Phase retrieval of optical fringe patterns from the ridge of a wavelet transform

A new method for phase retrieval of optical fringe patterns is presented. This method is based on a wavelet transform and is capable of extracting the full 2D phase distribution from a single fringe pattern. An important conclusion that the phase of the optical fringe pattern is equal to the phase of its wavelet transform on the ridge of the wavelet transform is theoretically clarified. The method is compared with the Fourier transform and the integration methods. A numerical simulation and an experimental example of phase retrieval are shown.     

光刻对准中干涉条纹相位解析研究

针对光刻对准中双光栅产生的具有多频率的干涉条纹,提出了一种基于二维解析小波变换进行条纹分析的方法。该方法首先通过二维小波变换的多尺度对条纹的多频率进行分析,并通过解析小波基函数将条纹的幅度与相位进行分离,最终通过二维小波脊方法提取出与偏移量相关的相位。在相位提取的同时通过二维小波脊所处点的角度分布来移除封闭条纹处理中常见的相位符号不确定性。数值模拟与实验验证了该方法的可行性并与传统的基于频域的相位分析方法进行了对比分析。结果表明,该方法能在获得所需相位信息的同时较好地滤除掉由光路抖动引起的噪声,具有很强的适应性。     

A new wavelet transform for reliability-guided phase unwrapping of optical fringe patterns

A new daughter wavelet definition for reliability-guided phase unwrapping of the optical fringe pattern is introduced. The new daughter wavelet definition is given by normalized mother wavelet with a new factor including a Gaussian function. The modulus of the wavelet transform coefficients, obtained by using daughter wavelet under this new daughter wavelet definition, includes not only modulation information but also local frequency information of the deformed fringe pattern. Therefore, it can be treated as a good parameter which represents the reliability of the reconstructed phase data. Mathematical demonstration of this parameter is given. Both the computer simulation and experiment reveal the validity of the proposed method.     

A numerical spatial carrier for single fringe pattern analysis algorithm

Hilbert transform and continuous wavelet transform are combined to form an algorithm for the analysis of a single fringe pattern with open or closed fringes. Only one recorded fringe pattern is needed to extract the phase information. A second π/2 phase shifted fringe pattern should first be generated from the other using Hilbert transform to superpose numerically the spatial carrier. Several phase extraction techniques are conceived to demodulate fringe patterns. In this paper, the wavelet technique is used to obtain the required phase distribution. The algorithm offers an advantage that it is appropriate when the spatial carrier is impossible to be added experimentally. Finally, a simulation was carried out to validate the algorithm, giving good results.     

Discuss the measuring range of dual-frequency wavelet transform profilometry

We discuss the structure condition and sampling condition of wavelet transform profilometry (WTP) based on dual-frequency fringe pattern in this work. In the mentioned method a grating fringe with dual-frequency components is projected onto an object. And two wavelet ridge lines can be extracted by means of wavelet analysis, from which we can calculate two groups of wrapped phase information. Afterwards the retrieved phase with higher precision can be obtained through phase unwrapping process. However, it should be noted that the spectral aliasing of the deformed fringe pattern must be avoided in order to restore the correct phase information. And the two fringe carrier frequencies have to obey some rules as well. In this paper, the structure condition and sampling condition of the proposed method is deduced from the point of view of frequency analysis. It is proven that there would be no frequency overlapping in the deformed fringe pattern only when both of the two conditions mentioned previously are fulfilled. The results of computer simulations and experiments verify the validity of our theory.     

Analysis on fringe pattern demodulation by use of 2-D CWT

We discuss the wavelet transform profilometry based on the continuous wavelet transform technique as viewed from frequency analysis. We deduce the expression of one-dimensional (1-D) and two-dimensional (2-D) wavelet transform in frequency domain and analyze their characteristics in the application of demodulating the fringe patterns. We also compare 1-D CWT and 2-D CWT in demodulating the oblique fringe patterns with dual carrier frequency components. When oblique fringe patterns are processed, the direction normal to the grating line and x axis or y axis is not identical. By 1-D CWT, in which wavelet transform is carried out row by row, we cannot obtain the most similarity between local signal and the wavelet functions with different dilation values. While a fan 2-D continuous wavelet transformation can deal with the fringe pattern as a 2-D unit as well as has multi-directions, its advantage is that it can be used to exact the information in the spatial direction. However, its spatial localization ability is not very good, which leads that it is not suitable for demodulating the fringe patterns with high phase variation. Computer simulations and experiments have verified our analysis.     

