基于子孔径拼接的衍射干涉靶丸形貌检测技术

为实现惯性约束聚变实验中核心部件球形靶丸表面形貌的高精度、高效率、无遗漏检测,建立了基于子孔径拼接和衍射干涉技术相结合的靶丸形貌测量装置,给出了测量的基本原理及系统单孔径横向分辨率的计算方法,并对靶丸旋转扫描时子孔径的排布进行了划分。针对点云数据横向间隔过大导致匹配算法迭代收敛速度缓慢,甚至不收敛的问题,提出以虚拟的极小半径代替实际曲率半径,将点云进行横向压缩的方法,在保持形貌特征不变的同时提高算法的匹配速度和准确性。最后,对直径1 mm的镀金球靶进行了实际测量,得到拼接后相对形貌误差峰谷值和均方根值分别为1.332和0.479的检测结果,可以同时获得表面形貌的整体起伏特征,以及局部的形貌细节。     

靶丸内表面轮廓的白光共焦光谱测量技术

靶丸内表面轮廓是激光核聚变靶丸的关键参数,需要精密检测。本文首先分析了基于白光共焦光谱和精密气浮轴系的靶丸内表面轮廓测量基本原理,建立了靶丸内表面轮廓的白光共焦光谱测量方法。此外,搭建了靶丸内表面轮廓测量实验装置,建立了基于靶丸光学图像的辅助调心方法,实现了靶丸内表面轮廓的精密测量,获得了准确的靶丸内表面轮廓曲线;最后,对测量结果的可靠性进行了实验验证和不确定度分析,结果表明,白光共焦光谱能实现靶丸内表面低阶轮廓的精密测量,其测量不确定度优于0.1μm。     

基于白光干涉的ICF靶丸表面缺陷测量方法

针对激光惯性约束聚变实验中的靶丸等微球表面缺陷的真实高度测量问题,为解决现有测量方法存在的缺陷跃变处2π整数倍相位缺失问题,提出一种基于垂直扫描白光干涉技术的零位显微干涉测量方法。该方法采用白光球面零位干涉思想,通过垂直扫描球面干涉获取全视场白光干涉图,然后运用七步移相算法及蝙蝠翼校正算法实现靶丸表面缺陷的形貌计算,最后将白光干涉测量法与激光干涉测量法进行对比实验。结果表明,白光干涉法能够有效解决激光干涉法在缺陷跃变处的2π整数倍相位缺失问题,实现靶丸表面缺陷的真实高度测量,从而扩展靶丸类微球表面缺陷的测量范围。     

激光CCD复合测量方法在ICF靶丸球度误差检测中的应用

 提出一种基于激光与CCD的复合式测量方法,结合二者的优势,通过测量同一标准球球心的位置标定出了二者光轴的位置关系,有效地把二者测量的数据融合到同一个坐标系中,从而实现高精度的3维测量。在对所测靶丸表面数据进行去噪处理后,采用拟牛顿法,以CCD所测惯性约束聚变(ICF)靶丸直径作为部分待求参数的初始值,可以有效避免该方法容易陷入局部最优化的缺陷。从而快速、准确地实现靶丸球度误差的测量。分别在两种测量模式下进行了实验,结果验证了该方法的有效性与鲁棒性。     

用原子力显微镜4π旋转技术测量靶丸表面粗糙度

原子力显微镜靶丸4π旋转装置,可以将靶丸在夹持状态下实现4π方向旋转,便于原子力显微镜对靶丸表面任一部分做扫描测量。应用该装置对各种靶丸的表面形貌进行了测量,测量结果表明,靶丸外表面粗糙度小于10nm,内表面粗糙度小于20nm。     

用原子力显微镜4π旋转技术测量靶丸表面粗糙度

 原子力显微镜靶丸4π旋转装置,可以将靶丸在夹持状态下实现4π方向旋转,便于原子力显微镜对靶丸表面任一部分做扫描测量。应用该装置对各种靶丸的表面形貌进行了测量,测量结果表明,靶丸外表面粗糙度小于10nm,内表面粗糙度小于20nm。     

用原子力显微镜4π旋转技术测量靶丸表面粗糙度

原子力显微镜靶丸４π旋转装置,可以将靶丸在夹持状态下实现４π方向旋转,便于原子力显微镜对靶丸表面任一部分做扫描测量。应用该装置对各种靶丸的表面形貌进行了测量,测量结果表明,靶丸外表面粗糙度小于１０ｎｍ,内表面粗糙度小于２０ｎｍ。     

靶丸表面轮廓形貌AFM精密测量及特性评价

 建立了由改造的原子力显微镜(AFM)、精密回转气浮轴系、辅助转位轴系等组成的靶丸表面形貌精密测量系统，气浮轴系的回转精度达0.049 μm，实现了对激光核聚变靶丸3个正交方向上完整圆周迹线的测量。对选定靶丸的测量数据进行了球度、表面粗糙度及功率谱分析。结果表明：其球度值为0.42 μm；模数范围为2~10，11~50，51~100及101~1 000对应的表面粗糙度值平均为105.7， 12.2， 6.2, 18.25 nm；并得出了平均1维功率谱-模数关系曲线。     

