一种最小化薄膜光学参数表征偏差的椭偏测量系统误差处理技术

基于对椭偏测量数据中难以消除的系统误差的作用机理分析,提出了一种新型的薄膜光学参数表征误差处理技术。建议选取薄膜椭偏角关于折射率和几何厚度的一阶偏导数,对大部分测量入射角满足符号相反或只有其中一个为零的条件的波段,剔除偏导数对全部测量入射角满足符号相同或同时为零的条件的奇点波长附近波段,作为反演表征用的椭偏测量数据采集区域,以最小化椭偏测量系统误差引起的薄膜光学参数反演表征值相对真实值的偏差大小。其本质是通过一阶偏导数筛选测量数据,来最小化椭偏测量系统误差对薄膜光学参数表征的误差传递作用。通过数值模拟实验,对比研究了该技术对不同测量入射角范围的适用性及实施技巧,以可复现的数值实验数据和合理的理论解释支持和验证了这种误差处理技术的可靠性,为薄膜在线表征和镀膜监控提供了一定的参考价值。     

椭偏光谱测量中椭偏参数的灵敏度分析

在对椭圆偏振测量的基本原理进行了简单介绍和推导后,讨论了椭圆偏振测量中椭偏参数关于薄膜参数的灵敏度以及入射角对椭偏参数的影响,并进行了具体的仿真分析,得到如下结论：椭偏参数Delta对薄膜光学常数和薄膜厚度变化的灵敏度明显高于椭偏参数Psi。在椭偏数据处理中,椭偏参数Delta的测量精度直接影响薄膜光学常数和薄膜厚度的拟合精度。为了提高椭偏参数Delta的测量精度,可以选择入射角在膺布儒斯特角附近。所得结论对高精度椭偏测量具有指导意义。     

一种任意入射角反射系数反演技术

利用声场空间变换技术反演声学材料或声反射面在任意入射角时的反射系数，需要测量靠近反射面上方两平行面上复声压。本文提出利用声强与声压幅值测量来获取复声压的相位，进而实现反射系数反演。研究表明用点声源时因有限测量尺寸而产生的误差大小可以通过采用偶极子源来减小。数值模拟结果与误差分析结果均表明了这种反演任意入射角反射系数技术的有效性。     

椭圆偏振光谱中的主角测量条件分析

对椭圆偏振光谱中的主角测量条件进行了分析。当入射角等于主角 θp 时 ,椭偏参数的相位为 90°,据此给出了当材料的介电函数已知时对θp 进行数值和解析计算的公式和方法 ,并可相应地计算出椭偏参数的幅值 ρp0 。在θp 入射角下测量可获得较高的数据精度。主角条件下椭偏参数 ρp0 及其相位Δp 的实验测量结果与计算值符合得很好。本工作给出的计算公式和方法可在其他光谱实验中获得应用。     

C波段机载合成孔径雷达海面风场反演新方法

针对基于散射计地球物理模型函数的机载合成孔径雷达(SAR)海面风场反演中存在的风向获取依赖于图像风条纹或数值预报、 散射计数据和浮标等背景场资料, 风向与SAR图像时空分辨率不匹配, 进而影响机载SAR海面风场反演精度等问题, 本文根据机载SAR对海探测特点, 研究一种适用于C波段机载SAR的海面风场反演新方法. 利用SAR图像距离向不同入射角的后向散射系数, 依据地球物理模型构造最小代价函数, 通过代价函数的求解直接从机载SAR数据同时反演出海面风速和风向. 利用论文提出的海面风场反演方法分别对仿真SAR数据和实测C波段机载SAR数据进行风向、 风速的反演误差分析及试验验证.研究结果表明, 该方法适用于机载SAR海面风场反演, 可不依赖背景风向直接反演出精度较高的风速和风向; 雷达后向散射系数误差是决定海面风速、风向反演精度的关键因素, 辐射定标精度越高则反演误差越小; 海面风速反演误差随着风速的提高而增大, 当海面风速大于18 m/s时, 风速反演误差显著增加, 而海面风向的反演误差与风速无明显关系. 关键词： 机载合成孔径雷达 海面风场 多入射角     

椭偏与光度法联用精确测定吸收薄膜的光学常数与厚度

介绍了一种同时利用椭偏仪和分光光度计精确测量薄膜光学常数的方法, 并详细比较了该方法与使用单一椭偏仪拟合结果的可靠性.采用可变入射角光谱型椭偏仪（VASE）表征了250—1700 nm波段辉光放电法沉积的类金刚石薄膜,研究发现当仅用椭偏参数拟合时,由于厚度与折射率、消光系数的强烈相关性,无法得到吸收薄膜光学常数的准确解.如果加入分光光度计测得的透射率同时拟合,得到的结果具有很好的惟一性.该方法无需设定色散模型即可快速拟合出理想的结果,特别适合于确定透明衬底上较薄吸收膜的光学常数.     