小波相位分析测量成像径向畸变

为了测量光学成像像面各个像素的径向畸变大小,提出将小波变换载频条纹相位分析应用于径向畸变测量。采用正弦载波条纹作为测量模板,把径向畸变转化为径向调制相位。应用条纹相位分析导出径向调制相位和径向畸变的转化关系。采用小波频率估计和相位估计提取变形条纹的相位,由于变形条纹中心点是零畸变,中心点的瞬时频率和相位可以计算参考条纹的基频相位。两种基频相位之差就是与所有像素径向位置畸变分布对应的三维调制相位——称为径向畸变分布。利用校正公式和立方卷积插值算法对彩色畸变图像进行校正,给出详细的理论分析和实验结果。     

单幅条纹图相位解调的小波分析方法

相位解调是条纹相位分析的关键问题.本文提出一种应用小波频率估计联合频率导数对变形条纹进行瞬时频率分析,从中提取参考基频,从而依靠单一变形条纹实现相位解调的方法.首先,理论上证明了当变形条纹瞬时频率空间导数等于零,该空间点的瞬时频率等于参考基频频率;其次,引入Gabor小波提取变形条纹的瞬时频率空间分布,利用变形条纹瞬时频率的空间导数分布识别提取参考基频,从而实现相位解调.利用该方法进行了三维形貌测量的实验,结果表明该方法在实现相位解调中效果良好.     

单幅条纹图相位解调的小波分析方法

相位解调是条纹相位分析的关键问题.本文提出一种应用小波频率估计联合频率导数对变形条纹进行瞬时频率分析,从中提取参考基频,从而依靠单一变形条纹实现相位解调的方法.首先,理论上证明了当变形条纹瞬时频率空间导数等于零,该空间点的瞬时频率等于参考基频频率;其次,引入Gabor小波提取变形条纹的瞬时频率空间分布,利用变形条纹瞬时频率的空间导数分布识别提取参考基频,从而实现相位解调.利用该方法进行了三维形貌测量的实验,结果表明该方法在实现相位解调中效果良好.     

基于指数尺度间隔连续小波变换的相位提取算法

只需要一幅调制图像的光栅投影测量方法主要有傅里叶变换轮廓术(FTP)、小波变换轮廓术(WTP)等。采用基于指数尺度间隔的连续小波变换与重构方法,提取调制图像的瞬时相位。针对指数尺度间隔连续小波变换,指出了足够大的噪声能够改变小波变换脊的位置,并且该脊向上移动的概率最大。因此,为了重构载频信号,选择脊及其紧邻的较大的那个尺度所对应的小波系数,采用灰度图像阈值分割中最大类间方差法(OTSU),剔除掉幅值较小的系数;针对斑点噪声的影响,对OTSU算法的结果进行了修正;使用修正后的系数集合重构载频信号,并计算该信号的瞬时相位。理论分析和实验结果表明算法有效且具有稳健性。     

Phase recovery from fringe patterns using the continuous wavelet transform

Interferometry is well established as an optical technique in which a measurand is encoded as the phase of a periodically varying intensity pattern. In view of the inherent accuracy of interferometry, many methods have been developed to retrieve the phase from images of the fringe pattern. Our focus in this paper is one such technique—the continuous wavelet transform (CWT). We begin by reviewing the CWT and the space–spatial–frequency localisation properties of wavelets. We show that a path which follows the maximum modulus of the CWT (the wavelet ridge) gives the instantaneous fringe frequency as a function of spatial displacement. The phase is automatically and trivially obtained, without discontinuities, by integration. Examples of practical wavelets are given and algorithms to isolate the wavelet ridge reviewed.     

Phase retrieval of speckle fringe pattern with carriers using 2D wavelet transform

A novel two-dimensional (2D) Gabor continuous wavelet transform (CWT) for phase retrieval and fringe filtering of speckle fringe patterns with spatial carriers is proposed. Theoretical analysis of 2D Gabor CWT is presented and results are compared with advanced fan 2D CWT using both the computer simulated and experimental speckle fringe patterns. It is shown that noise reduction by 2D Gabor CWT demonstrates better results than that of the advanced fan 2D CWT. Two-dimensional Gabor CWT is also compared with 2D Fourier transform and results show that 2D Gabor CWT algorithm has better noise immunity.     

Hilbert assisted wavelet transform method of optical fringe pattern phase reconstruction for optical profilometry and interferometry

A Hilbert assisted wavelet transform (HWT) method is presented for phase reconstruction of 3D profilometry and interferometry. A rigorous mathematical demonstration about this HWT method is given in this paper. An important conclusion that the phase of the optical fringe pattern is equal to the phase of its HWT coefficients on the ridge is theoretically clarified. The strict relation between the scale parameter and the phase gradient (also called the angular frequency) of the fringe pattern is also given. Computer simulations and experiments reveal the validity of the method and the correctness of the mathematical demonstration. Since the filtering process is avoided in this method, it can deal with the frequency overlapping problem to a certain extent. Applications of this method in both optical profilometry and interferometry are shown and discussed in the experiment section.     

