明确将该方法应用到自准直仪中可以有效提高仪器分辨率.     

Three-dimensional Fourier Fringe Analysis

Over the years two-dimensional Fourier Fringe Analysis (2D-FFA) has demonstrated both its capability and its relative robustness in analysing fringe patterns within a short time-frame from static objects. Nowadays, there is an increasing demand to measure dynamic objects. Today 2D-FFA is seen as a fast and flexible method of processing fringe patterns for dynamic objects. But it is still inherently a 2D approach, i.e. it deals with three-dimensional data (video sequences) on an individual 2D frame-by-frame basis. In this paper, a novel three-dimensional Fourier Fringe Analysis (3D-FFA) algorithm is proposed to demodulate fringe pattern sequences taken from dynamic objects. This technique processes the stack of fringe patterns as a single 3D volume, not as a set of individual 2D frames that are each processed in isolation. The proposed algorithm has been evaluated on both computer simulated and real dynamic objects. Results show that the proposed technique is able to demodulate fringe pattern volumes successfully.     

一种新的Fabry-Perot干涉条纹处理方法

介绍了一种提取Fabry-Perot(法布里-帕罗)干涉条纹圆心点坐标和条纹半径的新方法。首先对干涉图像依次进行二值化处理,对所得到的条纹强度曲线进行均平滤波和自适应滤波,根据条纹灰度值强度余弦函数分布的特点,对条纹灰度值数据进行最小二乘法拟合,获得条纹强度峰值坐标,通过精确的迭代算法,进而获得Fabry-Perot干涉条纹圆心点的坐标;然后再对干涉条纹进行圆周积分,从而可以确定每级Fabry-Perot干涉条纹的半径长度。该方法可提高计算精度,减小计算误差。     

超外差干涉绝对距离测量研究综述

近几年来，基于多波长干涉理论的绝对距离测量技术取得了很大的进展。其中，超外差绝对距离干涉测量可以克服光学元件引起的模耦合误差，这是普通的外差干涉测量所不能避免的。超外差测量还能够实现合成波长相位的实时检测。本文简要介绍了多波长干涉测量（也叫小数重合法）的基本原理，论述和分析了超外差干涉测量的原理，指出了超外差测量的优点。最后，对超外差测量的方案进行了综述，并指出了它们在实际测量中的特点。