在轨空间目标光学特性宏观表征模型的反演重构

为了在天基远距离条件下反演三轴稳定空间目标表面的光学特性参数,提出了基于可见光时序光度信号分析的光学特性宏观表征模型的反演重构方法.首先,综合考虑空间目标的结构特性、表面材料特性、帆板的对日指向运动特性、光照观测几何以及光学系统特性,完善了面向在轨观测的空间目标可见光时序光度建模方法;其次,将光度模型等效为双面模型,并利用双向反射分布函数(BRDF)的多级融合模型表征复杂材料表面的光学反射特性,将BRDF对应的面积反射率乘积作为待反演参数;最后,以时序光度信号的测量值与模型值之间的差异最小为优化目标,建立线性优化方法,实现模型参数的反演.仿真实验表明,提出的模型在轨重构方法对于近轨观测条件下的本体、帆板信号的重构精度达到97%以上,验证了方法的正确性.     

教学型椭偏仪测量各向异性单轴晶体光学参数的方法研究

椭偏仪是一种常用的现代光学测量仪器,在物理实验教学中常用于测量各向同性材料的折射率、表面薄膜厚度等光学参数。本文提出一种利用教学型椭偏仪测量各向异性单轴晶体折射率等光学参数的方法。采用多入射角的方法增加系统自由度,建立数值反演模型,获得各向异性单轴晶体光学参数,并实验测量了钒酸钇晶体的折射率等光学参数。使用教学型椭偏仪测量各向异性单轴晶体光学参数,拓展了原有教学仪器的实验范围,有助于激发学生对实验的兴趣。     

椭偏与光度法联用精确测定吸收薄膜的光学常数与厚度

介绍了一种同时利用椭偏仪和分光光度计精确测量薄膜光学常数的方法, 并详细比较了该方法与使用单一椭偏仪拟合结果的可靠性.采用可变入射角光谱型椭偏仪（VASE）表征了250—1700 nm波段辉光放电法沉积的类金刚石薄膜,研究发现当仅用椭偏参数拟合时,由于厚度与折射率、消光系数的强烈相关性,无法得到吸收薄膜光学常数的准确解.如果加入分光光度计测得的透射率同时拟合,得到的结果具有很好的惟一性.该方法无需设定色散模型即可快速拟合出理想的结果,特别适合于确定透明衬底上较薄吸收膜的光学常数. 关键词： 光学常数 光谱型椭偏仪 吸收薄膜 透射率     

双层光学薄膜参数的多入射角椭偏分析方法

本文讨论了多入射角椭偏测量中光学参数的误差因子以及最佳测量条件的选取.指出,当薄膜较厚时,多入射角椭偏测量可以精确确定膜系的光学常数和几何厚度,并用二例实测结果加以证实.本文的方法也适用于分析多层光学薄膜.     

A novel determination method of thin film optical parameters with least dependence on photometric measurement systematic errors

We present a novel determination method of thin film optical parameters based on partial derivatives selection, which is with least impact of photometric measurement systematic errors on the characterization accuracy of thin film optical parameters. The spectral measurement data used in our numerical simulations are the single wavelength photometric data of P-polarization light measured at different incident angles. It is shown that, under the same level of systematic errors in the measurement data, the deviations of the fitted optical parameters values from real ones in spectral bands with opposite signs of partial derivatives for most incident angles at which measurement data are collected are much smaller than other spectral regions. The theoretical explanations are discussed. It is advisable to select spectrophotometric data from the recommended spectral bands and to remove the dangerous spectral bands according to derivatives information for optical characterization of thin films with best accuracy.     