Comparative analysis of interferogram noise filtration using wavelet transform and spin filtering algorithms

The aim of this paper is to analyze 2D fringe pattern denoising performed by two chosen methods based on quasi-1D two-arm spin filter and 2D discrete wavelet transform (DWT) signal decomposition and thresholding. The ultimate aim of this comparison is to estimate which algorithm is better suited for high-accuracy measurements by phase shifting interferometry (PSI) with the phase step evaluation using the lattice site approach. The spin filtering method proposed by Yu et al. (1994) was designed to minimize possible fringe blur and distortion. The 2D DWT also presents such features due to a lossless nature of the signal wavelet decomposition. To compare both methods, a special 2D histogram introduced by Gutman and Weber (1998) is used to evaluate intensity errors introduced by each of the presented algorithms.     

Analysis of phase distortion in phase-shifted fringe projection

This paper describes the analysis of phase distortion in phase-shifted fringe projection method. A phase distortion occurs when the phase shifting technique is applied to extract the phase values from projected fringe patterns in surface contouring. The phase distortion will induce measurement errors especially in the measurement of micro-components. The cause of such phase distortion is investigated and the influence of phase distortion on the measurement of micro-components is discussed. To eliminate the phase distortion, a continuous wavelet transform (CWT) is employed to extract phase values from object surface modulated fringe patterns. Principle of the proposed CWT phase extraction method is described and experiments are conducted to verify the proposed method. It is shown that by the use of CWT phase extraction method phase distortion induced in conventional phase-shifting technique can be completely eliminated.     

Determination of interferometer phase distributions by use of wavelets

A new technique for directly extracting phase gradients from two-dimensional (2-D) interferometer fringe data is presented. One finds the gradients by tracking the maximum modulus of the continuous wavelet transform of the fringe data and the phase distribution that is obtained, with a small error, by integration. Problems associated with phase unwrapping are thereby avoided. The technique is compared with standard methods, and excellent agreement is found. In common with Fourier-transform methods, the technique is capable of extracting the full 2-D phase distribution from a single image.     

Fringe pattern analysis by S-transform

S-transform proposed in 1996 by Stockwell R.G is a simple and popular technique for the time–frequency analysis. It has been introduced in optical three-dimensional shape measurement, recently. In this paper, a study about applications of S-transform in the demodulation of deformed fringe patterns is performed. We focus on discussing not only the S-transform spectrum filtering technique, the S-transform ridge technique and the phase gradient calculation method based on S-transform used in fringe pattern demodulation, but also the phase unwrapping technique. In addition, a generalized S-transform was introduced to analyze fringe patterns, which is helpful to improve the measurement accuracy and flexibility of the method based on S-transform. The reconstruction results based on S-transform were compared with that on wavelet transform and windowed Fourier transform in fringe analysis.     

小波变换轮廓术的测量范围研究

利用小波“脊”处的小波系数来提取变形条纹中的相位信息可以在很大程度上抑制条纹图中有用的基频分量与零频和其它谐波频率分量的混叠,弥补了傅里叶变换轮廓术的不足。从离散信号频域分析角度,推导了变形条纹小波变换的频谱描述形式,讨论了其测量范围,包括结构条件和抽样条件。结果表明,只有在无周期内瞬时频谱混叠,即任意位置处物体瞬时高度变化满足h/xx=b<1/3条件时,和不存在抽样引起的周期间瞬时频谱混叠的抽样条件下(即一个周期内的抽样点数m≥4时),小波变换轮廓术才能正确恢复被测物体的三维面型。计算机模拟和实验验证了该结论。     

基于结构光投影的二维S变换轮廓术

S变换是一种集合了窗口傅里叶变换和小波变换优点的时频分析技术,目前一维S变换已成功应用于结构光投影的条纹相位解调中。由于二维S变换可以对图像在两个方向上进行时频分析,具有更优于一维S变换的分析和处理能力。为了完善S变换的条纹相位解调理论,将二维S变换方法引入到基于结构光投影的三维光学测量中,研究了二维S变换在条纹相位解调中的原理及应用,给出了详尽的理论分析,并同一维S变换结果进行了比较。模拟和实验都表明,在条纹图解相中,二维S变换比一维S变换提取的相位精度更高,即使在存在较严重噪声污染的情况下也表现出良好的可靠性,体现出二维S变换提取相位的优势。