ICF靶丸装配误差检测

针对激光惯性约束聚变装置中靶丸装配误差检测困难、要求精度高的特点,研制了一套用于微靶装配参数检测的测量系统。提出了一种基于激光与CCD的复合式测量方法,建立了二者数据融合的数学模型,通过标定空间位置关系有效地把二者的测量数据融合到同一个坐标系中,从而实现了高精度三维测量。分两种情况讨论了靶丸装配误差的检测方法。实验结果验证了这两种方法的可行性,并比较了两种方法的测量精度,其极限测量误差均不超过3 m。     

条纹形状法在线表征聚变靶丸参数

基于低振动低温恒温器,建立了一套用于冷冻靶参数测量的马赫-曾德尔激光干涉显微系统。考虑光折射效应,推导出了靶丸光程差随入射角变化的完整表达式。在低温环境中,当燃料固化或完全气化时,分别获取了靶丸中心存在条纹时的干涉图。基于干涉条纹形状分析法,利用光程差表达式分别计算了靶丸壁厚及靶丸内燃料气体浓度。同时,用非破坏性方法对气体浓度测量结果进行了实时标定。两种方法给出的结果之间的相对误差小于5%。     

The surface tension of liquid Cu-Fe-Sb alloys

The results of study on the influence of temperature and iron and antimony on the surface tension of liquid ternary Cu-Fe-Sb systems are presented. The measurements were carried out with the sessile drop method, in a broad range of the alloy additions concentration (Fe and Sb). It was demonstrated that the surface tension varies as a linear function of temperature and concentration of iron. It was also demonstrated that antimony, in examined alloys, shows the properties characteristic of a surface-active substance, significantly reducing the surface tension value. The changes of the surface tensions as a function of concentration of antimony were described with the Szyszkowski's equation. Composition of surface layer, enriched with an antimony, was determined basing on the model, which used data regarding properties of binary systems. The surface tension values of Cu-Fe-Sb systems was also computed from model and compared with experimental data. A good agreement was obtained.     

Modification of three dimensional topography of the machined KDP crystal surface using wavelet analysis method

The wavelet analysis method has been extensively employed to analyze the surface structures and evaluate the surface roughness. In this work, however, the wavelet analysis method was introduced to decompose and reconstruct the sampled surface profile signals in the cutting direction that achieved by SPDT (single point diamond turning) operation, and the surface profile signals in tool feeding direction were reconstructed with the approximate harmonic functions directly. And moreover, the orthogonal design method, i.e. the combination design of general rotary method, was resorted to model the variations of the independent frequency and amplitude of different simulated harmonic signals in the cutting and tool feeding directions. As expected resultantly, a novel 3D surface topography modeling solution was established, which aims to predict and modify the finished KDP (potassium dihydrogen phosphate or KH₂PO₄) crystal surfaces. The validation tests were carried out finally under different cutting conditions, and the collected average surface roughness in any case was compared with the corresponding value as predicted. The results indicated the experimental data were well consistent with the predictions, and only an average relative error of 11.4% occurred in predicting the average surface roughness.     

Surface and transport properties of Au-In liquid alloys

Thermodynamic quantities on Au-In liquid alloys have been used as the input data for the interaction parameter calculations in the framework of the complex formation model (CFM). Once the interaction energies are computed the surface (surface tension and surface composition) and transport properties (chemical diffusion and viscosity) as well as the microscopic functions (concentration fluctuations in the long-wavelength limit and chemical short-range order parameter) have been calculated. The concentration and temperature dependent surface tension values have been compared with our new set of experimental data, obtained by the large drop method in the temperature range of T = 1273-1493 K. The anomalous change of surface tension for some alloy compositions may be attributed to a retention of order in the Au-In melts which is similar to the atomic arrangement in solid Au-In.     

Ultra-smooth polishing of high-precision optical surface

A new method of ultra-smooth uniform polishing was presented, which can avoid high-precision surface figure getting worse after ultra-smooth polishing. At first, the fundamental and process were introduced. Then the process was simulated with “Gauss” and “V” type removal function. It shows that there will be no significant influence on optical surface figure after ultra-smooth uniform polishing with any type removal function. To demonstrate the process, a high-precision Ø100 mm fused silica flat optical element was polished, which was prior figured by IBF. Its surface figure accuracy root-mean-square (rms) value is improved from initial 3.624 nm to final 3.393 nm, the mid-spatial frequency surface roughness rms value is improved from initial 0.477 nm to final 0.309 nm, and the high-spatial frequency surface roughness rms value is improved from initial 0.167 nm to final 0.0802 nm. At last, the surface quality of the lens was analyzed by power spectral density (PSD). The result indicates that the surface roughness of high-precision optical element could be improved by ultra-smooth uniform polishing method without the surface figure destroyed.     