A novel optical multilayer hydrophone with a triangular pyramid substrate

A novel concept for an optical multilayer ultrasonic hydrophone with the sensing film deposited on a triangular pyramid glass substrate is proposed.Using the calculation model for the spectral coefficients’ derivatives of a dielectric multilayer optical coating,the acousto-optic sensitivity characteristic of the hydrophone is analyzed with different measurement laser polarizations and incident angles.We present a reasonable method and adjusting strategy for the optimum working point selection of the ultrasound measurement.Analytic results show that the novel hydrophone possesses all the other merits of a plate glass substrate optical multilayer hydrophone but with improved detection sensitivity.A longer measurement time without distortion decreases the difficulty of high frequency signal circuits.Spatial split of the ultrasound signal caused by the substrate’s triangular pyramid roof simplifies the spatial spot area correction,which contributes to the accurate calibration of the hydrophone’s wideband frequency response.     

椭偏测量法的油膜紫外可见-近红外光谱光谱偏振特性研究

为实现水面溢油目标的偏振遥感,选择合适的波段和观测角度,需要油膜的光谱偏振特性数据作支撑。在实验室采用椭偏测量的方法,针对不同厚度机油油膜和纯净水作为背景样本,测量了不同观测角度下从紫外到近红外波段（270~900 nm）的镜面反射光谱偏振参数：辅助角ψ和相位差Δ,并对在相同条件下油和水的测量结果作对比。分析表明除布儒斯特角附近位置外,不同厚度的油膜与水的起偏特性在各观测角都存在差异。通过在45°入射角所测的ψ和Δ,得到水/油样本的光谱折射率和消光系数,水折射率经过偏移修正后,与Schiebener水折射率模型的标准差为3×10-5。根据之前得到的油/水参数,对油膜在水背景的物理现象作薄油膜理想介质层建模,用菲涅耳定律仿真自然光的镜面反射,发现在全观测波段相同入射光条件下油膜的反射光存在明显的偏振度（DOP）或偏振角（AOP）光谱偏振可观测性。模型与实际测量结果对比发现：在300~350 nm仿真结果和实际测量相符,油膜的反射光偏振性质趋近于油样本;在350~550 nm,油膜模型仿真结果比实验的干涉效应更明显,油膜实验数据表明其光谱起偏性质依然与油保持一致;在大于550 nm直到近红外波段,实验干涉效应开始显著。说明油膜比油有更强的散射或吸收特性,辨识参数得到油膜的消光系数存在不同于油的随波长先变小后变大的性质。总之,利用光谱椭偏测量方法,通过多波段、多角度测量,分析液体样本的光谱偏振特性和折射率等性质;偏振观测的恰当角度与油/水的布儒斯特角有关,在布鲁斯特角之外的位置观测,油膜的光谱椭偏角相较水都存在分辨能力;对小于200 μm的薄油膜近红外波段可重复性较差,而紫外和可见蓝紫波段相比之下有很好的可重复性和区分性,更适合于对甚薄油膜表面种类的遥感观测。该实验涉及的方法可以用于其他油种油膜的偏振光谱测量,实验数据为偏振遥感工作的波段选择与观测角度提供提供参考。     

The impact of the orientation angles uncertainty of instrument polarizers on polarization measurement accuracy

Improving the polarimetric measurement accuracy of the polarization CCD camera is a fundamental task in the remote sensing of the earth. This paper presents a simple approach for estimating the degree of polarization errors caused by the orientation angles uncertainty of the instrument polarizers. We show that the measured degree of polarization error for a certain orientation angle of the instrument polarizers in the same spectral band depends on the polarization state (polarization angle or degree of polarization) of the incident light. In order to evaluate the polarimetric measurement performance of the instrument, the average degree of polarization error is defined based on the assumption that the incident light beams have equal polarization angle probability. The simulated test showed that the average degree of polarization errors of the 3 polarized spectral bands in the airborne polarization CCD camera is nearly equal because of the same orientation angles uncertainty of the instrument polarizers, though the instrument polarizers in the 3 polarized spectral bands are equipped a little differently; the instrument often encounters a large average degree of polarization errors for the large degree of polarization of the incident beams.     

Polarization modulation imaging ellipsometry for thin film thickness measurement

A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to measure precisely the thickness of thin film. Five images are collected sequentially by CCD camera with respect to five pre-determined azimuth angles of a quarter wave plate (QWP) during measurement. Then two-dimensional (2-D) distributions of the ellipsometric parameters ψ and Δ over the full dynamic range are obtained. Conceptually, PM imaging ellipsometer integrates the features of phase shift interferometry with conventional photometric ellipsometry by rotating the QWP sequentially to produce polarization modulation that is able to measure the thickness of a thin film in two dimensions precisely and quickly. The basic principle of PM imaging ellipsometer is derived wherein features such as common path configuration, full dynamic range of measurement, and insensitive to non-uniform response of the CCD are analyzed. The experimental results verify the ability and performance of PM imaging ellipsometer on 2-D thin film thickness, while the errors regarding the ellipsometric parameters measurements are discussed.     