Thermodynamics and surface properties of liquid Cu–B alloys

The study of the thermodynamic and the surface properties of liquid Cu–B alloys can help better understanding of a complex interfacial chemistry related to liquid Cu–brazes in contact with boride substrates. Despite a simplicity of the Cu–B phase diagram, only a few thermodynamic data are available in the literature, while in the case of the surface properties a complete lack of data is evident. The quasi-chemical approximation (QCA) for the regular solution has been applied to describe the mixing behaviour of liquid Cu–B alloys in terms of their thermodynamic and surface properties as well as the microscopic functions. In view of joining processes related to liquid Cu–brazes/solid boride systems a particular attention is paid to the surface properties of the Cu-rich part of the system and the calculated values are substantiated by the new surface tension experimental data of liquid Cu and Cu–10 at.% B alloy. The tests have been performed by the sessile-drop method under the same experimental conditions. Considering the experimental uncertainties, the effect of oxygen on the surface tension of liquid Cu and Cu–10 at.% B alloy has been analysed by simple model that combines the physical property data included in Butler’s equation with the oxygen solubility data and it gives the same results as Belton’s adsorption equation.     

Surface modification of gold nanoparticles and their monolayer behavior at the air/water interface

Gold nanoparticles were prepared by two different methods. The first method was chemically grafting the particles with different lengths of alkylthiol (C₆SH, C₁₂SH and C₁₈SH). For the second method, the Au particles were surface modified first by mercaptosuccinic acid (MSA) to render a surface with carboxylic acid groups which play a role to physically adsorb cationic surfactant in chloroform. This method was termed physical/chemical method. In the first method, the effects of alkyl chain length and dispersion solvent on the monolayer behavior of surface modified gold nanoparticles was evaluated. The gold nanoparticles prepared by 1-hexanthiol demonstrated the narrowest size distribution. Most of them showed narrower particle size distributions in chloroform than in hexane. For the physical/chemical method, the particles can spread more uniformly on the water surface which is attributed to the amphiphilic character of the particles at the air/water interface. However, the particles cannot pack closely due to the relatively weak particle-particle interaction. The effect of alkyl chain length was also assessed for the second method.     

Capabilities of using white x-rays for the reconstruction of surface morphology from coherent reflectivity

We present a new method to reconstruct the surface profile of a sample from coherent reflectivity data of a white x-ray beam experiment. As an example the surface profile of a laterally confined silicon wafer has been reconstructed quantitatively from static speckle measurements using white coherent x-rays from a bending magnet in the energy range between 5 < E < 20 keV. As a consequence of using white radiation, speckles appear in addition to the Airy pattern caused by scattering at the entrance pinhole. Nevertheless, the surface profile of a triangularly shaped specimen was reconstructed considering sufficient oversampling between the beam-footprint and the effective sample width. For the profile reconstruction the Error-Reduction phase retrieval algorithm was modified by including the spectral illumination function and a Fresnel propagator term. The simultaneous use of different x-ray energies having different penetration depth provides information on the evolution of the surface profile from the near-surface towards the bulk. The limitations of present experiment can be overcome using white or pink radiation from a source with higher photon flux.     

Long range interactions between micro spheres and alloy surfaces in water changed by ion implantation

Ion implantation was adopted to change the surface potentials of samples made of aluminum bronze. The interactions between the SiO₂ particles and the sample surfaces in water were changed from attractive to repulsive. According to the surface element integration method, this interaction was simulated and the electrostatic double layer force was considered to be the dominated factor. This long range repulsive interaction was proved to have effect on preventing micro particles approaching the alloy surface by the fluorescent particles adhesion experiment, and the technology of ion implantation may have potential applications in adhesion resistance and abrasion reduction for alloys running in water.     

高光洁度玻璃基片的表面散射和体散射测量

 提出了一种利用总积分散射（TIS）测量K9玻璃基片表面散射和体散射的实验方法。首先采用磁控溅射技术在基片表面沉积厚度为几十nm的金属Ag薄膜，然后将基片的表面和体区分开考虑，通过TIS测得了基片上下表面的均方根粗糙度， 进而求得基片的总散射和表面散射，最后计算得到了体散射。分别利用TIS和原子力显微镜（AFM）测量了3个样品上表面所镀Ag膜的均方根粗糙度，两种方法所得的均方根粗糙度的数值相差不明显，差值分别为0.08，0.11和0.09 nm, 表明TIS和AFM的测量结果相一致。利用该方法测得3块K9玻璃基片的总散射分别为6.06×10^-4，5.84×10^-4和6.48×10^-4，表面散射介于1.25×10^-4~1.56×10^-4之间，由此计算得到的体散射分别为3.10×10^-4，3.30×10^-4和3.61×10^-4。