入射光照对典型光刻胶纳米结构的光学散射测量影响分析

作为一种快速、低成本和非接触的测量手段,光学散射测量在半导体制造业中的纳米结构三维形貌表征方面获得了广泛关注与运用.光学散射测量是一种基于模型的测量方法,在纳米结构待测参数的逆向提取过程中,为降低参数之间的耦合性,通常需要将结构的光学常数作为固定的已知量,即假设结构的材料光学常数不受光学散射仪入射光照的影响.事实上,这一假设对于半导体制造业中的绝大多数材料是成立的,但某些感光材料的光学常数有可能随着入射光的照射时间增加而发生改变,而由此产生的误差会在一定程度上传递给待测形貌参数的逆向提取值.本文针对聚甲基丙烯酸甲酯光刻胶薄膜培片和光栅结构分别开展了光学散射测量实验与仿真研究,结果表明该光刻胶材料的光学常数随着入射光照时间增加而变化,进而导致光栅结构形貌参数的提取结果较大地偏离于真实值,不容被忽视.这一研究发现将为更进一步提高光刻胶纳米结构三维形貌参数的测量精确度提供理论依据.     

灵敏度控制思想在主动膜系设计中的快速实现算法

 基于斜入射薄膜制备实践中镀膜误差对光谱性能的严重退化影响的认识,提出了一种基于灵敏度控制思想的主动膜系设计方法。在深入分析了镀膜中膜层结构参数误差的分布规律的基础上,运用膜系光谱系数关于膜层参数的导数计算的解析模型,建立了膜系灵敏度的定量计算模型和快速实现算法。以一45°入射高精度消偏振增透膜的设计实验为例,探讨了灵敏度控制思想在膜系设计中的可行性、快速性和有效性。结果表明,这一新型设计方法不会显著增加程序时间消耗,能获得具有良好可镀制性能的薄膜,对于正入射和宽角度入射膜同样适用,而且可以避免昂贵的失败试镀和采样,有助于缩短新薄膜的生产周期,特别是对于高精度斜入射薄膜的重复性制备具有重要意义。     

Simultaneous estimation of aerosol optical constants and size distribution from angular light-scattering measurement signals

The angular light-scattering measurement(ALSM) method combined with an improved artificial bee colony algorithm is introduced to determine aerosol optical constants and aerosol size distribution(ASD) simultaneously. Meanwhile, an optimized selection principle of the ALSM signals based on the sensitivity analysis and principle component analysis(PCA)is proposed to improve the accuracy of the retrieval results. The sensitivity analysis of the ALSM signals to the optical constants or characteristic parameters in the ASD is studied first to find the optimized selection region of measurement angles. Then, the PCA is adopted to select the optimized measurement angles within the optimized selection region obtained by sensitivity analysis. The investigation reveals that, compared with random selection measurement angles, the optimized selection measurement angles can provide more useful measurement information to ensure the retrieval accuracy. Finally,the aerosol optical constants and the ASDs are reconstructed simultaneously. The results show that the retrieval accuracy of refractive indices is better than that of absorption indices, while the characteristic parameters in ASDs have similar retrieval accuracy. Moreover, the retrieval accuracy in studying L-N distribution is a little better than that in studying Gamma distribution for the difference of corresponding correlation coefficient matrixes of the ALSM signals. All the results confirm that the proposed technique is an effective and reliable technique in estimating the aerosol optical constants and ASD simultaneously.     

Investigation of transmittance property of Palladium thin films fabricated by pulsed laser deposition with polarization using single layer model

In this paper the structure, morphology and optical properties of Pd thin films deposited on glass substrate by pulse laser deposition technique at two different substrate temperatures have been investigated. The fabricated films were characterized by various methods such as XRD, AFM, and UV-vis-NIR spectroscopy. The influence of surface roughness and angle of incidence with p polarization was investigated experimentally by optical property of palladium (Pd) thin films of two different thicknesses and rms roughness from transmission measurement in the visible spectral range. It has been shown that the experimental transmittance spectra agree well with their theoretical values for absorbing Pd thin film. The transmittance of thin film increases with increase in incident angle for the same sample.